| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
TheRJ150-XKstands as a remarkabletubular diffusion/oxidation furnace,meticulously engineered for state-of-the-art R&D applications across enterprises, prestigious universities, and renowned research institutes. This dynamic equipment facilitates a plethora of essential processes, including:
Polysiliconandsilicon nitridedeposition
Diffusion
Oxidation
Annealing
Versatile processing capabilitiesdesigned for groundbreaking material research
Precision temperature controlensures consistently superior results
Compact designtailored for seamless integration into advanced laboratory environments
Product Features:
1. Expertly accommodates an extensive range of processes, including polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Utilizes a robust industrial computer + PLC system, offering fully automated management over furnace temperature, boat movement, gas flow, and valves, paving the way for complete process automation.
3. Showcases an intuitive human-machine interface, allowing effortless process control adjustments and real-time process status displays.
4. Equipped with multiple process pipelines, providing users with convenient selection options.
5. Integrates powerful software features, including self-diagnostic tools, significantly minimizing maintenance efforts.
6. Features automatic constant temperature zone adjustments and cascade control for precise regulation of actual process temperatures within the reaction tube.
7. Offers essential alarms and protective functions for scenarios like over-temperature, thermocouple breakage, short circuits, and deviations in process gas flow.
8. Customizable product solutions are available to meet unique customer specifications.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system comprises the following sophisticated components:
Astate-of-the-art 1200°C dual-zone tube furnace
A3-channel mass flow controller (MFC) gas supply system,
Ahigh-efficiency 2L/s vacuum pumpwith comprehensive connecting components
This system is equipped withdirectional and swivel castersat the base, ensuring aExperience unparalleled convenience with its compact footprint, ensuring seamless mobility across your entire facility..
Meticulously designed forthe most sophisticated CVD processes, this exceptional system is perfectly suited forleading universities, cutting-edge research centers, and forward-thinking industrial manufacturersto conduct groundbreaking experiments and high-precision production that involvesinnovative chemical vapor deposition techniques.
(Note: Structured for clarity while maintaining technical accuracy and natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Cutting-edge 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
State-of-the-art touchscreen control system with flawless data recording capabilities
Ingenious dual-zone vertical architecture ensuring impeccable thermal management
Integrated comprehensive gas flow control system
Safety-centric design fortified with a suite of advanced protection features
Customizable components tailored to meet specific research needs
Note: Specifications can be tailored to meet precise requirements. This system blends precise temperature control with an efficient gas delivery system for avant-garde CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
Thiscutting-edge dual-zone sliding-track CVD tube furnaceboasts asophisticated rail-guided sliding design, facilitating rapid thermal transitions by effortlessly sliding the furnace horizontally. It seamlessly connectsto six distinct gas sources, ensuring precision through afeature-rich touchscreen 6-channel mass flow controller (MFC).
Thisinnovative high-temperature CVD systemis masterfully crafted forprestigious universities, leading research institutions, and cutting-edge industrial manufacturersto facilitate bespoke experiments and production processes tailored toadvanced chemical vapor deposition (CVD).
Revolutionary sliding-track mechanismenabling swift thermal cycling with ease
Flexible multi-gas compatibility(featuring 6 independent channels)
Precision-driven flow controlusing an intuitive touchscreen MFC interface
Versatile utility idealfor research endeavors and small-batch production initiatives
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Comprehensive vacuum flange set (1)
Key Features:
The exclusive sliding mechanism ensures rapid and efficient thermal cycling
A sophisticated six-channel precision gas control system
Research-grade vacuum proficiency
A complete turnkey solution equipped with all essential accessories for immediate use
Industrial-grade construction reinforced with advanced safety protections
Durable tube stoppers (2)
High-quality O-ring seals
Professional-grade protective gloves (1 pair)
Sturdy crucible hook (1)
PTFE tubing (3m) - Crafted with precision, this essential component ensures reliable performance in high-temperature environments.
Hex keys (2) - These durable tools provide the perfect grip and torque for efficient assembly and maintenance.
Operation manual - A comprehensive guide, expertly detailing the procedures for optimum utilization of the equipment.
