| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace crafted with precision for R&D applications, meeting the sophisticated needs of enterprises, universities, and research institutes. This versatile equipment facilitates a multitude of processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities for cutting-edge material research
Precision temperature control ensuring impeccable consistency
Compact design ideal for laboratory settings
Product Features:
1. Engineered to handle processes like polysilicon, silicon nitride, diffusion, oxidation, annealing, among others, with proficiency.
2. Integrates a robust industrial computer with a PLC system, ensuring full automation of furnace temperature, boat movement, gas flow, and valves for seamless operation.
3. Boasts an intuitive human-machine interface for effortless adjustment of process parameters and live display of process statuses.
4. Provides multiple selectable process pipelines for user convenience.
5. Empowered by powerful software features, including self-diagnostics to dramatically cut down maintenance time.
6. Automatic constant temperature zone adjustment and cascade control offer precise regulation of process temperature within the reaction tube.
7. Equipped with alarms and safety features for over-temperature, thermocouple breakage, short circuits, and gas flow deviations, ensuring user safety and process integrity.
8. Tailorable products available to meet specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system is adeptly structured with:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump and associated connecting components
This system features directional and swivel casters at the base, ensuring a compact footprint and exceptional mobility.
Purposely engineered for CVD processes, this system is ideal for esteemed universities, pioneering research centers, and leading industrial manufacturers conducting groundbreaking experiments and production involving cutting-edge chemical vapor deposition.
(Note: Carefully structured for clarity, preserving both technical accuracy and the natural flow of English.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Innovative 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Sophisticated touchscreen control with comprehensive data recording
Dual-zone vertical design ensuring optimal thermal management
Integrated gas flow control system for precision
Design prioritized for safety with multiple protective features
Components customizable for specific research requirements
Note: Specifications can be tailored based on precise needs. This system merges precision temperature control with efficient gas delivery for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This innovative dual-zone sliding-track CVD tube furnace boasts a cutting-edge rail-guided sliding design, enabling rapid heating and cooling of materials by horizontally moving the furnace. It supports simultaneous connection to six independent gas sourceswith precise flow measurement and control through a state-of-the-art touchscreen 6-channel mass flow controller (MFC).
This high-performance high-temperature CVD system is meticulously designed for renowned universities, prestigious research institutions, and forward-thinking industrial manufacturers to facilitate experiments and production related to the advanced field of chemical vapor deposition (CVD).
Innovative sliding-track mechanism ensures fast and efficient thermal cycling
Compatible with multiple gases (featuring 6 independent channels)
Precision flow control technology enhanced with a modern touchscreen MFC interface
Versatile applications in both research and small-batch production scenarios
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
High-quality Quartz furnace tube (1)
Complete Vacuum flange set (1)
Key Features:
Unique sliding mechanism for rapid thermal cycling
Six-channel precision gas control system
Research-grade vacuum capability
Comprehensive turnkey solution with all essential accessories
Industrial-grade construction with safety-first protections
Tube stoppers (2)
Durable O-ring seals
Protective gloves (1 pair)
Crucible hook (1)
PTFE tubing (3m)
Hex keys (2)
Comprehensive operation manual
This system is engineered for CVD processes are at the forefront of advanced material manufacturing, offering unparalleled precision and efficiency in deposition techniques., including a diverse array of applications that cater to the ever-evolving needs of the industry:
Revolutionary Silicon carbide coating, enhancing material durability and performance in challenging environments.
State-of-the-art Conductivity testing of ceramic substrates, ensuring top-tier performance and reliability.
Innovative 2D material growth, paving the way for cutting-edge advancements in nano-technology.
Controlled growth of ZnO nanostructures, offering remarkable precision and repeatability for high-tech applications.
Precision Atmosphere sintering of ceramic capacitors (MLCC) to boost efficiency and performance.
It also serves as a reliable and versatile dedicated graphene film growth furnace, tailored for the production of premium-quality graphene. for graphene preparation. The furnace features a game-changing sliding rail base design, allowing manual lateral movement to expose the tube to room temperature for unmatched rapid cooling,ensuring efficient and effective temperature management.
