| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a state-of-the-art high-vacuum, fast-heating tubular furnace crafted with precision. Featuring a quartz chamber and vacuum flanges, it employs halogen lamp heating technology to achieve an impressive rapid heating rate of up to 50°C per second, and integrates advanced PID automatic control with an extensive 30 programmable segments.
Tailored for excellence in annealing semiconductor or solar cell substrates, this high-temperature annealing tubular furnace facilitates efficient rapid thermal processing of samples in vacuum or controlled atmosphere environments. It finds widespread application across university laboratories and industrial research facilities , empowering advances in:
Thin-film deposition
Rapid annealing of diverse materials
Silicidation processes
Diffusion operations
Crystallization techniques
Densification methods
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: Customization for other sizes is available to cater to specific customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
This sliding tube furnace is innovatively equipped with dual sliding rails at the base, hosting two tube furnaces for synchronized movement, allowing seamless left and right relocation for rapid cooling. This RTP rapid annealing furnace is adept at heating samples under various conditions, including vacuum, atmospheric, and air environments, making it indispensable for processes like rapid annealing, silicidation, diffusion, crystallization, densification, and more.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The sliding three-zone tube furnace is a cutting-edge rapid thermal annealing furnace featuring an 80mm outer diameter quartz tube, capable of reaching a maximum temperature of 1200°C. Designed with a convenient pair of sliding rails, the furnace can effortlessly traverse along the tube, ensuring rapid heating and cooling.
For optimal heating speeds, preheat the furnace to the required temperature and slide it into the sample position. For swift cooling, simply retract the furnace from the sample post-heating.
This system stands as an ideal, cost-effective solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This custom RTP (Rapid Thermal Processing) annealing furnace incorporates an RTP sliding-rail tube furnace, coupled with a multi-channel mass flow controller system, and a sophisticated vacuum system, meticulously engineered for annealing semiconductor wafers, solar cells, or samples up to 3" in size.
The tube furnace leverages cutting-edge infrared lamp heating, delivering an ultra-fast heating rate of 50°C per second. It boasts 30-segment precise temperature control with an impeccable accuracy of ±1°C. Outfitted with an RS485 interface and sophisticated control software, the furnace offers seamless computer operation and monitoring, providing real-time temperature curves for heightened precision and insight.
This The rapid thermal processing tube furnace is a marvel of engineering, designed to provide swift and efficient heating solutions, ensuring that your industrial processes are optimized for performance and energy consumption. This innovative furnace is widely used for a multitude of applications due to its versatile and adaptive nature. It is particularly crucial for large-area 2D graphene growth via CVD, offering precision and consistency in production. and is meticulously optimized for enhancing the quality of semiconductor and solar cell wafer annealing, ensuring superior output and reliability.. The furnace is seamlessly controlled by a computer in real-time through the advanced RS485 interface paired with dedicated, user-friendly software,ensuring accurate visualization of temperature profiles for precise control and monitoring.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Gas Mixing System - This component is designed to ensure precise control over the gas environment within the furnace, enhancing the quality of the heating process.
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Vacuum System - A state-of-the-art system that ensures optimal vacuum conditions for enhanced process quality and efficiency.
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace is equipped with robust vacuum flanges at both ends of the furnace tube, achieving a high vacuum level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. A pair of sliding rails provides ease of movement across the furnace. Experience unparalleled heating and cooling rates up to 100°C per minute, and for the swiftest heat transitions, the furnace can be preheated to the desired temperature before being moved to the sample position. Post-heating, it can be relocated to facilitate rapid cooling. Under vacuum or inert gas conditions, this system achieves heating and cooling rates of up to 10°C per second, making it the quintessential, cost-effective choice for rapid thermal processing.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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