This system is explicitly designed for - Tailored for the discerning professional, offering heightened performance.CVD processes - Optimized for Chemical Vapor Deposition, delivering cutting-edge results., including:
Silicon carbide coating - Achieve superior surface properties with our advanced coating capabilities.
Conductivity testing of ceramic substrates - Conduct precise assessments with unmatched accuracy and reliability.
2D material growth - Pioneering technology for crafting groundbreaking two-dimensional materials.
Controlled growth of ZnO nanostructures - Perfect the creation of zinc oxide nanostructures for innovative applications.
Atmosphere sintering of ceramic capacitors (MLCC) - Enhance manufacturing efficiency with our state-of-the-art sintering solutions.
It also serves as a - Versatile and adaptable, it doubles as a:dedicated graphene film growth furnace - Specially engineered for the flourishing of premium graphene sheets.for graphene preparation. The furnace features a - Designed specifically for graphene, the furnace boasts a:sliding rail base design - This innovative design allows seamless operation and performance optimization., allowing manual lateral movement to expose the tube to room temperature for - Facilitates progressive, manual adjustment, ensuring:rapid cooling - Experience swift thermal transitions, enhancing efficiency and control..
This equipment is particularly suitable for - Especially crafted for applications that demand:CVD experiments requiring fast heating/cooling rates - Ideal for experiments that necessitate rapid thermal adjustments., making it ideal for:
High-efficiency graphene synthesis - Maximize output with accelerated synthesis of high-quality graphene.
Other CVD applications demanding rapid thermal cycling - Perfect for a variety of CVD tasks that require quick thermal shifts.
Key Advantages:
Precision temperature control - Experience the pinnacle of thermal management and precision.for sensitive material growth - Tailored to nurture materials that demand delicate care.
Unique sliding mechanism - Revolutionize your workflow with this exclusive feature.enables faster processing - Streamline operations, enhancing productivity and outcomes.
Versatile applications - Broad adaptability across various advanced research fields.across advanced material research - Cater to a spectrum of innovative research requirements seamlessly.
Optimized for both graphene and general CVD processes - Engineered for excellence in diverse CVD operations.
Sliding Rail Tube Furnace Specifications - Comprehensive specifications for informed decision-making.
Furnace Section - In-depth insights into the furnace's core features and capabilities.
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW | - Ensure consistent, reliable power with our tailored supply solutions.
Vacuum System - Developed for peak performance under vacuum conditions.
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System - Precise control for optimized process outcomes.
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes - Essential information for safe and effective equipment use.
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification | - Assured quality and safety standards with globally recognized certifications.
Safety Precautions:
Do not open the furnace chamber when temperature ≥200°C - Protect yourself by adhering to recommended safety measures.to prevent personal injury.
Tube pressure must never exceed 0.02MPa (absolute pressure) - Maintain operational integrity by preventing overpressure.during operation to avoid equipment damage from overpressure.
Warning:Failure to follow these precautions may result in:
Serious personal injury - Stay safe with strict adherence to guidelines.
Equipment damage - Preserve equipment longevity through mindful operation.
Safety hazards - Prioritize safety to prevent hazardous conditions.
When furnace temperature >1000°C, the tube must not be under vacuum - Ensure atmospheric pressure for safe high-temperature operation.- maintain atmospheric pressure inside the tube.
Avoid closing both inlet and outlet valves simultaneously during sample heating. - Prevent potentially dangerous pressure build-ups.If valves must be closed:
Continuously monitor pressure gauge readings - Stay vigilant to ensure safe operating conditions.
Immediately open exhaust valve if absolute pressure exceeds 0.02MPa - Act swiftly to mitigate overpressure risks.
Prevents hazardous situations (tube rupture, flange ejection, etc.) - Safeguard against severe consequences with proactive measures.
Equipment Application & Features
This high-temperature CVD tube furnace is designed for chemical vapor deposition (CVD) processes, including: - A pioneer in CVD technology, catering to:
Silicon carbide (SiC) coating - Deliver unparalleled coating quality through advanced processes.