This equipment is particularly suitable for specialized CVD experiments requiring fast heating/cooling rates, providing unmatched performance and versatility for researchers and industry professionals alike,, making it ideal for:
High-efficiency graphene synthesis, setting a new standard in the field.
Other CVD applications demanding rapid thermal cycling, ensuring consistent quality and output.
Key Advantages of Our Cutting-Edge Technology:
Precision temperature control, critical for the seamless and sensitive growth of advanced materials. for sensitive material growth, maintaining the integrity and quality of your projects.
Unique sliding mechanism enables faster processing and enhanced operational efficiency.
Versatile applications across advanced material research, offering flexibility and adaptability for diverse projects.
Optimized for both graphene and general CVD processes, providing comprehensive support for your production needs.
Sliding Rail Tube Furnace Specifications, designed for excellence and precision:
Furnace Section,
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply,
| Input Power | Single-phase 220V, 50Hz, 3KW | Ensuring reliable and stable operation with industry-standard power requirements.
Vacuum System, meticulously engineered for optimal performance in controlled environments.
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System, providing precise regulation and management of gas flow for superior process outcomes.
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes, ensuring safe and efficient operation:
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications,
| ISO Certification | CE Certification | Backed by industry-recognized certifications for quality and safety assurance.
Safety Precautions, crucial for maintaining operational integrity:
Do not open the furnace chamber when temperature ≥200°C to prevent personal injury. to prevent personal injury and ensure safe handling.
Tube pressure must never exceed 0.02MPa (absolute pressure) during operation to avoid equipment damage from overpressure. during operation to avoid equipment damage from overpressure, safeguarding your investments.
Warning: Adherence to safety protocols is critical. Failure to follow these precautions may result in significant risks, including:
Serious personal injury, underscoring the importance of operational awareness and caution.
Equipment damage, potentially leading to costly repairs or replacements.
Safety hazards, emphasizing the need for strict compliance with safety guidelines.
When furnace temperature >1000°C, the tube must not be under vacuum - maintain atmospheric pressure inside the tube. - maintain atmospheric pressure inside the tube to prevent structural compromise.
Avoid closing both inlet and outlet valves simultaneously during sample heating to ensure smooth and safe operation. If valves must be closed:
Continuously monitor pressure gauge readings to ensure safe and controlled operational conditions.
Immediately open exhaust valve if absolute pressure exceeds 0.02MPa to avert potential hazards and maintain system integrity.
Prevents hazardous situations (tube rupture, flange ejection, etc.), protecting both personnel and equipment.
Equipment Application & Features, showcasing its comprehensive capabilities:
This high-temperature CVD tube furnace is designed for chemical vapor deposition (CVD) processes, including:
Innovative Silicon carbide (SiC) coating, setting new benchmarks in durability and efficiency.
Advanced Conductivity testing of ceramic substrates, ensuring optimal material performance.
Controlled growth of ZnO nanostructures, offering precision and reliability for cutting-edge applications.
Atmosphere sintering of ceramic capacitors (MLCC), enhancing functionality and efficiency.
Primary Users: Researchers, engineers, and industry professionals looking to achieve excellence in CVD processes.
Universities, esteemed research institutions, and leading industrial manufacturers rely on this equipment for precise vapor deposition-related experiments and high-efficiency production.
Key Specifications:
The Alumina (AlO) furnace tube can withstand intense temperatures soaring up to 1600°C.
Ingeniously designed to operate under vacuum and atmospheric conditions.
Heating element: Equipped with a high-performance MoSi (molybdenum disilicide) for optimal thermal efficiency.
Furnace chamber: Features ceramic fiber insulation ensuring superb thermal uniformity and remarkable energy efficiency.
Advantages:
High temperature stability offering precision within ±1°C, setting the standard for accuracy.
Experience rapid heating and cooling with exceptional heat retention capabilities.
Designed for safe and user-friendly operation, providing peace of mind.
Versatile design ideal for advanced materials research and development.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Ultra-high temperature capacity reaching an impressive 1700°C, powered by MoSi heating elements.
Precision multi-zone temperature control with a remarkable accuracy of ±1°C.
