Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation

Product Details
Customization: Available
After-sales Service: on-Line Service
Warranty: One Year
Diamond Member Since 2025

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Year of Establishment
2025-04-22
Registered Capital
1.48 Million USD
  • Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation
  • Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation
  • Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation
  • Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation
  • Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation
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Basic Info.

Application
Industry, School, Hospital, Lab
Customized
Customized
Certification
CE
Structure
Desktop
Material
Stainless Steel
Type
Electric Stove
Transport Package
Wooden Case
Specification
Customized
Trademark
RG

Product Description

Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation

Introducing the state-of-the-art Vacuum RTP (Rapid Thermal Processing) Annealing Furnace! This high-vacuum, fast-heating tubular furnace is a pinnacle of modern engineering, featuring a robust quartz chamber and vacuum flanges. Engineered for excellence, it employs halogen lamp heating technology to deliver an accelerated heating rate, reaching speeds of up to 50°C per second,and is distinguished by its sophisticated PID automatic control system that includes 30 programmable segments, allowing for unparalleled precision in operation.

Meticulously designed for the annealing of semiconductor and solar cell substrates, this high-temperature annealing tubular furnace guarantees rapid thermal processing of samples within vacuum or meticulously controlled atmosphere environments. It stands as a cornerstone in university laboratories and industrial research facilities for a multitude of advanced applications, including:

  • Thin-film deposition,

  • swift annealing of diverse materials,

  • silicidation processes,

  • diffusion techniques,

  • crystallization,

  • and densification.

    Parameter 2-inch Wafer 4-inch Wafer 6-inch Wafer
    Wafer Size 2 inches 4 inches 6 inches
    Furnace Tube Outer Diameter 100 mm 110-150 mm 180 mm
    Heating Zone Length 200 mm 300 mm 400 mm

    Note: We offer customization options for various sizes to meet specific customer requirements.

    Product Details

    Feature Specification
    Product Name RTP Rapid Annealing Furnace
    Operating Temperature 900°C
    Controller LED (Touchscreen LED optional)
    Furnace Chamber Open-type, sliding rail design
    Tube Size Customizable based on requirements
    Heating Element Halogen lamps
    Heating Rate 0-50°C/s
    Thermocouple Custom-designed based on actual needs
    Temperature Controller 30-segment high-precision digital programmable controller
    Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked InnovationOur innovative sliding tube furnace is engineered with dual sliding rails at the base, supporting two tube furnaces that traverse smoothly for rapid cooling capabilities. This RTP rapid annealing furnace is adept at heating samples across diverse environments, including vacuum, atmospheric, and air conditions. It is prominently utilized for rapid annealing, silicidation, diffusion, crystallization, densification, and other processes across a broad spectrum of materials.
    Parameter Specification
    Display LED
    Temperature 1200°C
    Continuous Operating Temp ≤1100°C
    Heating Rate Recommended 0-10°C/min
    Furnace Tube Tube Dimensions: OD50/ID44 × L1800mm
      First Furnace: Heating Zone Length: 350mm
      Second Furnace: Heating Zone Length: 150mm
      (Other sizes customizable based on customer requirements)
    Heating Element Molybdenum Disilicide (MoSi) Heating Wire
    Sliding Rails/Table Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm
      (Other sizes customizable based on customer requirements)
    Thermocouple Type N
    Tube Material High-Purity Quartz
    Sealing Flange Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port)
    Temperature Accuracy ±1°C
    Temperature Control Two Independently Controlled Furnaces
      - 30-step PID Auto Control via SCR Power Regulation
    Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation

    The sliding three-zone tube furnace is an advanced rapid thermal annealing solution, boasting an 80mm outer diameter quartz tube capable of reaching a maximum temperature of 1200°C. Equipped with bottom sliding rails, this furnace facilitates smooth movement from one tube side to the other, ensuring rapid heating and cooling transitions.

    For optimal heating efficiency, preheat the furnace to your target temperature, then adeptly slide it over the sample position. To achieve swift cooling, simply slide the furnace away once the heating process is finalized.

    This system represents an ideal low-cost alternative for rapid thermal processing (RTP), providing both efficacy and affordability.