Conductivity testing of ceramic substrates - Attain precise conductivity measurements with confidence.
Master the art of nanostructure formation with our Controlled growth of ZnO nanostructures, a process designed to deliver precision and exceptional quality in every application.
Revolutionize your ceramic capacitor production with our advanced Atmosphere sintering process for MLCC, tailored to enhance efficiency and performance.
Primary Users:
Our esteemed clientele encompasses renowned universities, foremost research institutions, and premier industrial manufacturers. These clients are at the forefront of advanced vapor deposition experiments and production processes, consistently innovating and expanding the realms of development.
Key Specifications:
Engineered with precision, our Alumina (AlO) furnace tube endures extreme conditions, withstanding formidable temperatures up to 1600°C, promising unmatched resilience and durability.
Designed for ultimate adaptability, our system features a vacuum & atmosphere-capable configuration that meets diverse operational demands with exceptional versatility.
Harnessing the power of advanced MoSi (molybdenum disilicide), our heating element delivers superior performance and reliability, setting the benchmark for excellence.
Encased in high-quality ceramic fiber insulation, our furnace chamber ensures outstanding thermal uniformity and energy efficiency, optimizing your operational performance.
Advantages:
Experience unmatched precision with our system, where high temperature stability is maintained with an impressive accuracy of ±1°C, guaranteeing consistent and dependable results.
Streamline your process cycles and boost productivity with our system's rapid heating and cooling phases, supported by exceptional heat retention capabilities.
Designed with safety and user experience in mind, our system offers an intuitive user interface that ensures safe operation, reducing risks and maximizing satisfaction.
Our equipment is a versatile powerhouse, ideally suited for advanced materials research and pioneering the boundaries of scientific exploration.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Achieve unparalleled thermal performance with our system, reaching ultra-high temperatures of 1700°C, enhanced by MoSi heating elements that set a new standard in the industry.
Leverage precision multi-zone temperature control with a remarkable accuracy of ±1°C, enabling intricate thermal management and process optimization.
Customize your processes with our 30-segment programmable thermal profiles, offering flexibility and precise control for superior outcomes.
Optimize process conditions with our complete gas mixing system, featuring 4-channel MFCs for precise and efficient gas delivery.
Our system guarantees industrial-grade vacuum performance, ensuring peak efficiency and reliability even under the most challenging conditions.
Safety Precautions:
To ensure operator safety and prevent hazards, it is crucial to avoid opening the furnace chamber when the temperature is ≥200°C. Adherence to this precaution is essential.to avert personal injury and ensure a safe working environment.
Carefully monitor tube pressure to prevent it from surpassing 0.02MPa (absolute pressure), thereby avoiding equipment damage due to overpressure.during operation, ensuring protection against equipment damage from overpressure.
Warning:Non-compliance with these safety precautions may result in:
severe personal injury,
damage to equipment,
or safety risks, highlighting the critical importance of adhering to operational guidelines strictly.
When the furnace temperature exceeds 1000°C, it is essential to maintain atmospheric pressure inside the tube, as vacuum conditions are forbidden to protect the equipment's structural integrity.- ensure atmospheric pressure is maintained inside the tube.
Avoid simultaneous closure of both inlet and outlet valves during sample heating to prevent adverse conditions compromising safety.If valve closure is necessary:
Diligently monitor pressure gauge readings to maintain vigilance and ensure operational safety.
Immediately engage the exhaust valve when absolute pressure exceeds 0.02MPa, acting as an essential precaution to avert critical incidents, such as tube rupture or flange detachment.
Prevention of hazardous scenarios, including potential tube ruptures and flange ejections, ensures safety and reliability.
Equipment Overview
This sophisticated system encompasses an array of advanced technologies:
a state-of-the-art gas flow management system,
a durable and efficient liquid injection mechanism,
multi-stage, temperature-regulated growth zones tailored for precision applications,
and a dependable water cooling system, enhancing operational consistency and performance.
