Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance

Product Details
Customization: Available
After-sales Service: on-Line Service
Warranty: One Year
Diamond Member Since 2025

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Year of Establishment
2025-04-22
Registered Capital
1.48 Million USD
  • Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance
  • Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance
  • Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance
  • Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance
  • Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance
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Basic Info.

Application
Industry, School, Hospital, Lab
Customized
Customized
Certification
CE
Structure
Desktop
Material
Stainless Steel
Type
Electric Stove
Transport Package
Wooden Case
Specification
Customized
Trademark
RG

Product Description

Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance

The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a cutting-edge, high-vacuum, fast-heating tubular marvel, boasting a sophisticated quartz chamber and durable vacuum flanges. It harnesses the power of halogen lamp heating, propelling the system to a remarkable rapid heating rate of up to 50°C per second,all while showcasing PID automatic control and offering 30 intelligently programmable segments.

Engineered specifically for the annealing of semiconductor or solar cell substrates, this high-performance, high-temperature annealing tubular furnace allows for the rapid thermal processing of samples in either vacuum or meticulously controlled atmospheric environments. It has found widespread acclaim in prestigious university laboratories as well as leading industrial research facilities for diverse applications including:

  • - Thin-film deposition

  • - Rapid annealing of a wide array of materials

  • - Silicidation

  • - Diffusion

  • - Crystallization

  • - Densification

    Parameter 2-inch Wafer 4-inch Wafer 6-inch Wafer
    Wafer Size 2 inches 4 inches 6 inches
    Furnace Tube Outer Diameter 100 mm 110-150 mm 180 mm
    Heating Zone Length 200 mm 300 mm 400 mm

    Note: We offer customization options to tailor other sizes to your unique requirements.

    Product Details

    Feature Specification
    Product Name RTP Rapid Annealing Furnace
    Operating Temperature 900°C
    Controller LED (Touchscreen LED optional)
    Furnace Chamber Open-type, sliding rail design
    Tube Size Customizable based on requirements
    Heating Element Halogen lamps
    Heating Rate 0-50°C/s
    Thermocouple Custom-designed based on actual needs
    Temperature Controller 30-segment high-precision digital programmable controller
    Rg Customized Rtp Sliding Rapid Annealing System for Enhanced PerformanceThis innovative sliding tube furnace is expertly fitted with a pair of sliding rails at the base, featuring two tube furnaces that glide seamlessly on the rails for unparalleled rapid cooling. This RTP rapid annealing furnace is versatile, adept at heating samples in diverse conditions such as vacuum, atmospheric, and air environments, and is perfect for rapid annealing, silicidation, diffusion, crystallization, densification, and more across numerous material types.
    Parameter Specification
    Display LED
    Temperature 1200°C
    Continuous Operating Temp ≤1100°C
    Heating Rate Recommended 0-10°C/min
    Furnace Tube Tube Dimensions: OD50/ID44 × L1800mm
      First Furnace: Heating Zone Length: 350mm
      Second Furnace: Heating Zone Length: 150mm
      (Other sizes customizable based on customer requirements)
    Heating Element Molybdenum Disilicide (MoSi) Heating Wire
    Sliding Rails/Table Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm
      (Other sizes customizable based on customer requirements)
    Thermocouple Type N
    Tube Material High-Purity Quartz
    Sealing Flange Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port)
    Temperature Accuracy ±1°C
    Temperature Control Two Independently Controlled Furnaces
      - 30-step PID Auto Control via SCR Power Regulation
    Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance

    The ingeniously designed sliding three-zone tube furnace represents a pinnacle of rapid thermal annealing technology, featuring an 80mm outer diameter quartz tube with an impressive maximum temperature threshold of 1200°C. It is equipped with bottom sliding rails, enabling the furnace to traverse across the tube for swift heating and cooling.

    To optimize the heating process, preheat to your desired temperature and slide the furnace over the sample position. For the most efficient cooling, simply retract the furnace post-heating.

    This system offers an exceptionally economical solution for high-speed, rapid thermal processing (RTP).

