Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance

Product Details
Customization: Available
After-sales Service: on-Line Service
Warranty: One Year
Diamond Member Since 2025

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Year of Establishment
2025-04-22
Registered Capital
1.48 Million USD
  • Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance
  • Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance
  • Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance
  • Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance
  • Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance
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Basic Info.

Model NO.
Made-to-order
Application
Industry, School, Hospital, Lab
Customized
Customized
Certification
CE
Structure
Desktop
Material
Stainless Steel
Type
Electric Stove
Transport Package
Wooden Case
Specification
Customized
Trademark
RG

Product Description

Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance

Introducing the Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a state-of-the-art high-vacuum fast-heating tubular furnace. This cutting-edge device is enhanced with a quartz chamber and vacuum flanges, utilizing the revolutionary halogen lamp heating technology to achieve an exceptional and swift heating rate. 50°C per second, combined with PID automatic control featuring 30 finely-programmable segments.

Meticulously crafted for the annealing of semiconductor or solar cell substrates, this advanced high-temperature annealing tubular furnace empowers rapid thermal processing of samples in both vacuum and controlled atmosphere environments. It has become an essential tool within university laboratories as well as cutting-edge industrial research facilities , where it is pivotal for applications such as:

  • Thin-film deposition

  • Rapid annealing of diverse materials

  • Silicidation

  • Diffusion

  • Crystallization

  • Densification

    Parameter 2-inch Wafer 4-inch Wafer 6-inch Wafer
    Wafer Size 2 inches 4 inches 6 inches
    Furnace Tube Outer Diameter 100 mm 110-150 mm 180 mm
    Heating Zone Length 200 mm 300 mm 400 mm

    Note: We offer customization to suit unique customer requirements.

    Product Details

    Feature Specification
    Product Name RTP Rapid Annealing Furnace
    Operating Temperature 900°C
    Controller LED (Touchscreen LED optional)
    Furnace Chamber Open-type, sliding rail design
    Tube Size Customizable based on requirements
    Heating Element Halogen lamps
    Heating Rate 0-50°C/s
    Thermocouple Custom-designed based on actual needs
    Temperature Controller 30-segment high-precision digital programmable controller
    Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal PerformanceThe sliding tube furnace innovation is equipped with dual sliding rails for optimal operational flexibility, accommodating two tube furnaces that can swiftly move left and right for expedited cooling. This RTP rapid annealing furnace adeptly heats samples across a spectrum of environments such as vacuum, atmospheric, and air. Its primary utility lies in rapid annealing, silicidation, diffusion, crystallization, densification, and processing a variety of materials with efficiency and precision.
    Parameter Specification
    Display LED
    Temperature 1200°C
    Continuous Operating Temp ≤1100°C
    Heating Rate Recommended 0-10°C/min
    Furnace Tube Tube Dimensions: OD50/ID44 × L1800mm
      First Furnace: Heating Zone Length: 350mm
      Second Furnace: Heating Zone Length: 150mm
      (Other sizes customizable based on customer requirements)
    Heating Element Molybdenum Disilicide (MoSi) Heating Wire
    Sliding Rails/Table Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm
      (Other sizes customizable based on customer requirements)
    Thermocouple Type N
    Tube Material High-Purity Quartz
    Sealing Flange Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port)
    Temperature Accuracy ±1°C
    Temperature Control Two Independently Controlled Furnaces
      - 30-step PID Auto Control via SCR Power Regulation
    Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance

    The ingeniously designed sliding three-zone tube furnace is a marvel of rapid thermal annealing technology featuring an 80mm outer diameter quartz tube and a soaring maximum temperature capability of 1200°C. With its innovative sliding rail system, this furnace moves seamlessly across the tube for both rapid heating and cooling.

    For optimal rapid heating, preheat the furnace to the target temperature and then glide it over the sample. For the swiftest cooling, simply slide the furnace away post-heating.

    This system offers an outstanding low-cost solution for rapid thermal processing (RTP).

