| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace ingeniously crafted for pioneering R&D applications across enterprises, universities, and research institutes. It supports a wide array of processes including:
Polysilicon and silicon nitride deposition,
Diffusion,
Oxidation,
Annealing.
Versatile processing capabilities for cutting-edge material research.
Precision temperature control ensures reliable and consistent results every time.
Compact design perfectly optimized for sophisticated lab environments.
Product Features:
1. Expertly accommodates processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and more.
2. Employs a robust industrial computer paired with a PLC system to achieve seamless, fully automated control over furnace temperature, boat movement, gas flow, and valves, ensuring effortless automation of the entire process.
3. Features an intuitive human-machine interface, facilitating easy modifications of process control parameters and providing real-time displays of various process statuses.
4. Offers a multitude of process pipelines for convenient and user-friendly selection.
5. Equipped with powerful software capabilities, including self-diagnostic tools to substantially reduce maintenance time.
6. Automatic adjustment of the constant temperature zone with cascade control guarantees precise regulation of the actual process temperature within the reaction tube.
7. Features alarms and protective functions for over-temperature, thermocouple breakage, short circuits, and deviations in process gas flow.
8. Customizable products tailored to meet specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system is comprised of:
A cutting-edge 1200°C dual-zone tube furnace,
A sophisticated 3-channel mass flow controller (MFC) gas supply system,
A 2L/s vacuum pump, complete with related connecting components.
The system is designed with innovative directional and swivel casters at the base, providing a compact footprint and ensuring flexible mobility.
Unveiling an impeccable design tailored specifically for Complex CVD (Chemical Vapor Deposition) processes, this cutting-edge system is perfectly suited for prestigious universities, pioneering research centers, and forward-thinking industrial manufacturers to seamlessly conduct both experimental and production activities involving the intricate processes of chemical vapor deposition.
(Rest assured: Structured to ensure clarity while preserving the technical precision and natural fluency of English.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Featuring a high-precision 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Exceptional Key Features:
State-of-the-art advanced touchscreen control equipped with comprehensive data recording capabilities
Ingenious dual-zone vertical layout for superior thermal management
Fully integrated gas flow control system included for enhanced performance
Designed with a focus on safety, incorporating multiple protective features
Customizable components available to cater to specific research demands
Note: Specifications can be tailored based on actual requirements. This system masterfully combines precision temperature control with efficient gas delivery, ideal for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Components of the Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This state-of-the-art dual-zone sliding-track CVD tube furnace boasts a sophisticated rail-guided sliding design, facilitating rapid thermal transitions by horizontally moving the furnace. It is capable of connecting up to six distinct gas sources, offering precise flow measurement and management through a high-tech touchscreen 6-channel mass flow controller (MFC).
This advanced high-temperature CVD system is meticulously crafted for renowned universities, esteemed research institutions, and innovative industrial manufacturers to efficiently conduct experiments and production activities related to the sophisticated field of chemical vapor deposition (CVD).
Ingenious Sliding-track Mechanism for rapid thermal cycling and efficiency
Multi-gas compatibility featuring 6 independent channels
Precision flow control powered by a user-friendly touchscreen MFC interface
Versatile applications catering to research and small-batch production
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System Model: KJ-6Z
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System Overview
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories Include:
Quartz furnace tube (1) - durable and reliable
Vacuum flange set (1) - for secure sealing
Distinctive Key Features:
Unique sliding mechanism allowing for rapid thermal cycling
Sophisticated six-channel precision gas control system
Research-grade vacuum capability for superior performance
Complete turnkey solution with all-inclusive necessary accessories
Constructed with industrial-grade materials and safety protections
Tube stoppers (2) - ensuring smooth operations
O-ring seals - for perfect sealing
Protective gloves (1 pair) - ensuring user safety
Crucible hook (1) - for ease of handling
PTFE tubing (3m) - highly durable
Hex keys (2) - for precise assembly
Comprehensive operation manual
This system is meticulously engineered for CVD processes that are at the forefront of technological innovation and excellence,including the following:
State-of-the-art Silicon carbide coating applications,
Advanced conductivity testing of ceramic substrates,
Precision 2D material growth techniques,
Controlled, cutting-edge growth of ZnO nanostructures,
Atmosphere sintering of multilayer ceramic capacitors (MLCC) to perfection.
