| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a cutting-edge, high-vacuum, fast-heating tubular marvel, boasting a sophisticated quartz chamber and durable vacuum flanges. It harnesses the power of halogen lamp heating, propelling the system to a remarkable rapid heating rate of up to 50°C per second,all while showcasing PID automatic control and offering 30 intelligently programmable segments.
Engineered specifically for the annealing of semiconductor or solar cell substrates, this high-performance, high-temperature annealing tubular furnace allows for the rapid thermal processing of samples in either vacuum or meticulously controlled atmospheric environments. It has found widespread acclaim in prestigious university laboratories as well as leading industrial research facilities for diverse applications including:
- Thin-film deposition
- Rapid annealing of a wide array of materials
- Silicidation
- Diffusion
- Crystallization
- Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: We offer customization options to tailor other sizes to your unique requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
This innovative sliding tube furnace is expertly fitted with a pair of sliding rails at the base, featuring two tube furnaces that glide seamlessly on the rails for unparalleled rapid cooling. This RTP rapid annealing furnace is versatile, adept at heating samples in diverse conditions such as vacuum, atmospheric, and air environments, and is perfect for rapid annealing, silicidation, diffusion, crystallization, densification, and more across numerous material types.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The ingeniously designed sliding three-zone tube furnace represents a pinnacle of rapid thermal annealing technology, featuring an 80mm outer diameter quartz tube with an impressive maximum temperature threshold of 1200°C. It is equipped with bottom sliding rails, enabling the furnace to traverse across the tube for swift heating and cooling.
To optimize the heating process, preheat to your desired temperature and slide the furnace over the sample position. For the most efficient cooling, simply retract the furnace post-heating.
This system offers an exceptionally economical solution for high-speed, rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace incorporates an RTP sliding-rail tube furnace, a state-of-the-art multi-channel mass flow controller system, and an advanced vacuum system, all meticulously designed for the annealing of semiconductor wafers, solar cells, and other samples up to 3" in size.
The tube furnace employs pioneering infrared lamp heating technology, achieving a staggering ultra-fast heating rate of 50°C per second.It is equipped with 30-segment precise temperature control maintaining an impeccable accuracy of ±1°C.Complete with an RS485 interface and user-friendly control software, the system allows for seamless computer operation and monitoring, offering real-time visualization of temperature curves.
This state-of-the-art rapid thermal processing tube furnace is extensively utilized for the expansive growth of 2D graphene utilizing the CVD method and is meticulously optimized for the annealing of semiconductor and solar cell wafers. The system is masterfully controlled by a computer that governs the furnace in real-time via the sophisticated RS485 interface coupled with dedicated software, all while providing a comprehensive visualization of temperature profiles.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Advanced Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Efficient Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace boasts vacuum flanges at both ends of the furnace tube. Achieve a vacuum level as low as 10-5 Torr with the molecular pump and 10-3 Torr with the mechanical pump. A pair of strategically designed sliding rails is installed at the base of the furnace, permitting effortless manual movement. Experience maximum heating and cooling rates of 100°C per minute. For peak heating efficiency, the furnace can be preheated to a designated temperature before being relocated to the sample position. For swift cooling, after heating the sample, the furnace can be shifted to the opposite end. Under vacuum or inert gas conditions, the heating and cooling rates can soar to 10°C per second, rendering it an exceptional low-cost solution for rapid thermal processing.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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