| Customization: | Available |
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| Application Field: | Aerospace, Automotive, Electronics, Marine, Medical Devices, Oil & Gas, Power Generation, Railways |
| Coating Material: | Metal |
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Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.
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product name |
Desktop single target magnetron coater with reciprocating sample table |
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Product number |
RJ-MSZ180-50F-DC-Q |
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Reciprocating sample table |
size |
50*100mm |
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Reciprocating speed |
0~50mm/s |
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Magnetron target gun |
Target plane |
Circular flat target |
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Sputtering vacuum |
10Pa~0.2Pa |
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Target diameter |
2 inches |
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Target thickness |
Recommended 2 ~ 5mm |
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Target temperature |
<=65ºC |
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Vacuum chamber |
Cavity size |
About Φ180mm × H 215mm |
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Cavity material |
High purity quartz |
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Observation window |
Omnidirectional transparency |
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Opening method |
Removable top cover |
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power supply |
DC power supply |
150W max |
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Quantity |
1 |
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Molecular pump system |
Foreline pump
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Rotary vane pump |
VRD-4 |
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Pumping speed |
1.1L/S |
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Ultimate vacuum |
5*10-1Pa |
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Molecular pump |
Molecular pumping speed |
600L/S |
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Rated speed |
24000rpm |
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Ultimate vacuum |
5*10-5Pa |
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Vibration value |
<=0.1um |
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Start Time |
<=4.5min |
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Downtime |
<7min |
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cooling method |
Water cooling + air cooling |
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Water cooler |
Cooling water temperature |
<=37ºC |
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Cooling water flow rate |
10L/min |
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Supply voltage |
AC220V 50Hz |
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Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
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