| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK stands as a remarkable tubular diffusion/oxidation furnace, carefully engineered for cutting-edge R&D applications across enterprises, universities, and esteemed research institutes. This versatile equipment supports an array of crucial processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities designed for pioneering material research
Precision temperature control ensures consistently superior results
Compact design tailored for seamless integration in laboratory environments
Product Features:
1. Expertly accommodates a wide range of processes, including polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Employs a robust industrial computer + PLC system, delivering fully automated control over furnace temperature, boat movement, gas flow, and valves, facilitating complete process automation.
3. Showcases an intuitive human-machine interface, providing effortless process control adjustments and real-time process status displays.
4. Equipped with multiple process pipelines, offering users convenient selection options.
5. Integrates powerful software features, including self-diagnostic tools, substantially minimizing maintenance efforts.
6. Features automatic constant temperature zone adjustments and cascade control to ensure precise regulation of actual process temperatures within the reaction tube.
7. Offers essential alarms and protective functions for scenarios like over-temperature, thermocouple breakage, short circuits, and deviations in process gas flow.
8. Customizable product solutions are available to meet unique customer specifications.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system comprises the following sophisticated components:
A state-of-the-art 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system,
A high-efficiency 2L/s vacuum pump with comprehensive connecting components
This system is equipped with directional and swivel casters at the base, ensuring a compact footprint and effortless mobility throughout your facility.
Designed for CVD processes, this system is ideal for universities, research centers, and industrial manufacturers conducting experiments and production involving chemical vapor deposition.
(Note: Structured for clarity while maintaining technical accuracy and natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Advanced touchscreen control with seamless data recording
Ingenious dual-zone vertical design ensuring optimal thermal management
Comprehensive gas flow control system integrated
Safety-centric design equipped with multiple protection features
Tailor-made components adaptable for specific research demands
Note: Specifications can be tailored to meet precise requirements. This system fuses precise temperature control with an efficient gas delivery system for cutting-edge CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This dual-zone sliding-track CVD tube furnace features a rail-guided sliding design, allowing rapid thermal transitions by horizontally sliding the furnace. It can connect six individual gas sources, with accurate flow measurement and control through a touchscreen 6-channel mass flow controller (MFC).
This high-temperature CVD system is perfectly crafted for universities, research institutions, and industrial manufacturers to facilitate experiments and production tailored to chemical vapor deposition (CVD).
Innovative sliding-track mechanism enabling swift thermal cycling
Multi-gas compatibility (with 6 independent channels)
Precision flow control with an intuitive touchscreen MFC interface
Versatile utility for research and small-batch production initiatives
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
The unique sliding mechanism ensures rapid thermal cycling efficiency
A six-channel precision gas control system
Research-grade vacuum capability
Complete turnkey solution equipped with all essential accessories
Industrial-grade construction fortified with safety protections
Tube stoppers (2)
O-ring seals
Protective gloves (1 pair)
Crucible hook (1)
PTFE tubing (3m)
Hex keys (2)
Operation manual
This system is explicitly designed for CVD processes, including:
Silicon carbide coating
Conductivity testing of ceramic substrates
2D material growth
Controlled growth of ZnO nanostructures
Atmosphere sintering of ceramic capacitors (MLCC)
It also serves as a dedicated graphene film growth furnace for graphene preparation. The furnace features a sliding rail base design, allowing manual lateral movement to expose the tube to room temperature for rapid cooling.
This equipment is particularly suitable for CVD experiments requiring fast heating/cooling rates, making it ideal for:
High-efficiency graphene synthesis
Other CVD applications demanding rapid thermal cycling
Key Advantages:
Precision temperature control for sensitive material growth
Unique sliding mechanism enables faster processing
Versatile applications across advanced material research
Optimized for both graphene and general CVD processes
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Safety Precautions:
Do not open the furnace chamber when temperature ≥200°C to prevent personal injury.
Tube pressure must never exceed 0.02MPa (absolute pressure) during operation to avoid equipment damage from overpressure.
Warning: Failure to follow these precautions may result in:
Serious personal injury
Equipment damage
Safety hazards
When furnace temperature >1000°C, the tube must not be under vacuum - maintain atmospheric pressure inside the tube.
Avoid closing both inlet and outlet valves simultaneously during sample heating. If valves must be closed:
Continuously monitor pressure gauge readings
Immediately open exhaust valve if absolute pressure exceeds 0.02MPa
Prevents hazardous situations (tube rupture, flange ejection, etc.)
Equipment Application & Features
This high-temperature CVD tube furnace is designed for chemical vapor deposition (CVD) processes, including:
Silicon carbide (SiC) coating
Conductivity testing of ceramic substrates
Controlled growth of ZnO nanostructures
Atmosphere sintering of ceramic capacitors (MLCC)
Primary Users:
Our esteemed clientele includes prestigious universities, cutting-edge research institutions, and leading industrial manufacturers who are engaged in advanced vapor deposition experiments and production processes, consistently pushing the boundaries of innovation and development.
Key Specifications:
Crafted with precision, the Alumina (AlO) furnace tube is engineered to withstand astonishing temperatures soaring up to 1600°C, ensuring resilience and durability in extreme conditions.
Designed with versatility in mind, the system's vacuum & atmosphere-capable configuration offers exceptional adaptability for diverse operational needs.
The heating element is composed of state-of-the-art MoSi (molybdenum disilicide), delivering stellar performance and unmatched reliability.
Encased in ceramic fiber insulation, the furnace chamber guarantees excellent thermal uniformity and remarkable energy efficiency, optimizing operational excellence.
Advantages:
Unparalleled in precision, this system maintains high temperature stability with a remarkable accuracy of ±1°C, ensuring consistent and reliable results.
