| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Equipment Introduction
The RJ150-XK is an advanced tubular diffusion/oxidation furnace, meticulously engineered for cutting-edge R&D applications across enterprises, universities, and research institutes. It facilitates a myriad of processes, including but not limited to:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities ideal for in-depth material research and innovation
Precision temperature control system ensuring consistent and reliable results
Compact design perfectly optimized for modern lab environments
Product Features:
1. Expertly supports an array of processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Incorporates a robust industrial computer coupled with a PLC system for seamless automation of furnace temperature, boat movement, gas flow, and valves, achieving full automation of the complete process.
3. Boasts an intuitive human-machine interface for effortless modification of process control parameters and real-time monitoring of process statuses.
4. Offers a selection of multiple process pipelines for user convenience and flexibility.
5. Enhanced by powerful software capabilities, including self-diagnostic tools that significantly minimize maintenance downtime.
6. Features automatic regulation of the constant temperature zone and cascade control, ensuring precise temperature management within the reaction tube.
7. Equipped with comprehensive alarms and safeguards against over-temperature, thermocouple breakage, short circuits, and process gas flow deviations.
8. Offers customizable solutions tailored to meet specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system is architecturally comprised of:
A 1200°C dual-zone tube furnace, engineered for high-temperature applications
A 3-channel mass flow controller (MFC) gas supply system, ensuring precise gas delivery
A 2L/s vacuum pump with integral connecting components for seamless integration
The system is optimized with directional and swivel casters at the base, offering a compact footprint and superior mobility for flexible positioning.
Designed meticulously for CVD (Chemical Vapor Deposition) processes, this advanced system is perfectly suited for the esteemed environments of universities, innovative research centers, and dynamic industrial manufacturers to conduct a wide range of experiments and high-precision production processes involving cutting-edge chemical vapor deposition techniques.
(Note: The following content is structured to enhance clarity while rigorously maintaining technical accuracy and a natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Incorporating a 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Highly advanced touchscreen control system equipped with data recording capabilities
Innovative dual-zone vertical design ensures superior thermal management
Comprehensive gas flow control system is seamlessly integrated
Safety-centric design featuring multiple protective features for secure operation
Tailored components can be customized to meet specific research requirements
Note: All specifications can be tailored to meet exact needs. This system fuses precision temperature control with efficient gas delivery, optimizing it for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This state-of-the-art dual-zone sliding-track CVD tube furnace boasts a remarkable rail-guided sliding design, which allows for the swift heating and cooling of materials by horizontally maneuvering the furnace. It adeptly connects up to six gas sources, offering precise flow measurement and robust control via an intuitive touchscreen 6-channel Mass Flow Controller (MFC).
This top-tier high-temperature CVD system is specifically engineered for leading universities, forward-thinking research institutions, and industrial manufacturers to engage in a spectrum of experiments and production activities related to innovative chemical vapor deposition (CVD) processes.
Innovative Sliding-track mechanism facilitates rapid thermal cycling for efficiency
Compatible with multiple gases (featuring 6 independent channels)
Precision flow control system integrated with a user-friendly touchscreen MFC interface
Versatile for a diverse range of applications including research and small-batch production
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1 piece)
Vacuum flange set (1 complete set)
Key Features:
Unique sliding mechanism ensures rapid thermal cycling
Sophisticated six-channel precision gas control system
Research-grade vacuum capabilities for maximum efficiency
Complete turnkey solution encompassing all essential accessories
Constructed with industrial-grade materials offering enhanced safety protections
Tube stoppers (2 units)
Durable O-ring seals
High-quality protective gloves (1 pair)
Practical crucible hook (1 unit)
PTFE tubing (3 meters in length)
Essential hex keys (2 pieces)
Comprehensive operation manual for user guidance
This cutting-edge system is meticulously engineered for precise CVD (Chemical Vapor Deposition) processes, ensuring seamless operation for a variety of applications including:
Advanced silicon carbide coating for enhanced material properties
Accurate conductivity testing of innovative ceramic substrates
Pioneering 2D material growth for future technologies
Expert-controlled growth of ZnO nanostructures with precision
Efficient atmosphere sintering of ceramic capacitors (MLCC) for superior performance
Moreover, it serves as an indispensable dedicated graphene film growth furnace for the meticulous preparation of high-quality graphene. The furnace boasts a sophisticated sliding rail base design, facilitating manual lateral movement to swiftly expose the tube to ambient room temperature for accelerated cooling.