    Parameter Specification
    Shell Structure Double-layer air-cooled
    Furnace Chamber Material Alumina refractory fiber
    Max Temperature 1200°C
    Operating Temperature 1100°C
    Heating Rate 10°C/min
    Heating Element Resistance wire
    Temperature Control PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection
    Thermocouple Type N
    Heating Zone Length 220mm + 220mm + 220mm (other sizes customizable upon request)
    Furnace Tube Size Ø80mm × 2400mm (other sizes customizable upon request)
    Furnace Tube High-purity quartz tube
    Sliding Rails Chrome-plated steel dual rails
    Rail Length ~2500mm (other sizes customizable upon request)
    Flange 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable
    Compatible Gas Inert gas (slight positive pressure)
Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked Innovation

This bespoke RTP (Rapid Thermal Processing) annealing furnace is comprised of a cutting-edge RTP sliding-rail tube furnace,an innovative multi-channel mass flow controller system,and a durable vacuum system,specifically crafted for annealing semiconductor wafers, solar cells, and various samples up to 3 inches in size.

The sophisticated tube furnace benefits from infrared lamp heating technology, achieving an incredibly rapid heating rate of 50°C per second. It showcases 30-segment precise temperature control with an exceptional accuracy of ±1°C.Equipped with an RS485 interface and cutting-edge control software,this furnace offers seamless computer operation and monitoring, complete with real-time temperature curve displays.

Discover the Unmatched Efficiency and Precision of This state-of-the-art rapid thermal processing tube furnace, a pinnacle of innovation, which finds extensive application in the large-area growth of 2D graphene via the advanced CVD method, and is meticulously optimized for the annealing of semiconductor and solar cell wafers, ensuring superior performance.Harnessing cutting-edge technology, the system allows full control of the furnace in real-time via the robust RS485 interface coupled with specialized software,all while providing a seamless visualization of temperature profiles.

Parameter Specification
Product Name Open-Type Dual-Zone RTP Tube Furnace
Operating Temperature ≤1000ºC
Controller LCD Touch Screen
Furnace Tube Size Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available)
Heating Zone 300mm (Custom lengths available)
Furnace Type Open-Type
Heating Element Halogen Lamp Heating
Heating Rate 30ºC/min
Temperature Sensor Type N Thermocouple
Temperature Controller 30-Segment High-Precision Digital Programmable Controller

Part 2: Advanced Gas Mixing System

Parameter Specification
Flow Range MFC1: Argon (O) 0-200sccm
MFC2: Argon (Ar) 0-200sccm

Part 3: High-Efficiency Vacuum System

Component Specification
Vacuum Pump Rotary Vane Pump
Accessories Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge
Customized Rtp Sliding Rapid Annealing Technology - Rg Trademarked InnovationThis rapid annealing furnace features vacuum flanges at both ends of its state-of-the-art furnace tube. The vacuum efficiency is remarkable, achieving a level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. Designed with versatility in mind, a pair of sliding rails is installed at the furnace base, allowing for smooth manual movement. Experience impressive thermal capabilities with maximum heating and cooling rates reaching up to 100°C per minute. For unrivaled rapidity, preheat the furnace to your desired temperature, then effortlessly move it to the sample position for the fastest heating results. For expedited cooling, simply slide the furnace to the opposite end after the sample has been heated. Under conditions of vacuum or inert gas, the heating and cooling rates soar to an incredible 10°C per second, positioning this furnace as the ideal, cost-effective solution for rapid thermal processing needs.
Parameter Specification
Furnace Tube Dimensions Φ60mm × 1500mm (Customizable per customer requirements)
Heating Zone Length 440mm (Customizable per customer requirements)
Operating Temperature ≤1100°C
Maximum Temperature 1200°C
Temperature Control System 30-segment PID microcomputer programmable control (Optional LCD touchscreen display)
Temperature Control Accuracy ±1°C
Temperature Protection Over-temperature and thermocouple break protection
Heating Rate 0~10°C/min
Heating Element Resistance wire
Gas Tightness 4.03 × 10<sup>-3</sup> Pa
Furnace Chamber Material Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction
Slide Rail Dimensions Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements)
Flange Connections Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve
Sealing System Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours)
Furnace Tube Options Fused quartz tube or alumina tube
Temperature Sensor Type N thermocouple



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