| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Discover the remarkable Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a cutting-edge high-vacuum tubular marvel featuring a quartz chamber and vacuum flanges. It leverages advanced halogen lamp technology to deliver an impressive rapid heating rate, achieving speeds of up to 50°C per second. This state-of-the-art furnace is equipped with PID automatic control and an astonishing 30 programmable segments.
Engineered with precision, it caters specifically to the annealing of semiconductor or solar cell substrates, thereby offering unparalleled rapid thermal processing of samples in both vacuum and controlled atmosphere environments. This furnace is a staple in leading university laboratories as well as pioneering industrial research facilities for diverse applications including:
Innovative thin-film deposition
Efficient rapid annealing of various advanced materials
Sophisticated silicidation processes
Precision diffusion operations
Meticulous crystallization
Comprehensive densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: We offer customization options for alternative sizes tailored to meet specific customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
Exemplifying precision engineering, the sliding tube furnace features dual sliding rails at its foundation, carrying two tube furnaces which can glide seamlessly for instant cooling. This RTP rapid annealing furnace accommodates diverse environments, such as vacuum, atmospheric, and air conditions, excelling in rapid annealing, silicidation, diffusion, crystallization, densification, and other specialized processes for a wide array of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The innovative sliding three-zone tube furnace stands out as a rapid thermal annealing powerhouse, boasting an 80mm outer diameter quartz tube and sustaining temperatures soaring up to 1200°C. Its strategic design with sliding rails facilitates swift transitions across the tube, enabling expedited heating and cooling.
For optimal heating efficiency, preheat the furnace to the desired temperature, then precisely slide it over the sample. For rapid cooling, retract the furnace post-heating.
This system emerges as an exceptionally cost-effective solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace comprises a sophisticated RTP sliding-rail tube furnace, an advanced multi-channel mass flow controller system, and an efficient vacuum system, purpose-built for the annealing of semiconductor wafers, solar cells, and other samples (up to 3" in size).
The tube furnace utilizes state-of-the-art infrared lamp heating, achieving an extraordinary ultra-fast heating rate of 50°C per second. It boasts 30-segment precise temperature control with unparalleled accuracy of ±1°C. Outfitted with an RS485 interface and intuitive control software, the furnace offers seamless computer operation and monitoring, complete with real-time temperature curve displays.
This Experience the cutting-edge technology of our rapid thermal processing tube furnace, designed to deliver unparalleled efficiency and performance. This state-of-the-art furnace is widely utilized for a diverse range of applications, including the high-precision and large-scale 2D graphene growth via CVD (Chemical Vapor Deposition). It is meticulously optimized to meet the demanding requirements of semiconductor fabrication and solar cell wafer annealing, ensuring optimal results.Harness the power of advanced technology as the computer controls the furnace in real-time through the reliable RS485 interface, complemented by sophisticated dedicated software,enabling seamless visualization of temperature profiles to enhance process accuracy.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Gas Mixing System - This integral component is key to customizing the atmosphere within the furnace, tailored for specific processing needs.
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Vacuum System - Engineered for excellence, this system ensures a pristine environment, critical for precision applications.
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace is expertly equipped with vacuum flanges strategically placed at both ends of the furnace tube. Achieve impressive vacuum levels of 10-5 Torr with a molecular pump and 10-3 Torr using a mechanical pump. A precisely engineered pair of sliding rails at the furnace's base allows for smooth manual movement. With the capacity to reach maximum heating and cooling rates of up to 100°C per minute, this furnace truly excels. Enhance efficiency by preheating to the desired temperature and strategically positioning the furnace for sample processing. Achieve rapid cooling by repositioning the furnace post-heating. Under controlled vacuum or inert gas conditions, experience extraordinary heating and cooling rates up to 10°C per second. This makes it an exceptional, cost-effective solution for rapid thermal processing applications.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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