| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Introducing the state-of-the-art Vacuum RTP (Rapid Thermal Processing) Annealing Furnace! This high-vacuum, fast-heating tubular furnace is a pinnacle of modern engineering, featuring a robust quartz chamber and vacuum flanges. Engineered for excellence, it employs halogen lamp heating technology to deliver an accelerated heating rate, reaching speeds of up to 50°C per second,and is distinguished by its sophisticated PID automatic control system that includes 30 programmable segments, allowing for unparalleled precision in operation.
Meticulously designed for the annealing of semiconductor and solar cell substrates, this high-temperature annealing tubular furnace guarantees rapid thermal processing of samples within vacuum or meticulously controlled atmosphere environments. It stands as a cornerstone in university laboratories and industrial research facilities for a multitude of advanced applications, including:
Thin-film deposition,
swift annealing of diverse materials,
silicidation processes,
diffusion techniques,
crystallization,
and densification.
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: We offer customization options for various sizes to meet specific customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
Our innovative sliding tube furnace is engineered with dual sliding rails at the base, supporting two tube furnaces that traverse smoothly for rapid cooling capabilities. This RTP rapid annealing furnace is adept at heating samples across diverse environments, including vacuum, atmospheric, and air conditions. It is prominently utilized for rapid annealing, silicidation, diffusion, crystallization, densification, and other processes across a broad spectrum of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The sliding three-zone tube furnace is an advanced rapid thermal annealing solution, boasting an 80mm outer diameter quartz tube capable of reaching a maximum temperature of 1200°C. Equipped with bottom sliding rails, this furnace facilitates smooth movement from one tube side to the other, ensuring rapid heating and cooling transitions.
For optimal heating efficiency, preheat the furnace to your target temperature, then adeptly slide it over the sample position. To achieve swift cooling, simply slide the furnace away once the heating process is finalized.
This system represents an ideal low-cost alternative for rapid thermal processing (RTP), providing both efficacy and affordability.
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace is comprised of a cutting-edge RTP sliding-rail tube furnace,an innovative multi-channel mass flow controller system,and a durable vacuum system,specifically crafted for annealing semiconductor wafers, solar cells, and various samples up to 3 inches in size.
The sophisticated tube furnace benefits from infrared lamp heating technology, achieving an incredibly rapid heating rate of 50°C per second. It showcases 30-segment precise temperature control with an exceptional accuracy of ±1°C.Equipped with an RS485 interface and cutting-edge control software,this furnace offers seamless computer operation and monitoring, complete with real-time temperature curve displays.
Discover the Unmatched Efficiency and Precision of This state-of-the-art rapid thermal processing tube furnace, a pinnacle of innovation, which finds extensive application in the large-area growth of 2D graphene via the advanced CVD method, and is meticulously optimized for the annealing of semiconductor and solar cell wafers, ensuring superior performance.Harnessing cutting-edge technology, the system allows full control of the furnace in real-time via the robust RS485 interface coupled with specialized software,all while providing a seamless visualization of temperature profiles.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Advanced Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: High-Efficiency Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
This rapid annealing furnace features vacuum flanges at both ends of its state-of-the-art furnace tube. The vacuum efficiency is remarkable, achieving a level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. Designed with versatility in mind, a pair of sliding rails is installed at the furnace base, allowing for smooth manual movement. Experience impressive thermal capabilities with maximum heating and cooling rates reaching up to 100°C per minute. For unrivaled rapidity, preheat the furnace to your desired temperature, then effortlessly move it to the sample position for the fastest heating results. For expedited cooling, simply slide the furnace to the opposite end after the sample has been heated. Under conditions of vacuum or inert gas, the heating and cooling rates soar to an incredible 10°C per second, positioning this furnace as the ideal, cost-effective solution for rapid thermal processing needs.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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