| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace meticulously engineered for R&D applications within enterprises, universities, and research institutes. This versatile equipment supports a myriad of processes including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing for groundbreaking material research
Precision temperature control ensures consistent and reliable results
Compact design perfectly optimized for lab environments
Product Features:
1. Accommodates an array of processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Incorporates a highly reliable industrial computer paired with a PLC system, achieving fully automated mastery over furnace temperature, boat movement, gas flow, and valve operations, ensuring seamless automation throughout the entire process.
3. Boasts a user-friendly human-machine interface that facilitates effortless modification of control parameters and real-time visualization of diverse process statuses.
4. Provides multiple process pipelines for effortless user customization and selection.
5. Comes equipped with robust software capabilities, including advanced self-diagnostic tools that significantly slash maintenance time.
6. Offers automatic adjustment of the constant temperature zone coupled with cascade control, ensuring precise regulation of the actual process temperature within the reaction tube.
7. Integrates alarms and protective mechanisms for scenarios such as over-temperature, thermocouple breakage, short circuits, and deviations in process gas flow.
8. Customizable product offerings tailored to meet specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system features the following components:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump complete with essential connecting components
The system is equipped with directional and swivel casters securely mounted at the base, offering a compact footprint and remarkable mobility.
Discover a state-of-the-art solution designed for cutting-edge CVD processes, making this system the ultimate choice for renowned universities, pioneering research centers, and forward-thinking industrial manufacturers to seamlessly conduct experiments and facilitate production processes involving high-precision chemical vapor deposition.
(Note: Crafted for precision, ensuring technical accuracy while flowing naturally in English.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Experience precision with our 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Enhanced with an advanced touchscreen control system that incorporates comprehensive data recording capabilities
Ingeniously designed dual-zone vertical architecture optimizing thermal management for peak performance
Incorporates a complete and efficient gas flow control system
Meticulously crafted with a safety-focused design, featuring multiple protective measures
Adaptable components, easily customizable to meet specific research demands
Note: Customization of specifications is possible to meet actual requirements. This system harmonizes precision temperature control with an efficient gas delivery mechanism for superior CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This innovative dual-zone sliding-track CVD tube furnace boasts a high-efficiency rail-guided sliding design, facilitating rapid thermal transitions by horizontally moving the furnace. It seamlessly integrates with up to six distinct gas sources, ensuring precision in flow measurement and control with a user-friendly touchscreen 6-channel mass flow controller (MFC).
This cutting-edge high-temperature CVD system is expertly designed to meet the needs of esteemed universities, leading research institutions, and innovative industrial manufacturers to execute experiments and production related to advanced chemical vapor deposition (CVD) techniques.
Revolutionary sliding-track mechanism enabling rapid and efficient thermal cycling
Comprehensive multi-gas compatibility (featuring 6 independent channels)
Precision-engineered flow control with an intuitive touchscreen MFC interface
Enabling versatile applications for both research and small-batch production endeavors
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Durable Quartz furnace tube (1)
Comprehensive vacuum flange set (1)
Key Features:
A unique sliding mechanism designed for expedited thermal cycling
Six-channel precision gas control system for meticulous flow management
Research-grade vacuum capability ensuring optimal performance
Complete turnkey solution equipped with all essential accessories
Robust industrial-grade construction incorporating vital safety protections
Precision-crafted tube stoppers (2)
High-quality O-ring seals
Safety-approved protective gloves (1 pair)
Convenient crucible hook (1)
Reliable PTFE tubing (3m)
Essential hex keys (2)
Comprehensive operation manual
This system is meticulously designed for Revolutionize your research with our state-of-the-art CVD processes.Our system supports a wide array of applications, including:
Advanced silicon carbide coating for unparalleled durability and performance.
Precision conductivity testing tailored for ceramic substrates.
Innovative 2D material growth for next-generation technologies.
Meticulously controlled growth of ZnO nanostructures for superior quality.
Atmosphere sintering of ceramic capacitors (MLCC) to enhance efficiency.
It also serves as a dedicated graphene film growth furnace for graphene preparation. The furnace features a sophisticated sliding rail base design, allowing effortless manual lateral movement to expose the tube to room temperature for ultra-fast cooling.
This equipment is specifically engineered for CVD experiments that necessitate rapid heating/cooling rates,making it exceptionally suited for:
High-efficiency graphene synthesis and production.