    Parameter Specification
    Shell Structure Double-layer air-cooled
    Furnace Chamber Material Alumina refractory fiber
    Max Temperature 1200°C
    Operating Temperature 1100°C
    Heating Rate 10°C/min
    Heating Element Resistance wire
    Temperature Control PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection
    Thermocouple Type N
    Heating Zone Length 220mm + 220mm + 220mm (other sizes customizable upon request)
    Furnace Tube Size Ø80mm × 2400mm (other sizes customizable upon request)
    Furnace Tube High-purity quartz tube
    Sliding Rails Chrome-plated steel dual rails
    Rail Length ~2500mm (other sizes customizable upon request)
    Flange 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable
    Compatible Gas Inert gas (slight positive pressure)
Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal Performance

This tailor-made RTP (Rapid Thermal Processing) annealing furnace is composed of an RTP sliding-rail tube furnace, a sophisticated multi-channel mass flow controller system, accompanied by a precision-engineered vacuum system, specially designed for annealing semiconductor wafers, solar cells, or other samples (up to 3" in size).

Employing the advanced infrared lamp heating technology, it achieves a remarkably ultra-fast heating rate of 50°C per second. The system is equipped with 30-segment precise temperature control with an impressive accuracy of ±1°C. It comes equipped with an RS485 interface and sophisticated control softwareWith the cutting-edge RG Rapid Thermal Annealing Furnace, you can effortlessly operate and monitor the system via an advanced computer interface. Experience the precision of real-time temperature curves displayed directly on your screen, ensuring unparalleled control and accuracy.

This state-of-the-art rapid thermal processing tube furnace is extensively utilized for the sophisticated growth of large-area 2D graphene through the CVD method and has been meticulously optimized for the precise annealing of semiconductor and solar cell wafers. The intelligent computer system seamlessly controls the furnace in real-time via the highly reliable RS485 interface and specialized software, all while providing a visual representation of detailed temperature profiles.

Parameter Specification
Product Name Open-Type Dual-Zone RTP Tube Furnace
Operating Temperature ≤1000ºC
Controller LCD Touch Screen
Furnace Tube Size Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available)
Heating Zone 300mm (Custom lengths available)
Furnace Type Open-Type
Heating Element Halogen Lamp Heating
Heating Rate 30ºC/min
Temperature Sensor Type N Thermocouple
Temperature Controller 30-Segment High-Precision Digital Programmable Controller

Part 2: High-Precision Gas Mixing System

Parameter Specification
Flow Range MFC1: Argon (O) 0-200sccm
MFC2: Argon (Ar) 0-200sccm

Part 3: Advanced Vacuum System

Component Specification
Vacuum Pump Rotary Vane Pump
Accessories Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge
Rg Rapid Thermal Annealing Furnace - Tailored Specifications for Optimal PerformanceThe sophisticated rapid annealing furnace is equipped with high-efficiency vacuum flanges at both ends of the furnace tube, achieving a remarkable vacuum level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. It features a pair of sliding rails at the bottom, facilitating manual movement. Experience rapid thermal processing with maximum heating and cooling rates reaching an impressive 100°C per minute. For ultra-fast heating, preheat the furnace to the desired set temperature and effortlessly move it to the sample position. For rapid cooling, shift the furnace to the opposite end after heating the sample. When operating under vacuum or inert gas conditions, achieve phenomenal heating and cooling rates of up to 10°C per second, making it the ideal, cost-effective choice for rapid thermal processing applications.
Parameter Specification
Furnace Tube Dimensions Φ60mm × 1500mm (Customizable per customer requirements)
Heating Zone Length 440mm (Customizable per customer requirements)
Operating Temperature ≤1100°C
Maximum Temperature 1200°C
Temperature Control System 30-segment PID microcomputer programmable control (Optional LCD touchscreen display)
Temperature Control Accuracy ±1°C
Temperature Protection Over-temperature and thermocouple break protection
Heating Rate 0~10°C/min
Heating Element Resistance wire
Gas Tightness 4.03 × 10<sup>-3</sup> Pa
Furnace Chamber Material Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction
Slide Rail Dimensions Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements)
Flange Connections Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve
Sealing System Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours)
Furnace Tube Options Fused quartz tube or alumina tube
Temperature Sensor Type N thermocouple



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