| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace specifically crafted for groundbreaking R&D applications across enterprises, universities, and research institutes. This cutting-edge equipment supports a diverse array of processes, such as:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities for pioneering advanced material research
Precision temperature control ensuring unwavering consistency and accuracy in results
Compact design with an optimized layout, ideal for lab environments
Product Features:
1. Expertly capable of handling processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Employs a state-of-the-art industrial computer + PLC system for fully automated mastery over furnace temperature, boat movement, gas flow, and valves, offering seamless automation of the entire process.
3. Boasts a user-centric human-machine interface, facilitating effortless modification of process control parameters and real-time monitoring of diverse process statuses.
4. Provides multiple process pipelines for user-friendly selection, enhancing adaptability.
5. Furnished with robust software functionality, including self-diagnostic tools that dramatically cut down maintenance time.
6. Automatic adjustment of the constant temperature zone with cascade control ensures impeccable precision in regulating the actual process temperature within the reaction tube.
7. Integrated alarms and protective functions safeguard against over-temperature, thermocouple malfunctions, and deviations in process gas flow.
8. Customizable options available tailored to specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system is ingeniously composed of:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump with essential connecting components
The system also features directional and swivel casters at its base, ensuring a compact footprint and enhanced flexibility and mobility.
Meticulously engineered for a wide range of applications, the CVD processes,this exceptional system is perfectly suited for leading universities, cutting-edge research centers, and prominent industrial manufacturers to execute experiments and production operations involving the intricate chemical vapor deposition methods, ensuring precision and efficiency.
(Note: This document is thoughtfully structured for ease of understanding while preserving technical accuracy and maintaining a natural flow of English.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Advanced 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
State-of-the-art touchscreen control with comprehensive data recording capabilities
Dual-zone vertical design engineered for superior thermal management
Inclusive gas flow control system for complete operational command
Designed with safety as a priority, featuring multiple layers of protection
Customizable components tailored to specific research requirements
Note: Specifications can be modified to meet precise needs. This system seamlessly combines precise temperature control with robust gas delivery, ideal for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This highly efficient dual-zone sliding-track CVD tube furnace boasts an innovative rail-guided sliding design, facilitating rapid heating and cooling cycles by seamlessly moving the furnace horizontally. It can adeptly connect up to six gas sources, with unparalleled flow measurement and control achieved through a sophisticated touchscreen 6-channel mass flow controller (MFC).
This advanced high-temperature CVD system is expertly crafted for prestigious universities, innovative research institutions, and leading industrial manufacturers to pursue experiments and production related to chemical vapor deposition (CVD) technologies.
Ingenious sliding-track mechanism enables swift thermal cycling
Compatibility with multiple gases (6 independently controlled channels)
Unmatched precision in flow control with an intuitive touchscreen MFC interface
Adaptable applications suited for research and small-scale production
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
Innovative sliding mechanism enables rapid thermal cycling
Six-channel precision gas control system
Research-grade vacuum capabilities
A complete turnkey solution with all essential accessories provided
Built with industrial-grade safety protections
Tube stoppers (2)
O-ring seals
Protective gloves (1 pair)
Crucible hook (1)
PTFE tubing (3m)
Hex keys (2)
Comprehensive operation manual
This advanced system is expertly designed for Our high-temperature CVD tube furnace is meticulously designed to elevate the efficiency of CVD processes, ensuring unmatched precision and performance.This state-of-the-art equipment excels in a variety of applications, including:
The advanced application of Silicon carbide coating, which offers superior durability and resistance.
Achieving unparalleled results in conductivity testing of ceramic substrates, enhancing electrical performance.
Facilitating groundbreaking research in 2D material growth, pushing the boundaries of material science.
Perfecting the controlled growth of ZnO nanostructures, crucial for advanced electronic applications.
Innovating in atmosphere sintering of ceramic capacitors (MLCC), ensuring optimal functionality and longevity.
Furthermore, this versatile furnace also serves as a dedicated powerhouse for graphene film growth, a critical component in next-gen electronics. specifically engineered for graphene preparation. The furnace boasts a revolutionary sliding rail base design, which allows effortless manual lateral movement to seamlessly expose the tube to ambient conditions for exceptionally rapid cooling,thereby minimizing downtime and enhancing productivity.
