| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Equipment Introduction
The RJ150-XK is an impressive tubular diffusion/oxidation furnace specifically engineered for R&D applications across enterprises, universities, and research institutes. It adeptly supports a diverse range of processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities perfect for cutting-edge material research
Precision temperature control mechanisms ensuring consistent and reliable results
Compact design tailored for optimized lab environments
Product Features:
1. Proficient in handling a wide array of processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Employs a robust industrial computer + PLC system for seamless automation of furnace temperature, boat movement, gas flow, and valves, facilitating fully automated process control.
3. Boasts an intuitive human-machine interface, permitting effortless modification of control parameters and real-time observation of multiple process statuses.
4. Provides numerous process pipelines for user-friendly selection.
5. Comes equipped with comprehensive software capabilities, including self-diagnostic tools designed to significantly minimize maintenance time.
6. Features automatic adjustments for the constant temperature zone and cascade control for precise temperature regulation within the reaction tube.
7. Includes sophisticated alarms and protective functions against over-temperature, thermocouple breakage and short circuits, as well as deviations in process gas flow.
8. Offers customizable configurations to align with specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The pioneering vertical dual-zone CVD system primarily comprises:
A high-performance 1200°C dual-zone tube furnace
A sophisticated 3-channel mass flow controller (MFC) gas supply system
A powerful 2L/s vacuum pump complemented by related connecting components
The system is adeptly equipped with directional and swivel casters at its base, ensuring a compact footprint combined with flexible mobility.
Crafted meticulously for precision and reliability, the most advanced CVD processes, this state-of-the-art system is perfectly suited for leading universities, pioneering research centers, and top industrial manufacturers to perform groundbreaking experiments and high-quality production involving cutting-edge chemical vapor deposition techniques.
(Note: Presented with structured clarity, ensuring technical precision and a seamless English narrative.)
Fluidized Bed Tube Furnace: Specifications at a Glance
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: A sophisticated 3-Channel Mass Flow Control System ensures precision.
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features that Set Us Apart:
User-friendly advanced touchscreen control equipped with comprehensive data recording capabilities
Ingenious dual-zone vertical design crafted for optimal thermal regulation
A fully integrated and complete gas flow control system comes as standard
A design focused on safety, offering multiple layers of protection features
Customizable components tailored to meet specific and unique research demands
Note: Specifications are adaptable to your precise requirements. This system seamlessly marries precision temperature control with highly efficient gas delivery, perfect for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components: Engineered for Excellence
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application: Unmatched in Versatility
This cutting-edge dual-zone sliding-track CVD tube furnace boasts a sophisticated rail-guided sliding design, enabling rapid and efficient heating and cooling of materials by moving the furnace horizontally. It offers connection to six distinct gas sources, with a seamless flow measurement and control experience through a touchscreen-operated 6-channel mass flow controller (MFC).
This high-performance high-temperature CVD system is meticulously designed for renowned universities, innovative research institutions, and leading industrial manufacturers to execute advanced experiments and high-tech production related to sophisticated chemical vapor deposition (CVD) processes.
Ingenious Sliding-track mechanism ensures rapid thermal cycling and efficiency
Exceptional Multi-gas compatibility (6 independent, expertly controlled channels)
Precision flow control achieved with an intuitive touchscreen MFC interface
Versatile applications abound in groundbreaking research and small-batch, high-quality production
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z): Precision Beyond Compare
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System: A Benchmark of Excellence
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories: Included for Your Convenience
Quartz furnace tube (1): Robust and Reliable
Vacuum flange set (1): Essential and Efficient
Key Features: Exceeding Expectations
Unique sliding mechanism that enables swift and effective thermal cycling
Advanced six-channel precision gas control system
Research-grade vacuum capabilities ensure optimal performance
Complete turnkey solution featuring all necessary accessories
Industrial-grade construction reinforced with comprehensive safety protections
Tube stoppers (2): Promoting Safety and Efficiency
O-ring seals: Ensuring Integrity
Protective gloves (1 pair): Safety First
Crucible hook (1): Convenience in Handling
PTFE tubing (3m): High-Quality and Durable
Hex keys (2): Essential Tools
Operation manual: Comprehensive and User-Friendly
This system is ingeniously designed for CVD Processes: Harness the cutting-edge capabilities of our state-of-the-art equipment specifically designed to revolutionize chemical vapor deposition (CVD) processes.Applications include a diverse range of advanced material growth techniques, such as:
Silicon Carbide Coating: Achieve unparalleled surface protection with our precision-driven silicon carbide coating process.
Conductivity Testing of Ceramic Substrates: Ensure optimal conductivity and performance with our rigorous testing methodologies for ceramic substrates.
2D Material Growth: Expand the horizons of material science with our sophisticated methods for the growth of two-dimensional materials.
Controlled Growth of ZnO Nanostructures: Master the art of nanotechnology with our precise ZnO nanostructure growth techniques.