Additionally, this system functions as an exceptional dedicated graphene film growth furnace, for superior graphene preparation. This furnace boasts a revolutionary sliding rail base designthat allows effortless manual lateral movement, exposing the tube to ambient conditions for ultra-rapid coolingand efficiency.
This equipment is perfectly suited for CVD experiments that demand swift heating and cooling rates,making it the quintessential choice for:
High-efficiency and precision-driven graphene synthesis,
and other CVD applications that necessitate rapid thermal cycling capabilities.
Key Advantages that set this system apart:
Unmatched precision temperature control, ensuring optimal conditions for the growth of sensitive materials,
A unique sliding mechanism that enables significantly faster processing times,
Versatility across an array of applications in the sphere of advanced material research,
Optimized functionality for both graphene-specific and general CVD processes.
Fascinating Sliding Rail Tube Furnace Specifications:
Furnace Section Specifications:
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply Details:
| Input Power | Single-phase 220V, 50Hz, 3KW | Ensures reliable and consistent performance.
Robust Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Advanced Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Considerations for Users:
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications Obtained:
| ISO Certification | CE Certification | A testament to its global quality standards.
Safety Precautions to ensure user safety:
Do not open the furnace chamber when temperature is equal to or exceeds 200°C to prevent any risk of personal injury.
Tube pressure must never exceed 0.02MPa (absolute pressure) during operation to avoid potential equipment damage due to overpressure.
Critical Warning: Failure to adhere to these precautions may result in:
Severe personal injury,
Irreversible equipment damage,
and significant safety hazards.
When furnace temperature exceeds 1000°C, the tube should not be under vacuum - it is crucial to maintain atmospheric pressure inside the tube.
Avoid concurrently closing both inlet and outlet valves during sample heating. If closure of valves is necessary:
Be vigilant in continuously monitoring pressure gauge readings
Immediately open the exhaust valve if absolute pressure readings exceed 0.02MPa
To prevent hazardous situations such as tube rupture or flange ejection.
Equipment Application & Features Comprehensive Overview:
This advanced high-temperature CVD tube furnace is meticulously crafted for chemical vapor deposition (CVD) processes, including:
Leading-edge Silicon carbide (SiC) coating applications,
Sophisticated conductivity testing of ceramic substrates,
Controlled and innovative growth of ZnO nanostructures,
and atmosphere sintering of ceramic capacitors (MLCC) to meet the highest standards.
Primary Users:
Our RJ PVD Coating Machine is the preferred choice for Universities, esteemed research institutions, and innovative industrial manufacturers. Perfect for conducting intricate vapor deposition-related experiments and ensuring seamless production processes.
Key Specifications:
Alumina (AlO) furnace tube, expertly crafted to withstand scorching temperatures up to 1600°C.
Ingeniously designed for both vacuum & atmospheric conditions, ensuring versatile operational capabilities.
Heating element: Incorporates a high-performance MoSi (molybdenum disilicide) for reliable thermal management.
Furnace chamber: Features ceramic fiber insulation, guaranteeing excellent thermal uniformity and enhanced energy efficiency.
Advantages:
Unmatched high temperature stability with an impressive precision of ±1°C.
Experience rapid heating and cooling, coupled with superior heat retention capabilities for optimal performance.
Engineered for safe & user-friendly operation, ensuring peace of mind.
Versatile and ideal for cutting-edge advanced materials research.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Boasting an ultra-high temperature capability reaching up to 1700°C, powered by MoSi heating elements.
Features precision multi-zone temperature control with a remarkable accuracy of ±1°C.
Customize your operations with programmable 30-segment thermal profiles for precise process management.
Equipped with a comprehensive gas mixing system featuring 4-channel MFCs for precise gas distribution.
Delivers industrial-grade vacuum performance for optimal operational efficiency.
Safety Precautions:
For your safety, do not open the furnace chamber when temperature is ≥200°C to prevent potential personal injury.
Ensure tube pressure does not exceed 0.02MPa (absolute pressure) during operation to prevent possible equipment damage due to overpressure.
