Lab Advanced Multi-Source High Vacuum Coating Machine

Product Details
Customization: Available
Application Field: Aerospace, Automotive, Electronics, Marine, Medical Devices, Power Generation, Railways
Coating Material: Metal
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  • Lab Advanced Multi-Source High Vacuum Coating Machine
  • Lab Advanced Multi-Source High Vacuum Coating Machine
  • Lab Advanced Multi-Source High Vacuum Coating Machine
  • Lab Advanced Multi-Source High Vacuum Coating Machine
  • Lab Advanced Multi-Source High Vacuum Coating Machine
  • Lab Advanced Multi-Source High Vacuum Coating Machine
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Basic Info.

Model NO.
Made-to-order
Power Source
Electric
Evaporation Source
6 × Tungsten Boats
Vacuum Chamber
Ø500 × 500mm
Transport Package
Wooden Case
Specification
Customized
Trademark
RJ
Origin
Zhengzhou, China

Product Description

Multi-Source High Vacuum Evaporation Coating System
This equipment is a multi-source high vacuum evaporation coating system. It features a front-opening vacuum chamber with a spacious and highly expandable design, suitable for coating large or varied samples. The chamber is equipped with an upper-mounted sample stage, which can accommodate different sample fixtures or clamping methods. The stage supports rotation, heating, and vertical adjustment (120mm range), all controlled via an integrated touchscreen interface.
The two-stage vacuum pumping system consists of a dual-stage rotary vane pump and a turbo molecular pump, ensuring an oil-free, high-vacuum environment for deposition. The system includes a pneumatic valve control for one-touch operations (e.g., pumping, sample exchange without shutdown, or full system halt) via the touchscreen.
 
Technical Specifications
Category Parameter Details Additional Info
Sample Stage Size Max. Ø150mm Height adjustable (±120mm)
Evaporation Sources Quantity 6 × Tungsten Boats Water-cooled copper electrodes
Vacuum Chamber Dimensions Ø500 × 500mm Front-mounted Ø100mm viewport (with shutter)
  Material 304 Stainless Steel Front-opening design
Thickness Monitor Type Quartz Crystal Monitor (optional multi-channel)  
Vacuum System Primary Pump Dual-stage Rotary Vane Pump KF16 flange
  Secondary Pump Turbo Molecular Pump CF160 flange
  Vacuum Measurement Resistive + Ionization Gauge Base pressure: 5E-5 Pa
  Pumping Speed Rotary Pump: 1.1 L/s; Turbo Pump: 600 L/s  
Gas Flow Control Mass Flow Controller 500 sccm (Argon)  
Control System Automation PLC-based Touchscreen + manual control panel
Power Supply Voltage AC 220V/380V, 50/60Hz Dimensions: 1000×800×1500mm
  Total Power 5 kW Weight: 350 kg
 
Key Features
  • Evaporation Sources: Two sets of tungsten boats (water-cooled electrodes) support currents up to 300A and temperatures exceeding 2000°C, enabling deposition of refractory metals.
  • Safety DesignSeparated chamber and electrical compartments (left-right layout) ensure water-electricity isolation for user safety.
  • User-Friendly Controls:
    • Touchscreen: Manages vacuum, sample stage, and auxiliary functions.
    • Dedicated Panel: For evaporation power and thickness monitoring, minimizing operational errors.
  • High Precision: Ideal for laboratory-scale thin-film deposition with uniform thickness control.
This system combines robust performancemodular flexibility, and intuitive operation, making it an essential tool for advanced physical vapor deposition (PVD) applications.
Lab Advanced Multi-Source High Vacuum Coating MachineLab Advanced Multi-Source High Vacuum Coating MachineLab Advanced Multi-Source High Vacuum Coating Machine

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