| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Introducing the Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a marvel in high-vacuum, fast-heating tubular technology. This cutting-edge furnace is adorned with a sophisticated quartz chamber and vacuum flanges, fundamentally elevated by its halogen lamp heating system, propelling it to achieve breathtaking heating rates up to 50°C per second. It is distinguished by its PID automatic control capabilities, featuring 30 programmable segments.
Meticulously engineered for the annealing of semiconductor or solar cell substrates, this high-temperature tubular furnace fosters rapid thermal processing in vacuum or meticulously controlled atmospheric environments. It finds extensive applications within university laboratories and pioneering industrial research facilities for specialized applications including:
Thin-film deposition
Expedient annealing across diverse materials
Silicidation
Diffusion
Crystallization
Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Important Note: We offer customization of other sizes tailored to customer specifications.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
This innovative sliding tube furnace, equipped with dual sliding rails at its base, hosts two tube furnaces that glide effortlessly left and right, facilitating rapid cooling. It excels in processing samples under diverse environmental conditions such as vacuum, atmospheric, and air scenarios. Predominantly employed in rapid annealing, silicidation, diffusion, crystallization, densification, and more for a multitude of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The state-of-the-art sliding three-zone tube furnace boasts an 80mm outer diameter quartz tube and can achieve temperatures soaring up to 1200°C. Its design, featuring a pair of sliding rails, allows for seamless movement of the furnace from one end of the tube to the other, optimizing rapid heating and cooling.
To maximize heating efficiency, preheat to your desired temperature before gliding it over the sample. For swift cooling, simply slide the furnace away post-heating.
This system stands as an exceptional, cost-effective solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace is comprised of an RTP sliding-rail tube furnace, augmented by a sophisticated multi-channel mass flow controller system, and a robust vacuum system, purposefully crafted for annealing semiconductor wafers, solar cells, or comparable samples (up to 3" in size).
The tube furnace advances with innovative infrared lamp heating, enabling ultra-rapid heating rates of 50°C per second. It showcases 30-segment precision temperature control with remarkable accuracy of ±1°C. Outfitted with an RS485 interface and accompanying control software, the furnace offers comprehensive computer-based operation and monitoring, complete with real-time temperature curve displays.
Discover the cutting-edge RG Customized RPT Vacuum Rapid Thermal Annealing Furnace, a hallmark of Henan Runjing Instrument Equipment Co., Ltd, designed for superior rapid thermal processing in a tube furnace setting. This advanced apparatus is widely revered for its versatile applications, providing unmatched performance and efficiency. Specially engineered to facilitate large-area 2D graphene growth via Chemical Vapor Deposition (CVD), it stands as a beacon of innovation and precision. Our furnace is meticulously optimized for high-performance uses, ensuring reliability and excellence. It excels in semiconductor and solar cell wafer annealing, setting a new standard for industry applications.Efficiently managed, the furnace's operations are controlled by a sophisticated computer system in real-time. This is achieved through the RS485 interface and dedicated software, providing seamless integration and control.Furthermore, it allows for the visualization of temperature profiles, enhancing operational precision and user experience.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Gas Mixing System - An essential component for controlled atmospheric conditions, ensuring optimal processing environments.
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Vacuum System - Integral for maintaining purity and precision, enabling superior material treatment.
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
Our rapid annealing furnace features vacuum flanges on both ends of the furnace tube, achieving a vacuum level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. Equipped with sliding rails for manual movement, it achieves exceptional heating and cooling rates of up to 100°C per minute. For rapid transitions, preheat the furnace to the desired temperature before positioning at the sample location. Post-heating, swiftly relocate to the opposite end for cooling. Under vacuum or inert gas, achieve heating and cooling rates up to 10°C per second. This makes it an ideal, cost-effective solution for rapid thermal processing, pushing the boundaries of technological advancement.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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