Customization: | Available |
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Application Field: | Aerospace, Automotive, Electronics, Marine, Medical Devices, Oil & Gas, Power Generation, Railways |
Coating Material: | Metal |
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Single target DC magnetron sputtering coating instrument | ||
Sample stage | Dimensions | φ185mm |
Heating range | Room temperature~500ºC | |
Adjustable speed | 1-20rpm adjustable | |
magnetic control target gun | Target plane | Circular plane target |
Sputtering vacuum | 10Pa~0.2Pa | |
Target diameter | 50~50.8mm | |
Target thickness | 2~5mm | |
Insulation voltage | >2000V | |
Cable specifications | SL-16 | |
Target head temperature | <=65ºC | |
real null Cavity body | Inner wall treatment | Electrolytic polishing |
Cavity size | φ300mm × 300mm | |
Cavity material | 304 stainless steel | |
Observation window | Quartz window, diameter φ100mm | |
Open method | Top opening, cylinder auxiliary support | |
gas body control system | Flow control | Mass flow meter, range 0~200SCCM argon gas |
Control valve type | Solenoid valve | |
Control valve static state | Normally closed | |
Measuring linearity | ±1.5%F.S | |
Measurement repeatability | ±0.2%F.S | |
Measuring response time | ≤8 second(T95) | |
Working pressure range | 0.3MPa | |
Valve body pressure | 3MPa | |
Working temperature | (5~45)ºC | |
Body material | Stainless steel 316L | |
Valve body leakage rate | 1×10-8Pa.m3/s | |
Pipe joints | 1/4″Compression fitting | |
Input and output signal | 0~5V | |
Power supply | ±15V(±5%)(+15V 50mA, -15V 200mA) | |
Overall dimensions mm | 130 (width) × 102 (height) × 28 (thickness) | |
Communication Interface | RS485 MODBUS protocol | |
DC power supply | Power | 500W |
Output voltage | 0~600V | |
Timing length | 65000 second | |
Start Time | 1~10 second | |
Film thickness measurement | Power requirements | DC:5V(±10%) Maximum current 400mA |
Resolution | ±0.03Hz(5-6MHz),0.0136Å / Measurement (aluminum) | |
Measurement accuracy | ±0.5% thickness + 1 count | |
Measurement period | 100mS~1S/time (can be set) | |
Measuring range | 500,000 Å (aluminum) | |
Crystal frequency | 6MHz | |
Communication Interface | RS-232/485 serial interface | |
Display digits | 8-digit LED display | |
Molecular pump | Molecular pump pumping speed | 80L/S |
Rated speed | 65000rpm | |
Vibration value | <=0.1um | |
Start Time | <=4.5min | |
Downtime | <7min | |
Cooling method | Air-cooled | |
Cooling water temperature | <=37ºC | |
Cooling water flow rate | 1L/min | |
Installation direction | Vertical ±5° | |
Suction port | 150CF | |
Exhaust connection | KF40 | |
Fore pump | Pumping rate | 1.1L/S(VRD-4) |
Ultimate vacuum | 5×10-2Pa | |
Power supply | AC:220V/50Hz | |
Power | 400W | |
Noise | <=56db | |
Suction port | KF40 | |
Exhaust connection | KF25 | |
Release valve | Pneumatic and electronically controlled air release valve is installed on the vacuum chamber | |
The ultimate vacuum of the whole machine | <=5×10-4Pa | |
Vacuum chamber boost rate | <=2.5Pa/h | |
Software system | 1 set of monitoring and management software | |
Test target | 2 copper targets with a diameter of 2 inches and a thickness of 3 mm |