CNT Growth Furnace Technical Specifications:
Engineered to achieve a peak operating temperature of 1400°C, this furnace allows comprehensive parameter adjustment from 0 to 1400°C, catering to diverse application requirements.1400°C, with seamless adjustment capabilities from 0 to 1400°C.
Featuring a vertically distributed thermal field,complemented bya dual-zone temperature control system for refined thermal regulation,
the strategically positioned top liquid injection portintegrated with flow guide components, optimizing material deposition processes.
This state-of-the-artCNT/thin-film CVD equipmentfacilitates:
uninterrupted, continuous growth processes,
accurate thermal controlfor precise nanostructure synthesis,
and seamless integration of liquid/gas phase deliveryfor complex material deposition, setting a new standard in the material science industry.
Presenting the pinnacle of precision and innovation: Carbon Nanotube (CNT) Synthesis Components. Designed to enhance your research and development endeavors.
Technical Specifications - Embark on a journey of unmatched precision with our Carbon Nanotube/Nanowire CVD Growth Furnace, your access to pioneering advancements.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Crafted with precision: Stainless Steel Flange for enduring performance and resilience in all applications.
Transform your setup with our complete system featuring the sturdy stainless steel vacuum flange assembly, premium stainless steel needle valves, and a mechanical pressure gauge. The armored flange allows seamless thermocouple extensions to the inlet, ensuring precise temperature monitoring for superior results.
Unique Features that distinguish us:
Achieve unmatched purity with our High-purity alumina tube, crafted for contamination-free growth processes.
Exemplary precision: Experience temperature regulation within ±1°C over a broad 800mm uniform zone, guaranteeing consistent outcomes every time.
Note: Specifications are subject to technical validation. This furnace is optimized for advanced nanomaterial synthesis under precisely controlled conditions.
Enhance your operations with Durable SiC heating elements, engineered for ultra-high temperature capacities.
Benefit from our Comprehensive gas/vacuum interface, offering extensive measurement capabilities for strategic process management.
A Preview of Our Equipment:
The embodiment of technological innovation:LCD Touchscreen CVD High-Temperature Furnacerepresents atube furnacecarefully engineered forCVD processesand equipped with features such as:
Double-layer shell structureenhanced by anA highly efficient air-cooling system ensures optimal performance by effectively managing heat dissipation.This cutting-edge system excels at maintaining surface temperatures firmly belowa precise 55°C, ensuring safe and reliable operation.
Experience the future of temperature management with a sophisticated 30-segment PID programmable intelligent temperature control system,seamlessly integrated withstate-of-the-art phase-angle firing technology,delivering precise and reliable heating solutions tailored to your needs.
The chamber is lined with advanced alumina polycrystalline fiber,ensuringexceptional thermal insulationandconsistent, uniform temperature distribution throughout.
Applications that redefine possibilities with cutting-edge functionalities:
Explore advanced Silicon carbide (SiC) coating techniques that set new standards in material science.
Engage in specialized conductivity testing tailored specifically for ceramic substrates,
and innovate with controlled growth of ZnO nanostructures.
Optimize atmosphere sintering processes for ceramic capacitors (MLCC) for superior results.
Key Advantages that empower your operations with unmatched precision:
Benefit from an intuitive and user-friendly touchscreen interface that simplifies complex processes.
Experience cutting-edge energy-efficient thermal design that reduces operational costs.
Achieve unmatched research-grade temperature uniformity for reliable outcomes every time.
Versatility that supports pioneering advanced material processing like never before.
Fully automated operationofferingunmatched unattended capability, allowing for seamless productivity.
High-Temperature Furnace Specifications that impress with their precision and reliability:
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features that define excellence and set a new benchmark:
An ultra-clean alumina-coated chamber, indispensable for processes sensitive to contamination,providing an ideal environment for critical applications.
Benefit from precision 3-zone temperature monitoring,maintained within an impeccable (±1°C) accuracy for exceptional results.
Harness top-tier research-grade vacuum capability,achieving pressures as low as 10³ Pa for unparalleled performance.
Comprehensive gas flow control systemfacilitated by triple MFC channels for precise regulation of processes.
Industrial-grade componentsboasting extended durability and reliability for all your operational needs.
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