    Parameter Specification
    Shell Structure Double-layer air-cooled
    Furnace Chamber Material Alumina refractory fiber
    Max Temperature 1200°C
    Operating Temperature 1100°C
    Heating Rate 10°C/min
    Heating Element Resistance wire
    Temperature Control PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection
    Thermocouple Type N
    Heating Zone Length 220mm + 220mm + 220mm (other sizes customizable upon request)
    Furnace Tube Size Ø80mm × 2400mm (other sizes customizable upon request)
    Furnace Tube High-purity quartz tube
    Sliding Rails Chrome-plated steel dual rails
    Rail Length ~2500mm (other sizes customizable upon request)
    Flange 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable
    Compatible Gas Inert gas (slight positive pressure)
Rg Customized Rtp Sliding Rapid Annealing System for Enhanced Performance

This bespoke RTP (Rapid Thermal Processing) annealing furnace incorporates an RTP sliding-rail tube furnace, a state-of-the-art multi-channel mass flow controller system, and an advanced vacuum system, all meticulously designed for the annealing of semiconductor wafers, solar cells, and other samples up to 3" in size.

The tube furnace employs pioneering infrared lamp heating technology, achieving a staggering ultra-fast heating rate of 50°C per second.It is equipped with 30-segment precise temperature control maintaining an impeccable accuracy of ±1°C.Complete with an RS485 interface and user-friendly control software, the system allows for seamless computer operation and monitoring, offering real-time visualization of temperature curves.

This state-of-the-art rapid thermal processing tube furnace is extensively utilized for the expansive growth of 2D graphene utilizing the CVD method and is meticulously optimized for the annealing of semiconductor and solar cell wafers. The system is masterfully controlled by a computer that governs the furnace in real-time via the sophisticated RS485 interface coupled with dedicated software, all while providing a comprehensive visualization of temperature profiles.

Parameter Specification
Product Name Open-Type Dual-Zone RTP Tube Furnace
Operating Temperature ≤1000ºC
Controller LCD Touch Screen
Furnace Tube Size Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available)
Heating Zone 300mm (Custom lengths available)
Furnace Type Open-Type
Heating Element Halogen Lamp Heating
Heating Rate 30ºC/min
Temperature Sensor Type N Thermocouple
Temperature Controller 30-Segment High-Precision Digital Programmable Controller

Part 2: Advanced Gas Mixing System

Parameter Specification
Flow Range MFC1: Argon (O) 0-200sccm
MFC2: Argon (Ar) 0-200sccm

Part 3: Efficient Vacuum System

Component Specification
Vacuum Pump Rotary Vane Pump
Accessories Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge
Rg Customized Rtp Sliding Rapid Annealing System for Enhanced PerformanceThe rapid annealing furnace boasts vacuum flanges at both ends of the furnace tube. Achieve a vacuum level as low as 10-5 Torr with the molecular pump and 10-3 Torr with the mechanical pump. A pair of strategically designed sliding rails is installed at the base of the furnace, permitting effortless manual movement. Experience maximum heating and cooling rates of 100°C per minute. For peak heating efficiency, the furnace can be preheated to a designated temperature before being relocated to the sample position. For swift cooling, after heating the sample, the furnace can be shifted to the opposite end. Under vacuum or inert gas conditions, the heating and cooling rates can soar to 10°C per second, rendering it an exceptional low-cost solution for rapid thermal processing.
Parameter Specification
Furnace Tube Dimensions Φ60mm × 1500mm (Customizable per customer requirements)
Heating Zone Length 440mm (Customizable per customer requirements)
Operating Temperature ≤1100°C
Maximum Temperature 1200°C
Temperature Control System 30-segment PID microcomputer programmable control (Optional LCD touchscreen display)
Temperature Control Accuracy ±1°C
Temperature Protection Over-temperature and thermocouple break protection
Heating Rate 0~10°C/min
Heating Element Resistance wire
Gas Tightness 4.03 × 10<sup>-3</sup> Pa
Furnace Chamber Material Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction
Slide Rail Dimensions Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements)
Flange Connections Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve
Sealing System Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours)
Furnace Tube Options Fused quartz tube or alumina tube
Temperature Sensor Type N thermocouple



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