This sophisticated equipment is particularly suitable for demanding CVD experiments that require swift heating and cooling rates,making it the quintessential choice for:
Highly efficient and scalable graphene synthesis processes.
Various other CVD applications that demand rapid thermal cycling for enhanced material properties.
Key Advantages:
Precision temperature control, critical for the delicate growth of sensitive materials. Ensures superior quality in material growth, meeting the highest standards of research and industry.
The innovative sliding mechanism, enables significantly faster processing, reducing operational time and costs.
Its versatile applications make it indispensable for cutting-edge advancements in advanced material research.
Meticulously optimized for both graphene and general CVD processes, ensuring unparalleled versatility.
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Safety Precautions:
Exercise caution: Never open the furnace chamber when the temperature is ≥200°C to effectively prevent any risk of personal injury.
Ensure that tube pressure does not exceed 0.02MPa (absolute pressure) during operation, avoiding equipment damage from potential overpressure.
Warning: Neglecting these critical precautions may lead to:
Serious personal injury and
irreparable equipment damage,
culminating in significant safety hazards.
When furnace temperature soars above 1000°C, the tube must never be under vacuum - ensuring atmospheric pressure within the tube is maintained.
Steer clear of closing both inlet and outlet valves simultaneously during sample heating. If closure of valves is absolutely necessary:
Diligently monitor pressure gauge readings,
and immediately open the exhaust valve if absolute pressure exceeds 0.02MPa,
to prevent hazardous situations such as tube rupture or flange ejection.
Equipment Application & Features
This high-temperature CVD tube furnace is expertly designed for chemical vapor deposition (CVD) processes, including:
The application of silicon carbide (SiC) coating, known for its exceptional hardness and thermal stability.
It excels in conductivity testing of ceramic substrates, pivotal for high-performance electronic components.
Perfect for controlled growth of ZnO nanostructures, essential for cutting-edge sensor technologies.
Ideal for the atmosphere sintering of ceramic capacitors (MLCC), ensuring superior electrical properties.
Primary Users:
Our state-of-the-art Advanced RJ PVD Coating Machine is the trusted choice among elite universities, pioneering research institutions, and leading industrial manufacturers. Designed specifically for vapor deposition-related experiments and production, it is the epitome of innovation and reliability.
Key Specifications:
Built to endure, the Alumina (AlO) furnace tube is engineered to withstand extreme temperatures up to a staggering 1600°C, ensuring robust performance under the most demanding conditions.
The machine's vacuum & atmosphere-capable design offers unparalleled versatility, allowing intricate and precise coating applications.
Featuring a high-performance MoSi (molybdenum disilicide) heating element, our machine guarantees exceptional durability and unrivaled efficiency in heat generation.
With ceramic fiber insulation, the furnace chamber ensures excellent thermal uniformity and unprecedented energy efficiency, making it the ideal choice for any high-precision application.
Advantages:
Our machine assures high temperature stability with precision control up to ±1°C, delivering consistent and reliable results every time.
Experience rapid heating and cooling cycles with the machine's superior heat retention, optimizing productivity and minimizing downtime.
Designed with user safety and convenience in mind, its safe, user-friendly operation empowers users with peace of mind.
This versatile powerhouse is perfect for advanced materials research, making it a vital asset in cutting-edge scientific explorations.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Capable of ultra-high temperatures up to 1700°C, the MoSi heating elements redefine performance potential.
Featuring precision multi-zone temperature control with an exceptional accuracy of ±1°C, it ensures flawless operations.
Program your processes with ease using programmable 30-segment thermal profiles, tailored to meet your needs.
Equipped with a complete gas mixing system featuring 4-channel MFCs, it brings unmatched flexibility to your operations.
Enjoy industrial-grade vacuum performance, enhancing the machine's capability to meet rigorous standards.
Safety Precautions:
For your safety, do not open the furnace chamber when the temperature is equal to or exceeds 200°C. This precaution is vital to prevent personal injury.
