Customization: | Available |
---|---|
After-sales Service: | on-Line Service |
Warranty: | One Year |
Suppliers with verified business licenses
Sample stage |
Size | 100mm | Heating temperature |
500 ºC or less |
Rotational speed |
1-30r/min |
Temperature control accuracy |
+ / - 1 ºC |
|
Magnetron sputtering head |
Quantity |
2 inches x1 |
Cooling method |
Water cooling |
Vacuum chamber |
Cavity size | Φ200mm X 220mm | Observation window |
Omnidirectional view |
Cavity material | High-purity quartz | Opening method |
Top cover removable | |
Power configuration |
Number of DC power supplies |
1 | Output power |
≤400W |
Output voltage | ≤600V | Response time |
< 5ms | |
Water cooling system |
Tank volume | 9L | Traffic | 10L/min |
Film thickness gauge |
Measurement accuracy |
0.1 Angstroms | Cooling method |
Water cooling |
Others |
Supply voltage |
AC220V,50Hz |
Power of the whole machine |
1kw |