Lab Single Target DC Magnetron Sputtering Coating Machine

Product Details
Customization: Available
Application Field: Aerospace, Automotive, Electronics, Marine, Medical Devices, Oil & Gas, Power Generation, Railways
Coating Material: Metal
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  • Lab Single Target DC Magnetron Sputtering Coating Machine
  • Lab Single Target DC Magnetron Sputtering Coating Machine
  • Lab Single Target DC Magnetron Sputtering Coating Machine
  • Lab Single Target DC Magnetron Sputtering Coating Machine
  • Lab Single Target DC Magnetron Sputtering Coating Machine
  • Lab Single Target DC Magnetron Sputtering Coating Machine
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Basic Info.

Model NO.
Made-to-order
Power Source
Electric
Transport Package
Wooden Case
Specification
Customized
Trademark
RJ

Product Description

Lab Single Target DC Magnetron Sputtering Coating MachineSingle target DC magnetron sputtering coater equipment is a cost-effective magnetron sputtering coating equipment independently researched and developed by our company. It has the characteristics of standardization, modularization and customization. Magnetron targets can be selected from 1 inch, 2 inches and 3 inches, and customers can choose according to the size of the plated substrate; The power supply is a 1500W high-power DC power supply, which can be used for high-energy metal sputtering coating. According to experimental requirements, DC or RF power supplies of other specifications can also be selected to achieve coating operations of various materials.
Lab Single Target DC Magnetron Sputtering Coating Machine
The coating instrument has two high-precision mass flow meters, and customers can customize the gas path of up to four mass flow meters if they have other requirements to meet the requirements of complex gas environment construction; The instrument is equipped with an advanced turbomolecular pump set as standard, and the ultimate vacuum can reach 1.0E-5Pa. At the same time, other types of molecular pumps are available for purchase. The molecular pump's gas path is controlled by multiple solenoid valves, which can open the cavity to take out samples without turning off the pump, which greatly improves your work efficiency. This product can be equipped with an integrated industrial control computer to control the system. The computer program can realize most functions such as the control of the vacuum pump group and the control of the sputtering power supply, which can further improve the efficiency of your experiment.
 

Application scope of single target magnetron sputtering coater:

 
Single target DC magnetron sputtering coater can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material thin films, and is especially suitable for laboratory research on solid electrolytes and OLED etc.

Technical parameters of single target magnetron sputtering coater:

Single target DC magnetron sputtering   coating instrument
Sample stage Dimensions φ185mm
Heating range Room temperature~500ºC
Adjustable speed 1-20rpm adjustable
magnetic control target gun Target plane Circular plane target
Sputtering vacuum 10Pa~0.2Pa
Target diameter 50~50.8mm
Target thickness 2~5mm
Insulation voltage >2000V
Cable specifications SL-16
Target head temperature <=65ºC
real null Cavity body Inner wall treatment Electrolytic polishing
Cavity size φ300mm × 300mm
Cavity material 304 stainless steel
Observation window Quartz window, diameter φ100mm
Open method Top opening, cylinder auxiliary support
gas body control system Flow control Mass flow meter, range 0~200SCCM argon gas
Control valve type Solenoid valve
Control valve static state Normally closed
Measuring linearity ±1.5%F.S
Measurement repeatability ±0.2%F.S
Measuring response time 8 second(T95)
Working pressure range 0.3MPa
Valve body pressure 3MPa
Working temperature (5~45)ºC
Body material Stainless steel 316L
Valve body leakage rate 1×10-8Pa.m3/s
Pipe joints 1/4Compression fitting
Input and output signal 0~5V
Power supply ±15V5%)(+15V  50mA,  -15V  200mA)
Overall dimensions mm 130 (width) × 102 (height) × 28 (thickness)
Communication Interface RS485 MODBUS protocol
DC power supply Power 500W
Output voltage 0~600V
Timing length 65000 second
Start Time 1~10 second
Film thickness measurement Power requirements DC:5V10%)  Maximum current 400mA
Resolution ±0.03Hz(5-6MHz),0.0136Å / Measurement (aluminum)
Measurement accuracy ±0.5% thickness + 1 count
Measurement period 100mS~1S/time (can be set)
Measuring range 500,000 Å (aluminum)
Crystal frequency 6MHz
Communication Interface   RS-232/485 serial interface
Display digits 8-digit LED display
Molecular pump Molecular pump pumping speed 80L/S
Rated speed 65000rpm
Vibration value <=0.1um
Start Time <=4.5min
Downtime <7min
Cooling method Air-cooled
  Cooling water temperature <=37ºC
Cooling water flow rate 1L/min
Installation direction Vertical ±5°
Suction port 150CF
Exhaust connection KF40
Fore pump Pumping rate 1.1L/S(VRD-4)
Ultimate vacuum 5×10-2Pa
Power supply AC:220V/50Hz
Power 400W
Noise <=56db
Suction port KF40
Exhaust connection KF25
Release valve Pneumatic and electronically   controlled air release valve is installed on the vacuum chamber
The ultimate vacuum of the whole machine <=5×10-4Pa
Vacuum chamber boost rate <=2.5Pa/h
Software system 1 set of monitoring and   management software
Test target 2 copper targets with a   diameter of 2 inches and a thickness of 3 mm
Lab Single Target DC Magnetron Sputtering Coating MachineLab Single Target DC Magnetron Sputtering Coating MachineLab Single Target DC Magnetron Sputtering Coating Machine

 

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