Ensure the tube pressure never exceeds 0.02MPa (absolute pressure) during operation to avert equipment damage caused by overpressure. This measure is crucial for maintaining equipment integrity and longevity.
Warning: Failure to adhere to these precautions may result in severe outcomes such as:
Serious personal injury
Equipment damage
Safety hazards
While operating above 1000°C, ensure the tube is not under vacuum but maintains atmospheric pressure to avert hazards. This is essential for secure and stable operations, maintaining atmospheric pressure inside the tube.
Avoid the simultaneous closure of both inlet and outlet valves during sample heating. If closure is unavoidable:
Continuously monitor the pressure gauge to ensure system integrity and user safety.
Should the absolute pressure exceed 0.02MPa, promptly open the exhaust valve to maintain safe operations.
This strategy prevents hazardous situations such as tube rupture or flange ejection, safeguarding users and equipment.
Equipment Description
This sophisticated system integrates seamlessly to deliver unparalleled performance, including:
A precise gas flow control system for optimal process management.
A liquid injection system that enhances flexibility and capability in material processing.
Multi-stage temperature-controlled growth zones to cater to complex research needs.
An efficient water cooling system that ensures reliable and consistent operation.
CNT Growth Furnace Specifications:
This cutting-edge furnace boasts a maximum operating temperature that can be continuously adjusted: The temperature range is adjustable from 0 to 1400°C, offering precise thermal management.
Ensures vertical thermal field distribution, with dual-zone temperature control for enhanced precision and versatility.
A top-mounted liquid injection port, complete with flow guide components, streamlines operations efficiently.
This CNT/thin-film CVD equipment is engineered to enable: Continuous, uninterrupted growth processes, boosting productivity and efficacy.
Achieve precise thermal management tailored for controlled nanostructure synthesis to meet exacting scientific demands.
Integrated liquid/gas phase delivery provides unmatched complexity in material deposition. The equipment's carbon nanotube (CNT) synthesis components are meticulously designed for excellence,
for complex material deposition, pushing the boundaries of innovation in advanced materials science. Ensuring a seamless synthesis process with cutting-edge technology.
Carbon nanotube (CNT) synthesis components
Technical Specifications - Carbon Nanotube/Nanowire CVD Growth Furnace
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange
The system encompasses a robust stainless steel vacuum flange assembly, meticulously equipped with stainless steel needle valves and a mechanical pressure gauge. This armored flange ingeniously allows for thermocouple extension to the inlet, ensuring precise temperature monitoring.
Key Features:
Crafted with a high-purity alumina tube, guaranteeing contamination-free growth.
Precision temperature control (±1°C) maintained across an expansive 800mm uniform zone.
Note: All specifications are subject to rigorous technical verification. This product is meticulously designed for advanced nanomaterial synthesis under precisely controlled atmospheres.
Built with robust SiC heating elements, engineered for ultra-high temperature operations.
A comprehensive gas/vacuum interface is integrated, complete with advanced measurement capabilities.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specifically engineered for CVD processes, boasting:
A double-layer shell structure enhanced with an air-cooling system, effectively maintaining the surface temperature below 55°C
Sophisticated 30-segment PID programmable intelligent temperature control utilizing phase-angle firing for impeccable precision heating
An alumina polycrystalline fiber chamber lining providing superior thermal insulation and consistent temperature distribution
Applications:
Perfect for Silicon carbide (SiC) coating
Ideal for conductivity testing of ceramic substrates
Facilitates controlled growth of ZnO nanostructures
Optimized for atmosphere sintering of ceramic capacitors (MLCC)
Key Advantages:
Enhanced with a user-friendly touchscreen interface
Designed with energy-efficient thermal architecture
Delivers research-grade temperature uniformity
Highly versatile for advanced material processing
Offers fully automated operation complete with unattended functionality
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Equipped with an ultra-clean alumina-coated chamber ideal for contamination-sensitive processes
Precision 3-zone temperature monitoring maintained at (±1°C) accuracy
Delivers research-grade vacuum capability down to 10³ Pa
Incorporates complete gas flow control with innovative triple MFC channels
Industrial-grade components ensuring prolonged durability
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