| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Discover the unparalleled efficiency of the Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a high-vacuum, fast-heating marvel. Equipped with a state-of-the-art quartz chamber and vacuum flanges, it employs halogen lamp heating to achieve a phenomenal rapid heating rate of up to 50°C per second. Experience the precision of PID automatic control combined with 30 programmable segments, ensuring unrivaled thermal management.
Perfectly engineered for the annealing of semiconductor and solar cell substrates, this high-temperature tubular furnace excels in rapid thermal processing of samples in both vacuum and controlled atmosphere environments. It stands as an indispensable tool in university laboratories and industrial research facilities for a broad spectrum of cutting-edge applications, including:
Thin-film deposition
Rapid annealing processes for diverse material classes
Silicidation
Diffusion
Crystallization
Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: Tailor the furnace size to your specific requirements with our customization options.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
The intelligently designed sliding tube furnace, equipped with dual sliding rails, supports two tube furnaces that can be effortlessly moved laterally for rapid cooling. This RTP rapid annealing furnace empowers you to heat samples across various environments such as vacuum, atmospheric, and air conditions. It is your go-to solution for rapid annealing, silicidation, diffusion, crystallization, densification, and more for a wide array of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The ingenious sliding three-zone tube furnace boasts an 80mm outer diameter quartz tube, capable of reaching extraordinary temperatures up to 1200°C. It comes with an innovative dual sliding rail system, allowing seamless transition from one side to the other for both rapid heating and cooling.
For optimal heating, preheat the furnace to your desired temperature and deftly slide it over your sample. When cooling is required, simply glide the furnace away for the fastest cooldown.
This advanced system serves as an ideal low-cost solution for rapid thermal processing (RTP), providing unmatched efficiency and performance.
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace features an innovative RTP sliding-rail tube furnace, complemented by a multi-channel mass flow controller system, and a robust vacuum system, meticulously crafted for annealing semiconductor wafers, solar cells, and other samples up to 3" in size.
The tube furnace employs cutting-edge infrared lamp heating, achieving an astonishing ultra-fast heating rate of 50°C per second. It offers 30-segment precise temperature control with a remarkable accuracy of ±1°C. Outfitted with an RS485 interface and sophisticated control softwareExperience seamless operation with our advanced furnace, effortlessly managed and monitored via computer technology, offering real-time access to dynamic temperature curves for precise control.
This state-of-the-art rapid thermal processing tube furnace finds extensive application in the pioneering large-area 2D graphene growth using CVD techniques, and is finely tuned for the specialized annealing of semiconductor wafers and solar cell substrates,seamlessly operated by a computer interface in real-time through the sophisticated RS485 interface and exclusive, dedicated software,all while providing vivid visualizations of temperature profiles for unmatched accuracy and efficiency.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Advanced Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Precision Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
Our cutting-edge rapid annealing furnace is meticulously designed with vacuum flanges at both ends of the furnace tube, achieving vacuum levels of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. A pair of smooth sliding rails is installed at the base to facilitate manual movement, enabling maximum heating and cooling rates of up to 100°C per minute. To ensure the quickest heating, the furnace can be preheated to the desired temperature before it is effortlessly moved to the sample position. For rapid cooling, simply shift the furnace to the opposite end post-sample heating. Under vacuum or inert gas conditions, extraordinary heating and cooling rates of 10°C per second can be achieved, offering an exceptional, cost-effective solution for rapid thermal processing.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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