Atmosphere Sintering of Ceramic Capacitors (MLCC): Achieve superior electrical performance in multilayer ceramic capacitors with our atmosphere sintering expertise.
It also serves as an exceptional platform for specialized applications, acting as a dedicated graphene film growth furnace. For graphene preparation, the furnace boasts a pioneering Sliding Rail Base Design: This innovative feature providesmanual lateral movement, enabling the tube's exposure to room temperature for swift, efficient rapid cooling.This attribute ensures your processes maintain momentum.
This equipment is particularly engineered for excellence in CVD experiments necessitating expedited heating and cooling rates,making it the preferred choice for:
High-Efficiency Graphene Synthesis: Propel your graphene production to new heights with unmatched efficiency.
Other CVD Applications: Ideal for any scenario requiring rapid thermal cycling, ensuring versatility in your research endeavors.
Key Advantages: Discover the incredible benefits of our advanced system, including:
Precision Temperature Control: Meticulously manage temperature for the sensitive growth of materials. This ensures optimal results tailored to your specific needs.
Unique Sliding Mechanism: A breakthrough in processing speed, this mechanism accelerates your workflows to deliver faster, consistent outcomes.
Versatile Applications: Seamlessly apply our furnace's capabilities across diverse fields, supporting cutting-edge research in advanced materials.
Optimized for both graphene and general CVD processes, amplifying productivity and innovation.
Sliding Rail Tube Furnace Specifications: Detailed specifications outline the technical prowess of our system.
Furnace Section: Explore the core of our furnace, engineered for excellence.
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply: Empower your operations with reliable energy solutions.
| Input Power | Single-phase 220V, 50Hz, 3KW | The backbone of our system's robust power management.
Vacuum System: Ensure a controlled environment with our advanced vacuum technology.
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System: Sophisticated control of gas flow for precise experimental conditions.
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes: Stay informed with crucial operational guidelines and safety protocols.
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications: Our commitment to quality and safety is evidenced by our certifications:
| ISO Certification | CE Certification | Stands as a testament to our adherence to international standards.
Safety Precautions: Safeguard your team and equipment by adhering to our comprehensive safety measures:
Do not open the furnace chamber when the temperature exceeds 200°C, ensuring operator safety. This prevents personal injury by maintaining operational safety standards.
Avoid tube pressure exceeding 0.02MPa (absolute pressure) to prevent equipment damage, ensuring longevity and reliability of the system during high-pressure operations.
Warning: Strict compliance with safety measures is mandatory to avoid risks. Failure to follow these precautions may result in severe consequences, such as:
Serious personal injury, necessitating utmost care and attention.
Equipment damage, potentially compromising the integrity of your work.
Safety hazards, which can be mitigated through vigilant adherence to guidelines.
When furnace temperature exceeds 1000°C, avoid vacuum conditions by maintaining atmospheric pressure inside the tube, ensuring safe and stable operational conditions for high-temperature processes.
Avoid closing both inlet and outlet valves simultaneously during sample heating. If valve closure is unavoidable, take immediate action by:
Continuously monitoring pressure gauge readings,
Opening the exhaust valve immediately if pressure surpasses 0.02MPa,
thereby preventing dangerous situations such as tube rupture or flange ejection.
Equipment Application & Features: Engineered for the pinnacle of CVD processes,
This high-temperature CVD tube furnace, designed for comprehensive chemical vapor deposition (CVD) processes, includes:
Silicon Carbide (SiC) Coating: Delivering robust surface enhancements.
Conductivity Testing of Ceramic Substrates: Unmatched precision in performance analysis.
Controlled Growth of ZnO Nanostructures: Elevating nanotechnology frontiers.
Atmosphere Sintering of Ceramic Capacitors (MLCC): Refining capacitor reliability and efficiency.
Primary Users:
Esteemed institutions such as universities, research centers, and cutting-edge industrial manufacturers, who are pioneering the future in vapor deposition experiments and production, will find this machine indispensable.
Key Specifications:
Ultra-resilient Alumina (AlO) furnace tube, designed to withstand extreme temperatures of up to 1600°C, ensuring durability and reliability.
Ingenious design capable of operating under vacuum and atmospheric conditions, broadening its application scope.
Equipped with a high-performance MoSi (molybdenum disilicide) heating element, delivering unparalleled efficiency and thermal performance.
The furnace chamber boasts ceramic fiber insulation, offering superior thermal uniformity and maximizing energy efficiency.
Advantages:
Exceptional high-temperature stability with a precision of ±1°C, ensuring consistent and reliable outcomes.
Experience rapid heating and cooling, coupled with outstanding heat retention for optimal operational efficiency.
Designed for safe and user-friendly operation, making it accessible even for less experienced users.
Versatile design tailored for advanced materials research, opening new possibilities in scientific exploration.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Remarkable ultra-high temperature capability reaching 1700°C, powered by MoSi heating elements for superior performance.
Precision multi-zone temperature control with an accuracy of ±1°C, allowing for meticulous thermal management.
Programmable 30-segment thermal profiles provide flexibility and control over heating processes.