This specialized equipment is exceptionally suited for CVD experiments demanding rapid heating and cooling rates, positioning it as the ideal choice for:
High-efficiency synthesis of graphene with unparalleled precision
Other intricate CVD applications requiring swift thermal cycling
Key Advantages of this System:
Unmatched precision temperature control ensuring optimal conditions for sensitive material growth
A unique sliding mechanism that significantly enhances processing speed
Versatile applications spanning across the forefront of advanced material research
Optimized functionality for both graphene preparation and general CVD processes
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Safety Precautions:
Never open the furnace chamber when the temperature is ≥200°C to ensure safe operation and prevent personal injury.
Ensure tube pressure never exceeds 0.02MPa (absolute pressure) during operation to prevent equipment damage due to overpressure.
Warning: Neglecting these precautions could lead to:
Severe personal injury
Potential equipment damage
Significant safety hazards
When furnace temperature exceeds 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube for safety.
Avoid closing both inlet and outlet valves simultaneously during sample heating to ensure safety. If closing valves is necessary:
Continuously monitor pressure gauge readings vigilantly
Promptly open the exhaust valve if the absolute pressure exceeds 0.02MPa
to prevent hazardous situations such as tube rupture or flange ejection.
Equipment Application & Features
This high-temperature CVD tube furnace is specifically designed for intricate chemical vapor deposition (CVD) processes, including:
Advanced silicon carbide (SiC) coating for superior material performance
Conductivity testing of cutting-edge ceramic substrates
Precision-controlled growth of ZnO nanostructures
Atmosphere sintering of high-quality ceramic capacitors (MLCC)
Primary Users:
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD's RJ PVD Coating Machine is designed to cater to the sophisticated needs of universities, cutting-edge research institutions, and industrial manufacturers. It is an ideal choice for conducting intricate vapor deposition-related experiments and scaling up production.
Key Specifications:
Equipped with an Alumina (AlO) furnace tube, this machine can withstand extreme temperatures reaching up to 1600°C, ensuring durability and extended use.
Innovatively designed to operate under vacuum and various atmospheric conditions, enhancing versatility in applications.
The heating element features high-performance MoSi (molybdenum disilicide), offering exceptional efficiency and resilience under high temperatures.
The furnace chamber is insulated with ceramic fiber, providing outstanding thermal uniformity and maximizing energy efficiency.
Advantages:
Experience unparalleled high-temperature stability with precision control to within ±1°C, ensuring accurate and reliable performance.
Benefit from rapid heating and cooling capabilities combined with excellent heat retention for optimal operational efficiency.
Engineered for safety and user-friendliness, facilitating ease of operation while maintaining high safety standards.
Versatile design supports advanced materials research, paving the way for innovative developments and discoveries.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Boasting ultra-high temperature capability up to 1700°C, thanks to robust MoSi heating elements, this system pushes the boundaries of performance.
Leverage precision multi-zone temperature control with ±1°C accuracy for nuanced and detailed thermal management.
Utilize programmable 30-segment thermal profiles for tailored and sophisticated process customization.
Includes a complete gas mixing system with 4-channel MFCs to ensure precise and versatile gas delivery.
Exhibits industrial-grade vacuum performance, indispensable for high-quality and consistent results.
