| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a state-of-the-art high-vacuum tubular furnace, masterfully engineered with a quartz chamber and impeccable vacuum flanges. Utilizing premier halogen lamp heating technology, it attains unparalleled rapid heating rates climbing swiftly to 50°C per second, and showcases advanced PID automatic control featuring 30 customizable programmable segments.
Tailored explicitly for the annealing of semiconductor or solar cell substrates, this high-temperature marvel of a tubular furnace facilitates rapid thermal processing of samples within vacuum or meticulously controlled atmosphere environments. It stands as a pillar of innovation, extensively utilized in renowned university laboratories as well as cutting-edge industrial research facilities for a spectrum of advanced applications including:
Thin-film deposition
Rapid annealing of diverse materials
Silicidation
Diffusion
Crystallization
Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: We offer customization of sizes meticulously tailored to meet specific customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
Ingeniously designed, the sliding tube furnace features an innovative pair of sliding rails beneath, accommodating two tube furnaces for synchronized movement. This architectural brilliance allows the furnaces to glide left and right, achieving phenomenal rapid cooling. Aptly serving various environments, including vacuum, atmospheric, and air conditions, this RTP rapid annealing furnace is pivotal in processes such as rapid annealing, silicidation, diffusion, crystallization, densification, and more for a plethora of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The sliding three-zone tube furnace is a sophisticated rapid thermal annealing furnace, boasting an 80mm outer diameter quartz tube and a maximum temperature of 1200°C. Equipped with strategically positioned sliding rails, it facilitates seamless movement across the tube for rapid, efficient heating and cooling transitions.
For unrivaled heating speed, preheat the furnace to your desired temperature, then skillfully slide it over the sample for precision exposure. For the swiftest cooling results, simply slide the furnace away post-heating.
This cutting-edge system is an ideal, economical solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This custom RTP (Rapid Thermal Processing) annealing furnace comprises a RTP sliding-rail tube furnace, equipped with a sophisticated multi-channel mass flow controller system, and a state-of-the-art vacuum system, meticulously engineered for annealing semiconductor wafers, solar cells, or other samples (up to 3" in size).
The tube furnace leverages innovative infrared lamp heating, achieving breathtaking ultra-fast heating rates of 50°C per second. It integrates 30-segment precise temperature control with extraordinary accuracy of ±1°C. Outfitted with an RS485 interface and intuitive control software, the furnace offers computer operation and monitoring, presenting real-time temperature curves for seamless use.
This Discover the innovative rapid thermal processing tube furnace, engineered to meet the demands of modern material science and technology. This cutting-edge equipment finds extensive application in the remarkable large-area 2D graphene growth through advanced Chemical Vapor Deposition (CVD) techniques. Furthermore, it is finely tuned for excellence in the annealing of semiconductor wafers and solar cell materials, delivering consistent and reliable performance.The sophisticated computer system orchestrates furnace operations with precision in real-time via the RS485 interface, complemented by bespoke, intuitive software solutions,while simultaneously providing dynamic visualization of temperature profiles for enhanced control and monitoring.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Gas Mixing System - A seamlessly integrated component ensuring optimal gas flow management for precise processing conditions.
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Vacuum System - Engineered for superior vacuum conditions, essential for high-quality material processing.
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace boasts vacuum flanges on both ends of the tube, achieving impressive vacuum levels of up to 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. Its design includes sliding rails for easy manual movement, enabling swift transitions between heating and cooling phases. The maximum heating and cooling rates reach an impressive 100°C per minute. For ultra-fast heating, preheat the furnace to the desired temperature before positioning your sample. Conversely, swift cooling is achieved by relocating the furnace post-heating. Under vacuum or inert conditions, astonishing heating and cooling rates of 10°C per second are attainable, positioning this furnace as the quintessential, cost-effective solution for rapid thermal processing tasks.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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