Program thermal processes effortlessly with programmable 30-segment thermal profiles.
State-of-the-art complete gas mixing system incorporating 4-channel MFCs.
Industrial-grade vacuum performance that meets rigorous standards.
Safety Precautions:
Do not open the furnace chamber when the temperature is equal to or exceeds 200°C to prevent any risk of personal injury.
Tube pressure must strictly never surpass 0.02MPa (absolute pressure) during operation to avert potential equipment damage from overpressure.
Warning: Non-compliance with these precautions may lead to:
Serious personal injury that must be avoided at all cost.
Severe equipment damage resulting in costly repairs.
Considerable safety hazards that could endanger users.
When furnace temperature surpasses 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube for safety.
Avoid the simultaneous closure of both inlet and outlet valves during sample heating. If valves must be closed:
Consistently monitor pressure gauge readings for anomalies.
Instantly open the exhaust valve if the absolute pressure surpasses 0.02MPa.
This measure prevents hazardous situations like tube rupture or flange ejection.
Equipment Description
This system seamlessly integrates:
A sophisticated gas flow control system.
An innovative liquid injection system for enhanced versatility.
Multi-stage, temperature-controlled growth zones for precision.
A reliable water cooling system to maintain optimal operation.
CNT Growth Furnace Specifications:
Maximum operating temperature: 1400°C, adjustable continuously from 0-1400°C for diverse applications.
Vertical thermal field distribution with dual-zone temperature control ensuring precision.
Top-mounted liquid injection port with meticulously designed flow guide components.
This CNT/thin-film CVD equipment enables:
Continuous, uninterrupted growth processes for efficiency.
Precise thermal management for expertly controlled nanostructure synthesis.
Integrated liquid/gas phase delivery for complex material deposition with precision.
Carbon nanotube (CNT) synthesis components
Technical Specifications - Carbon Nanotube/Nanowire CVD Growth Furnace
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange
This cutting-edge system boasts a stainless steel vacuum flange assembly, ingeniously equipped with precision-engineered stainless steel needle valves and a mechanical pressure gauge for reliable and accurate monitoring. The armored flange design facilitates thermocouple extension to the inlet, ensuring precise temperature tracking throughout the process.
Key Features:
High-purity alumina tube for contamination-free growth, ensuring pristine conditions for your synthesis.
Precision temperature control (±1°C) across 800mm uniform zone, delivering unparalleled stability and consistency.
Note: All specifications are subject to rigorous technical verification. This apparatus is ingeniously designed for the advanced synthesis of nanomaterials under meticulously controlled atmospheres.
Robust SiC heating elements provide ultra-high temperature operation, offering exceptional durability and efficiency.
Complete gas/vacuum interface with comprehensive measurement capabilities, ensuring optimal performance.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specially designed for CVD processes, featuring:
Double-layer shell structure with an air-cooling system, keeping the surface temperature comfortably below 55°C
30-segment PID programmable intelligent temperature control with phase-angle firing for precise and responsive heating control
Alumina polycrystalline fiber chamber lining for excellent thermal insulation and uniform temperature distribution
Applications:
Silicon carbide (SiC) coating for enhanced durability and performance
Conductivity testing of ceramic substrates, ensuring reliable results
Controlled growth of ZnO nanostructures, ideal for cutting-edge research
Atmosphere sintering of ceramic capacitors (MLCC), delivering performance and precision
Key Advantages:
User-friendly touchscreen interface for ease of operation and control
Energy-efficient thermal design, optimizing both performance and cost-effectiveness
Research-grade temperature uniformity, ensuring consistent and accurate results
Versatile for advanced material processing, catering to a myriad of applications
Fully automated operation with unattended capability, delivering convenience and reliability
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber, tailored for contamination-sensitive processes for contamination-sensitive processes
Precision 3-zone temperature monitoring (±1°C) ensuring fine-tuned control and stability.
Research-grade vacuum capability, reaching depths down to 10³ Pa down to 10³ Pa
Complete gas flow control with triple MFC channels, offering comprehensive versatility with triple MFC channels
Industrial-grade components with extended durability, engineered for long-lasting performance.
){kind=link}