Other CVD applications that require swift thermal cycling.
Key Advantages:
Precision temperature control ensures optimal conditions for sensitive material growth.
Unique sliding mechanism enables quicker, more efficient processing.
Versatile applications extend across advanced material research fields.
Optimized for both graphene and other general CVD processes.
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Safety Precautions:
Never open the furnace chamber when temperature ≥200°C to safeguard against personal injury.
Ensure tube pressure does not exceed 0.02MPa (absolute pressure) during operation to prevent equipment damage from overpressure.
Warning: Ignoring these precautions may lead to:
Severe personal injury
Significant equipment damage
Potential safety hazards
When furnace temperature >1000°C, avoid vacuum in the tube — maintain atmospheric pressure inside the tube.
Do not close both inlet and outlet valves simultaneously during sample heating. If valve closure is necessary:
Monitor pressure gauge readings continuously
Immediately open exhaust valve if absolute pressure exceeds 0.02MPa
Prevent hazardous scenarios (tube rupture, flange ejection, etc.)
Equipment Application & Features
This high-temperature CVD tube furnace is meticulously crafted for chemical vapor deposition (CVD) processes, including:
Cutting-edge silicon carbide (SiC) coating for robust applications.
Tailored conductivity testing of ceramic substrates for precision measurement.
Precisely controlled growth of ZnO nanostructures for superior outcomes.
Expert atmosphere sintering of ceramic capacitors (MLCC) to enhance performance.
Primary Users:
Our RJ Trademark CVD PECVD System is the preferred choice for universities, research institutions, and industrial manufacturers focused on vapor deposition-related experiments and production. It's designed to serve as a cornerstone in pioneering research and groundbreaking industrial applications.
Key Specifications: Discover the exceptional features of our RJ Trademark CVD PECVD System.
The robust Alumina (AlO) furnace tube is engineered to withstand extreme temperatures, reaching up to an impressive 1600°C, ensuring durability and reliability in demanding conditions.
With an innovative design that supports both vacuum and atmospheric operations, adaptability and versatility are at the core of our system's functionality.
Featuring high-performance MoSi (molybdenum disilicide) heating elements, our system guarantees unparalleled and consistent heating efficiency.
Our furnace chamber is crafted with sophisticated ceramic fiber insulation, providing outstanding thermal uniformity and maximizing energy efficiency for optimal performance.
Advantages: Elevate your research and production capabilities with our system's unmatched benefits.
Experience remarkable high-temperature stability, offering precision within ±1°C, to ensure reliable and consistent experiment and production outcomes.
Benefit from rapid heating and cooling cycles combined with superior heat retention, optimizing both speed and energy efficiency.
Our system is designed for safe and user-friendly operation, prioritizing the well-being of the user while enhancing productivity and ease of use.
Versatile enough for advanced materials research, our system supports innovation and exploration in cutting-edge scientific fields.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System: A sophisticated mechanism to support seamless gas management and distribution.
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System: Engineered for premium industrial-grade vacuum performance, ensuring optimal operations.
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features: Delve into the cutting-edge capabilities that make our system stand above the rest.
Set new benchmarks with ultra-high temperature capability reaching 1700°C, driven by our MoSi heating elements designed for extreme conditions.
Utilize precision multi-zone temperature control to maintain accuracy within ±1°C, ensuring meticulous and consistent temperature management.
Leverage programmable 30-segment thermal profiles for advanced customization, enabling tailored heating strategies for distinct applications.
Our complete gas mixing system, featuring 4-channel MFCs, provides exceptional control and flexibility for various experimental setups.
Industry-leading vacuum performance is delivered by our robust vacuum system, supporting high-level operational requirements.
Safety Precautions: Prioritize safety with our comprehensive guidelines designed to prevent accidents and ensure a secure operational environment.
Avoid opening the furnace chamber when the temperature is equal to or greater than 200°C to safeguard against potential injuries. This essential precaution helps prevent personal injury and ensures safe handling.
To avert equipment damage due to overpressure, ensure that tube pressure does not exceed 0.02MPa (absolute pressure) during operation. Maintain operational integrity and avoid equipment damage by adhering to recommended pressure limits.
