Multi-Source High Vacuum Evaporation Coating Instrument

• Customization: Available
• After-sales Service: on-Line Service
• Warranty: 1 Year
• Model NO.: RJ-ZF500-6S
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Evaporation Source: 6 × Tungsten Boats
• Vacuum Chamber: Ø500 × 500mm
• Transport Package: Wooden Case
• Specification: Customized
• Trademark: RJ
• Origin: Zhengzhou, China

Product Description

Multi-Source High Vacuum Evaporation Coating System
This equipment is a multi-source high vacuum evaporation coating system. It features a front-opening vacuum chamber with a spacious and highly expandable design, suitable for coating large or varied samples. The chamber is equipped with an upper-mounted sample stage, which can accommodate different sample fixtures or clamping methods. The stage supports rotation, heating, and vertical adjustment (120mm range), all controlled via an integrated touchscreen interface.
The two-stage vacuum pumping system consists of a dual-stage rotary vane pump and a turbo molecular pump, ensuring an oil-free, high-vacuum environment for deposition. The system includes a pneumatic valve control for one-touch operations (e.g., pumping, sample exchange without shutdown, or full system halt) via the touchscreen.

 

Technical Specifications

Category	Parameter	Details	Additional Info
Sample Stage	Size	Max. Ø150mm	Height adjustable (±120mm)
Evaporation Sources	Quantity	6 × Tungsten Boats	Water-cooled copper electrodes
Vacuum Chamber	Dimensions	Ø500 × 500mm	Front-mounted Ø100mm viewport (with shutter)
	Material	304 Stainless Steel	Front-opening design
Thickness Monitor	Type	Quartz Crystal Monitor (optional multi-channel)
Vacuum System	Primary Pump	Dual-stage Rotary Vane Pump	KF16 flange
	Secondary Pump	Turbo Molecular Pump	CF160 flange
	Vacuum Measurement	Resistive + Ionization Gauge	Base pressure: 5E-5 Pa
	Pumping Speed	Rotary Pump: 1.1 L/s; Turbo Pump: 600 L/s
Gas Flow Control	Mass Flow Controller	500 sccm (Argon)
Control System	Automation	PLC-based	Touchscreen + manual control panel
Power Supply	Voltage	AC 220V/380V, 50/60Hz	Dimensions: 1000×800×1500mm
	Total Power	5 kW	Weight: 350 kg

 

Key Features

• Evaporation Sources: Two sets of tungsten boats (water-cooled electrodes) support currents up to 300A and temperatures exceeding 2000°C, enabling deposition of refractory metals.
• Safety Design: Separated chamber and electrical compartments (left-right layout) ensure water-electricity isolation for user safety.
• User-Friendly Controls:
  • Touchscreen: Manages vacuum, sample stage, and auxiliary functions.
  • Dedicated Panel: For evaporation power and thickness monitoring, minimizing operational errors.
• High Precision: Ideal for laboratory-scale thin-film deposition with uniform thickness control.

This system combines robust performance, modular flexibility, and intuitive operation, making it an essential tool for advanced physical vapor deposition (PVD) applications.