Warning: Failure to adhere to these precautions may result in:
Serious personal injury that could otherwise be avoided.
Significant equipment damage leading to operational delays.
Increased safety hazards that compromise your working environment.
If the furnace temperature exceeds 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube for safety.
To prevent malfunctions, avoid simultaneously closing both inlet and outlet valves during sample heating. If the need arises to close the valves:
Continuously monitor pressure gauge readings for any fluctuations.
Promptly open the exhaust valve if absolute pressure rises above 0.02MPa
This ensures the prevention of hazardous situations such as tube rupture or flange ejection.
Equipment Description
This sophisticated system integrates:
A comprehensive gas flow control system for precision operations.
An advanced liquid injection system to enhance material processing.
Multi-stage temperature-controlled growth zones for optimal thermal management.
An efficient water cooling system ensuring consistent performance.
CNT Growth Furnace Specifications:
Maximum operating temperature: A robust 1400°C, continuously adjustable from 0-1400°C for tailored processes.
Vertical thermal field distribution with precise dual-zone temperature control.
Features a top-mounted liquid injection port with specialized flow guide components for enhanced efficiency.
This CNT/thin-film CVD equipment facilitates:
Continuous, uninterrupted growth processes for consistent outcomes.
Precise thermal management for controlled synthesis of nanostructures tailored to your needs.
Integrated liquid/gas phase delivery enables complex material deposition with precision and ease.
Experience the forefront of innovation with our Carbon Nanotube (CNT) Synthesis Components, designed to elevate your material synthesis processes to the next level of precision and excellence.
Technical Specifications - Carbon Nanotube/Nanowire CVD Growth Furnace. Discover the detailed engineering behind our state-of-the-art furnace, crafted to meet the meticulous demands of CNT and nanowire growth with unparalleled efficiency.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange. Built for durability and precision, our stainless steel flange is an essential component for secure and reliable system connections.
The system includes a stainless steel vacuum flange assembly, equipped with stainless steel needle valves and a mechanical pressure gauge. This robust armored flange ensures secure thermocouple extension to the inlet, facilitating accurate temperature monitoring for your peace of mind.
Key Features:
Utilizing a high-purity alumina tube, this system ensures contamination-free growth, guaranteeing the integrity and quality of your work.
Achieve precision temperature control with a remarkable ±1°C consistency across an 800mm uniform zone, ensuring optimal conditions for your processes.
Note: All specifications are subject to technical verification. This cutting-edge equipment is specifically designed for advanced nanomaterial synthesis under precisely controlled atmospheres, ensuring exceptional results.
Robust SiC heating elements provide ultra-high temperature operation, supporting demanding synthesis needs with unmatched reliability.
The system features a complete gas/vacuum interface, equipped with advanced measurement capabilities for comprehensive monitoring and control.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specifically designed to optimize CVD processes, featuring:
An innovative double-layer shell structure complete with an efficient air-cooling system, expertly maintaining the surface temperature below 55°C
Advanced 30-segment PID programmable intelligent temperature control incorporating phase-angle firing technology for precise and controlled heating
The alumina polycrystalline fiber chamber lining ensures superior thermal insulation and flawless uniform temperature distribution
Applications:
Ideal for Silicon Carbide (SiC) coating applications
Conductivity testing of ceramic substrates with unrivaled precision
Facilitates controlled growth of ZnO nanostructures for advanced applications
Perfect for atmosphere sintering of ceramic capacitors (MLCC), ensuring high-quality outcomes
Key Advantages:
Intuitive user-friendly touchscreen interface for seamless operation
Energy-efficient thermal design reduces operational costs while maximizing performance
Research-grade temperature uniformity ensures repeatable and reliable results
Versatile and adaptable for a wide range of advanced material processing needs
Fully automated operation with the convenience of unattended capability, offering peace of mind and efficiency
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber perfect for contamination-sensitive processes, ensuring pristine results every time
Precision 3-zone temperature monitoring (±1°C)
Research-grade vacuum capability achieving impressive vacuum levels down to 10³ Pa
Comprehensive gas flow control via sophisticated triple MFC channels, offering precise management of process atmospheres
Industrial-grade components engineered for extended durability and long-term performance
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