Warning: Non-compliance with these precautions could lead to significant risks and damages. Ignoring these precautions may result in serious personal injury, equipment damage, and potential safety hazards.
Be aware of the potential for serious personal injury if safety measures are not followed.
Mitigate risks of equipment damage by adhering to operational guidelines.
Ensure a safe working environment by preventing potential safety hazards through compliance.
When the furnace temperature exceeds 1000°C, maintain atmospheric pressure within the tube to avoid creating a vacuum. Preserve equipment integrity by maintaining atmospheric pressure inside the tube.
Avoid the simultaneous closure of both inlet and outlet valves during the heating of samples. If closure of valves is necessary, ensure continuous monitoring of pressure gauge readings.
Continuously monitor pressure gauge readings to maintain safe operational parameters.
Immediately open the exhaust valve if absolute pressure exceeds 0.02MPa to prevent hazardous situations.
This proactive measure prevents hazardous situations such as tube rupture or flange ejection.
Equipment Description: Explore the comprehensive integration of advanced components within our system.
This cutting-edge system integrates a gas flow control system, liquid injection system, and multi-stage temperature-controlled growth zones.
Our advanced gas flow control system ensures precise and efficient gas management.
The liquid injection system provides enhanced capabilities for material processing.
Multi-stage temperature-controlled growth zones offer optimal thermal management for various applications.
A robust water cooling system is included to ensure consistent operation and temperature regulation.
CNT Growth Furnace Specifications: Detailed technical specifications for precise carbon nanotube growth.
Maximum operating temperature: Efficiently adjustable from 0 to 1400°C, supporting a wide range of research conditions. The system allows continuous adjustment of temperature from 0-1400°C, accommodating diverse experimental needs.
Our vertical thermal field distribution ensures even heat allocation for optimal process outcomes. Achieve superior results with our vertical thermal field distribution, enhanced by dual-zone temperature control for precise thermal management.
The top-mounted liquid injection port, equipped with flow guide components, facilitates seamless material introduction. Our system includes a top-mounted liquid injection port,
This state-of-the-art CNT/thin-film CVD equipment empowers researchers and manufacturers to achieve groundbreaking results. Our cutting-edge CNT/thin-film CVD equipment enables continuous, uninterrupted growth processes with precision. With our equipment, you can achieve continuous, uninterrupted growth processes, streamlining production.
Our system supports continuous, uninterrupted growth processes, ensuring efficiency and consistency.
It facilitates precise thermal management, crucial for controlled nanostructure synthesis. Achieve controlled nanostructure synthesis with our precise thermal management capabilities.
Integrated liquid/gas phase delivery enables complex material deposition for advanced research. Our system supports complex material deposition with integrated liquid/gas phase delivery.
Specialized components are dedicated to carbon nanotube (CNT) synthesis, facilitating state-of-the-art research and development.
Technical Specifications - Carbon Nanotube/Nanowire CVD Growth Furnace
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange
The system includes a stainless steel vacuum flange assembly (equipped with stainless steel needle valves and mechanical pressure gauge). The armored flange allows thermocouple extension to the inlet for temperature monitoring.
Key Features:
High-purity alumina tube for contamination-free growth
Precision temperature control (±1°C) across 800mm uniform zone
Note: All specifications subject to technical verification. Designed for advanced nanomaterial synthesis under controlled atmospheres.
Robust SiC heating elements for ultra-high temperature operation
Complete gas/vacuum interface with measurement capabilities
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specially designed for CVD processes, featuring:
Double-layer shell structure with an air-cooling system, keeping the surface temperature below 55°C
30-segment PID programmable intelligent temperature control with phase-angle firing for precise heating
Alumina polycrystalline fiber chamber lining for excellent thermal insulation and uniform temperature distribution
Applications:
Silicon carbide (SiC) coating
Conductivity testing of ceramic substrates
Controlled growth of ZnO nanostructures
Atmosphere sintering of ceramic capacitors (MLCC)
Key Advantages:
User-friendly touchscreen interface
Energy-efficient thermal design
Research-grade temperature uniformity
Versatile for advanced material processing
Fully automated operation with unattended capability
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber for contamination-sensitive processes
Precision 3-zone temperature monitoring (±1°C)
Research-grade vacuum capability down to 10³ Pa
Complete gas flow control with triple MFC channels
Industrial-grade components with extended durability
){kind=link}