Customization: | Available |
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Application Field: | Aerospace, Automotive, Electronics, Marine, Medical Devices, Power Generation, Railways |
Coating Material: | Metal |
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Category | Parameter | Details | Additional Info |
Sample Stage | Size | Max. Ø150mm | Height adjustable (±120mm) |
Evaporation Sources | Quantity | 6 × Tungsten Boats | Water-cooled copper electrodes |
Vacuum Chamber | Dimensions | Ø500 × 500mm | Front-mounted Ø100mm viewport (with shutter) |
Material | 304 Stainless Steel | Front-opening design | |
Thickness Monitor | Type | Quartz Crystal Monitor (optional multi-channel) | |
Vacuum System | Primary Pump | Dual-stage Rotary Vane Pump | KF16 flange |
Secondary Pump | Turbo Molecular Pump | CF160 flange | |
Vacuum Measurement | Resistive + Ionization Gauge | Base pressure: 5E-5 Pa | |
Pumping Speed | Rotary Pump: 1.1 L/s; Turbo Pump: 600 L/s | ||
Gas Flow Control | Mass Flow Controller | 500 sccm (Argon) | |
Control System | Automation | PLC-based | Touchscreen + manual control panel |
Power Supply | Voltage | AC 220V/380V, 50/60Hz | Dimensions: 1000×800×1500mm |
Total Power | 5 kW | Weight: 350 kg |