Integrated Glove Box Evaporation System Thermal Evaporator System PVD Coating System for Lithium Battery Fabrication

• Customization: Available
• After-sales Service: on-Line Service
• Warranty: on-Line Service
• Model NO.: Made-to-order
• Type: Coating Production Line
• Coating: Vacuum Coating
• Certification: CE, ISO
• Condition: New
• Backing Pump: Dual Stage Rotary Vane Pump
• Ultimate Vacuum: 1.0e-5PA
• Total Power: 5kw
• Evaporation Source: Tungsten Boat X2
• Chamber Material: 304 Stainless Steel
• Secondary Pump: Turbo Molecular Pump
• Supply Voltage: AC380V, 50Hz AC380V 50Hz
• Transport Package: Wooden Box Outside, Plastic Paper Inside
• Specification: Dia. 300mm * 400mm
• Trademark: RG

Product Description

Introduction of  high vacuum evaporation coater:
The coating equipment is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities.
II. The basic structure:
The coating equipment consists of vacuum chamber, metal/organic source system, sample stage system, vacuum pump set, film thickness monitor system, equipment rack, and electronic control system. The front door of the vacuum chamber can be connected to the glove box, and an integrated design scheme is adopted. The whole set of equipment is compact in structure and simple in layout, so as to avoid the messy appearance of experimental equipment.

1. Vacuum Chamber

Parameter	Specification
Appearance	1 set of high-quality 304 stainless steel D-shaped vacuum chamber. Internal dimensions: D400×480mm. Equipped with front and rear double doors. The rear door adopts a hinged square door for easy cleaning, internal debugging, maintenance, and sample handling. The front door uses a horizontally sliding square door. Each front and rear door is equipped with 1 set of DN100 windows.
Bottom	2 sets of metal source interfaces, 4 sets of organic source interfaces, 1 set of molecular pump interface, 2 sets of lighting interfaces, and 3 sets of film thickness probe interfaces.
Top	1 set of sample stage interface, 1 set of electric baffle interface, 1 set of high vacuum pneumatic gate valve interface.
Left side	1 set of high vacuum pneumatic flapper valve interface.

 

2. Metal/Organic Source System

Parameter	Specification
Metal source	Quantity: 2 sets. 2 sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and spiral wires. Equipped with pneumatic baffles. 1 set of 1KW DC constant current power supply (digital display), current adjustment accuracy 1A (fine adjustment). Suitable for evaporation of common metals and metal oxides.
Organic source	Quantity: 4 sets. 4CC quartz boat, 2 temperature control power supplies (temperature control meter display accuracy 0.1°C). Temperature range: RT~500°C (temperature control accuracy ±1°C), with pneumatic baffle.
Baffle	The evaporation sources are independent of each other, and the baffles are separated to avoid cross-contamination.

 

3. Sample Stage System

Parameter	Specification
Substrate rotation	Speed continuously adjustable from 0~30 rpm.
Substrate lifting	Electric lifting. The distance between the substrate and the evaporation source is continuously adjustable from 200~300mm via the touch screen.
Sample holder	20×20mm substrate, 8 pieces.
Substrate shutter	Electric shutter.

 

4. Vacuum System

Component

Specification

Vacuum pump set

1) 1 set of 600L/s molecular pump; 2) 1 set of 8L/s rotary vane pump; 3) 1 set of CF150 high vacuum pneumatic gate valve; 4) 1 set of CF40 high vacuum pneumatic flapper valve; 5) 2 sets of KF16 high vacuum pneumatic flapper valves; 6) 1 set of KF40 high vacuum pneumatic flapper valve; 7) 1 set of KF40 vacuum solenoid valve; 8) 2 sets of KF40 pump valve connecting hoses, 1 set of KF40 tee; 9) 1 set of digital vacuum gauge (measurement range: 1×10~1×10 Pa).

 

5. Film Thickness Monitor System

Component	Specification
Film thickness meter	1 set of three-channel quartz crystal film thickness monitor.
Film thickness probe	3 sets of CF35 water-cooled film thickness probes.

 

6. Equipment Rack

Component	Specification
Frame	1 set of 40 carbon steel square tube welded frame.
Mobility	4 universal wheels for movement and adjustment.
Stabilization	4 M16 feet for locking and positioning.

 

7. Electronic Control System

Component	Specification
Power supply of metal source	1 set.
Power supply of organic source	2 sets (one for two).
Evaporation source baffle power supply	1 set.

 

8. Other Parameters

Parameter	Specification
Phase loss protection	Includes misoperation protection, linkage interlock, and one-key vacuum start/stop functions.
Power supply	~220V two-phase power supply system (peak 3KW).
Water supply	Small chiller, cooling water temperature 5°C~35°C. Operating environment temperature: 10°C~40°C.
Air supply	Small oil-free silent air pump, providing 0.2~0.3MPa air pressure to drive pneumatic valves.
Ultimate vacuum	6×10 Pa. Time from atmosphere to 6×10 Pa: <35 minutes (filled with dry nitrogen). After 12 hours shutdown, vacuum level ≤10 Pa.