Comprehensive gas mixing system with 4-channel MFCs, enabling precise gas delivery for various applications.
Industrial-grade vacuum performance enhances operational effectiveness and reliability.
Safety Precautions:
Avoid opening the furnace chamber when the temperature is at or above 200°C to prevent personal injury. to prevent personal injury.
Ensure tube pressure does not exceed 0.02MPa (absolute pressure) during operation to prevent equipment damage from overpressure. during operation to avoid equipment damage from overpressure.
Warning: Neglecting to follow these precautions may lead to:
Serious personal injury, compromising the safety of operators.
Equipment damage, resulting in costly repairs and downtime.
Potential safety hazards, putting the entire operation at risk.
When furnace temperature surpasses 1000°C, ensure the tube is not under vacuum to maintain atmospheric pressure inside. - maintain atmospheric pressure inside the tube.
Avoid simultaneously closing both inlet and outlet valves during sample heating to prevent pressure build-up. If it becomes necessary to close the valves:
Constantly monitor pressure gauge readings to ensure safe operation.
Immediately open the exhaust valve if the absolute pressure exceeds 0.02MPa, preventing hazardous situations.
Prevents hazardous situations (tube rupture, flange ejection, etc.)
Equipment Description
This advanced system integrates the following components:
A sophisticated gas flow control system for precise gas management.
Innovative liquid injection system to accommodate diverse material processing.
Multi-stage temperature-controlled growth zones for tailored processing conditions.
A robust water cooling system ensures optimal operating conditions and extends equipment lifespan.
CNT Growth Furnace Specifications:
Maximum operating temperature: 1400°C, continuously adjustable from 0-1400°C for versatile application potential.
Vertical thermal field distribution with dual-zone temperature control for enhanced precision and reliability.
Top-mounted liquid injection port with flow guide components, facilitating seamless material introduction.
This state-of-the-art CNT/thin-film CVD equipment enables:
Continuous, uninterrupted growth processes for consistent and high-quality results.
Precise thermal management for controlled nanostructure synthesis, pushing the boundaries of material science.
Integrated liquid/gas phase delivery system ensuring comprehensive and versatile processing capability. Designed for intricate material deposition, this state-of-the-art machine offers unparalleled precision and efficiency.
Specialized components for synthesizing Carbon Nanotubes (CNTs) ensure superior quality and performance.
Exploring the Technical Specifications - This Carbon Nanotube/Nanowire CVD Growth Furnace is engineered for precision in the growth of nanomaterials.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Manufactured with high-grade Stainless Steel Flange, ensuring robust and reliable operation.
The system is equipped with a stainless steel vacuum flange assembly, complete with stainless steel needle valves and a mechanical pressure gauge. The armored flange facilitates thermocouple extension to the inlet, ensuring precise temperature monitoring.
Discover the Key Features that set this equipment apart:
Utilizes a high-purity alumina tube to guarantee contamination-free growth of your materials.
Offers precision temperature control (±1°C) across an extensive 800mm uniform zone for consistent results.
Note: All specifications are open to technical verification. Expertly designed for advanced nanomaterial synthesis under precisely controlled atmospheres.
Equipped with robust SiC heating elements, this machine is crafted for ultra-high temperature operations.
Features a comprehensive gas/vacuum interface equipped with advanced measurement capabilities.
Introducing the Equipment: A blend of innovation and technology.
The LCD Touchscreen CVD High-Temperature Furnace is a sophisticated tube furnace specially engineered for CVD processes, featuring cutting-edge technology such as:
A double-layer shell structure integrated with an air-cooling system, ensuring the surface temperature remains below 55°C for optimal safety.
Utilizes 30-segment PID programmable intelligent temperature control enhanced with phase-angle firing to achieve precise and consistent heating.
The chamber is lined with high-quality alumina polycrystalline fiber to ensure excellent thermal insulation and uniform temperature distribution throughout.
Applications that benefit from this technology include:
Silicon carbide (SiC) coatings for enhanced durability.
Accurate conductivity testing of ceramic substrates.
Facilitates controlled growth of ZnO nanostructures for research and development.
Enables atmosphere sintering of ceramic capacitors (MLCC) with precision.
Key Advantages of our cutting-edge furnace include:
A user-friendly touchscreen interface that simplifies operation.
An energy-efficient thermal design that reduces operational costs.
Delivers research-grade temperature uniformity for consistent results.
Highly versatile, suitable for advanced material processing across various applications.
Provides fully automated operation with unmatched unattended capability for optimized performance.
High-Temperature Furnace Specifications at a Glance:
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features that make a difference:
Ultra-clean alumina-coated chamber designed for contamination-sensitive processes. Ensures the integrity of your materials with utmost precision.
Precision 3-zone temperature monitoring (±1°C)
Delivers research-grade vacuum capability with precision down to 10³ Pa, ensuring optimal conditions.
Incorporates complete gas flow control with triple MFC channels for flawless performance.
Built with industrial-grade components that promise extended durability and reliability.
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