Experience rapid heating and cooling phases with superior heat retention capabilities, streamlining your process cycles and enhancing productivity.
Engineered for safety and ease, our system offers a user-friendly interface designed for safe operation, minimizing risks while maximizing user satisfaction.
This equipment serves as a versatile powerhouse, perfectly suited for advanced materials research and pushing the frontier of scientific exploration.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
With an impressive capability to achieve ultra-high temperatures of 1700°C, bolstered by MoSi heating elements, our system sets new standards in thermal performance.
Benefit from precision multi-zone temperature control with an exceptional accuracy of ±1°C, allowing intricate thermal management and optimization.
Customizable programmable 30-segment thermal profiles provide flexibility and control, enabling you to tailor your processes with finesse.
Our complete gas mixing system is equipped with 4-channel MFCs, facilitating precise and efficient gas delivery for optimal process conditions.
Delivering industrial-grade vacuum performance, our system ensures peak operational efficiency and reliability under the most demanding conditions.
Safety Precautions:
It is paramount to avoid opening the furnace chamber when the temperature is ≥200°C to ensure operator safety and prevent potential hazards. to prevent personal injury.
The tube pressure must be vigilantly monitored to ensure it never exceeds 0.02MPa (absolute pressure) during operation to avert equipment damage due to overpressure. during operation to avoid equipment damage from overpressure.
Warning: Failure to adhere to these safety precautions can lead to:
serious personal injury,
equipment damage,
or safety hazards, underscoring the importance of strict compliance with operational guidelines.
When the furnace temperature exceeds 1000°C, it is critical to maintain atmospheric pressure inside the tube, as vacuum conditions are prohibited to safeguard the equipment's integrity. - maintain atmospheric pressure inside the tube.
Avoid closing both inlet and outlet valves simultaneously during sample heating to prevent adverse conditions. If valves must be closed:
It is imperative to continuously monitor pressure gauge readings with vigilance.
Immediately open the exhaust valve if the absolute pressure surpasses 0.02MPa, serving as a proactive measure to prevent hazardous situations such as tube rupture or flange ejection.
Prevents hazardous situations (tube rupture, flange ejection, etc.)
Equipment Description
This sophisticated system seamlessly integrates:
an advanced gas flow control system,
a robust liquid injection system,
multi-stage temperature-controlled growth zones for precision applications,
and a reliable water cooling system for enhanced operational stability.
CNT Growth Furnace Specifications:
Capable of reaching a maximum operating temperature of 1400°C, this furnace offers continuously adjustable parameters ranging from 0 to 1400°C for diverse application needs. 1400°C (continuously adjustable from 0-1400°C)
Boasting a vertical thermal field distribution, with dual-zone temperature control for precise thermal management,
the top-mounted liquid injection port is complemented with flow guide components, ensuring optimal material deposition.
This Cutting-edge CNT/thin-film CVD equipment enables:
continuous, uninterrupted growth processes,
precise thermal management for controlled nanostructure synthesis,
and integrated liquid/gas phase delivery for complex material deposition, setting a new benchmark in material science engineering.
Introducing the ultimate in precision and innovation: Carbon Nanotube (CNT) Synthesis Components. Engineered to elevate your research and development processes.
Technical Specifications - Dive into the world of unrivaled precision with our Carbon Nanotube/Nanowire CVD Growth Furnace, your gateway to groundbreaking innovations.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Crafted for excellence: Stainless Steel Flange, ensuring durability and performance in every application.
Revolutionize your setup with our comprehensive system featuring the robust stainless steel vacuum flange assembly, equipped with premium stainless steel needle valves and a mechanical pressure gauge. The armored flange facilitates seamless thermocouple extensions to the inlet, providing precise temperature monitoring for optimal results.
Key Features that set us apart:
Achieve unparalleled purity with our High-purity alumina tube, designed for contamination-free growth processes.
Precision at its finest: Experience temperature control within ±1°C over an extensive 800mm uniform zone, ensuring consistent results every time.
Note: Specifications are subject to technical verification. This furnace is tailored for advanced nanomaterial synthesis under meticulously controlled atmospheres.
Empower your operations with Robust SiC heating elements, engineered for ultra-high temperature functionality.
Benefit from our Complete gas/vacuum interface, offering comprehensive measurement capabilities for proactive process management.
A Glimpse into Our Equipment:
The epitome of technological advancement: LCD Touchscreen CVD High-Temperature Furnace stands as a tube furnace meticulously designed for CVD processesand boasting features like:
Double-layer shell structure complemented by an efficient air-cooling systemto maintain surface temperatures below 55°C
A sophisticated 30-segment PID programmable intelligent temperature control integrated with phase-angle firing technology for precise heating solutions
Alumina polycrystalline fiber chamber lining ensuring exceptional thermal insulation and consistent uniform temperature distribution
Applications that redefine possibilities:
Advanced Silicon carbide (SiC) coating techniques
Conductivity testing tailored for ceramic substrates
Controlled and innovative growth of ZnO nanostructures
Atmosphere sintering processes for ceramic capacitors (MLCC)
Key Advantages that empower:
Intuitive and User-friendly touchscreen interface
Cutting-edge Energy-efficient thermal design
Unmatched research-grade temperature uniformity
Versatility for pioneering advanced material processing
Fully automated operation offering unmatched unattended capability
High-Temperature Furnace Specifications that impress:
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features that define excellence:
An Ultra-clean alumina-coated chamber ideal for contamination-sensitive processes
Precision 3-zone temperature monitoring maintained within (±1°C) for impeccable accuracy
Top-tier Research-grade vacuum capability achieving pressures down to 10³ Pa
Comprehensive gas flow control facilitated by triple MFC channels
Industrial-grade components boasting extended durability for all your needs
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