| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Introducing the Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a state-of-the-art high-vacuum fast-heating tubular furnace. This cutting-edge device is enhanced with a quartz chamber and vacuum flanges, utilizing the revolutionary halogen lamp heating technology to achieve an exceptional and swift heating rate. 50°C per second, combined with PID automatic control featuring 30 finely-programmable segments.
Meticulously crafted for the annealing of semiconductor or solar cell substrates, this advanced high-temperature annealing tubular furnace empowers rapid thermal processing of samples in both vacuum and controlled atmosphere environments. It has become an essential tool within university laboratories as well as cutting-edge industrial research facilities , where it is pivotal for applications such as:
Thin-film deposition
Rapid annealing of diverse materials
Silicidation
Diffusion
Crystallization
Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: We offer customization to suit unique customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
The sliding tube furnace innovation is equipped with dual sliding rails for optimal operational flexibility, accommodating two tube furnaces that can swiftly move left and right for expedited cooling. This RTP rapid annealing furnace adeptly heats samples across a spectrum of environments such as vacuum, atmospheric, and air. Its primary utility lies in rapid annealing, silicidation, diffusion, crystallization, densification, and processing a variety of materials with efficiency and precision.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The ingeniously designed sliding three-zone tube furnace is a marvel of rapid thermal annealing technology featuring an 80mm outer diameter quartz tube and a soaring maximum temperature capability of 1200°C. With its innovative sliding rail system, this furnace moves seamlessly across the tube for both rapid heating and cooling.
For optimal rapid heating, preheat the furnace to the target temperature and then glide it over the sample. For the swiftest cooling, simply slide the furnace away post-heating.
This system offers an outstanding low-cost solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This tailor-made RTP (Rapid Thermal Processing) annealing furnace is composed of an RTP sliding-rail tube furnace, a sophisticated multi-channel mass flow controller system, accompanied by a precision-engineered vacuum system, specially designed for annealing semiconductor wafers, solar cells, or other samples (up to 3" in size).
Employing the advanced infrared lamp heating technology, it achieves a remarkably ultra-fast heating rate of 50°C per second. The system is equipped with 30-segment precise temperature control with an impressive accuracy of ±1°C. It comes equipped with an RS485 interface and sophisticated control softwareWith the cutting-edge RG Rapid Thermal Annealing Furnace, you can effortlessly operate and monitor the system via an advanced computer interface. Experience the precision of real-time temperature curves displayed directly on your screen, ensuring unparalleled control and accuracy.
This state-of-the-art rapid thermal processing tube furnace is extensively utilized for the sophisticated growth of large-area 2D graphene through the CVD method and has been meticulously optimized for the precise annealing of semiconductor and solar cell wafers. The intelligent computer system seamlessly controls the furnace in real-time via the highly reliable RS485 interface and specialized software, all while providing a visual representation of detailed temperature profiles.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: High-Precision Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Advanced Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The sophisticated rapid annealing furnace is equipped with high-efficiency vacuum flanges at both ends of the furnace tube, achieving a remarkable vacuum level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. It features a pair of sliding rails at the bottom, facilitating manual movement. Experience rapid thermal processing with maximum heating and cooling rates reaching an impressive 100°C per minute. For ultra-fast heating, preheat the furnace to the desired set temperature and effortlessly move it to the sample position. For rapid cooling, shift the furnace to the opposite end after heating the sample. When operating under vacuum or inert gas conditions, achieve phenomenal heating and cooling rates of up to 10°C per second, making it the ideal, cost-effective choice for rapid thermal processing applications.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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