Safety Precautions:
For your safety, do not open the furnace chamber when the temperature is equal to or exceeds 200°C. Adhering to this precaution is essential to prevent potential personal injury.
Ensure tube pressure remains within safe limits, never exceeding 0.02MPa (absolute pressure), during operations to prevent equipment damage. Maintaining pressure within this range is crucial to avoid damaging the equipment due to overpressure.
Warning: Failure to observe these precautions could lead to serious consequences including:
Grave personal injury, posing significant health risks.
Potential damage to the equipment, leading to costly repairs or replacements.
Safety hazards, increasing the risk of accidents and operational disruptions.
When the furnace temperature exceeds 1000°C, ensure the tube is not under vacuum-maintain atmospheric pressure within the tube. This is critical to prevent any pressure-related issues.
Avoid the simultaneous closure of both inlet and outlet valves during sample heating to ensure safe operations. If it becomes necessary to close the valves temporarily:
Continuously monitor pressure gauge readings to ensure pressure remains within safe limits.
Open the exhaust valve immediately if the absolute pressure exceeds 0.02MPa to avert hazardous situations.
Such vigilance prevents dangerous scenarios like tube rupture or flange ejection.
Equipment Description
This state-of-the-art system seamlessly integrates:
A sophisticated gas flow control system for precise regulation.
An advanced liquid injection system, enhancing material flexibility.
Multi-stage temperature-controlled growth zones for optimized performance.
A robust water cooling system to maintain operational stability and prolong equipment life.
CNT Growth Furnace Specifications:
Maximum operating temperature: Achieves up to 1400°C, with continuous adjustability from 0-1400°C, enabling precise thermal control.
Features vertical thermal field distribution for consistent and uniform heat application. with dual-zone temperature control, providing enhanced flexibility and precision.
Includes a top-mounted liquid injection port equipped with flow guide components for streamlined operations. with flow guide components
This Highly specialized CNT/thin-film CVD equipment enables:
Continuous and uninterrupted growth processes, maximizing efficiency.
Precise thermal management for controlled and refined nanostructure synthesis. for controlled nanostructure synthesis
Integrated liquid/gas phase delivery for versatile and complex material deposition. for complex material deposition
Carbon nanotube (CNT) synthesis components
Technical Specifications - Carbon Nanotube/Nanowire CVD Growth Furnace
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange
The system boasts a premium stainless steel vacuum flange assembly, fully equipped with precision-engineered stainless steel needle valves and a mechanical pressure gauge for exact pressure readings. The armored flange design allows for thermocouple extension to the inlet, ensuring precise temperature monitoring throughout the process.
Key Features:
High-purity alumina tube ensures contamination-free growth, maintaining the integrity of materials.
Precision temperature control (±1°C) is maintained across an 800mm uniform zone, ensuring consistent performance.
Note: All specifications are subject to rigorous technical verification. This system is meticulously designed for the advanced synthesis of nanomaterials under strictly controlled atmospheres.
Robust SiC heating elements facilitate ultra-high temperature operation, ensuring reliability in the most demanding conditions.
Complete gas/vacuum interface equipped with state-of-the-art measurement capabilities for precise control.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specially designed for CVD processes, featuring:
Double-layer shell structure with an innovative air-cooling system, ensuring the surface temperature remains comfortably below 55°C
30-segment PID programmable intelligent temperature control with advanced phase-angle firing for precise heating regulation
Alumina polycrystalline fiber chamber lining provides exceptional thermal insulation and ensures uniform temperature distribution
Applications:
Silicon carbide (SiC) coating applications
Conductivity testing on ceramic substrates
Controlled growth of ZnO nanostructures for innovative applications
Atmosphere sintering of ceramic capacitors (MLCC) for enhanced performance
Key Advantages:
User-friendly touchscreen interface for seamless operation
Energy-efficient thermal design reduces operational costs
Research-grade temperature uniformity for precise results
Versatile for advanced material processing across various applications
Fully automated operation with unattended capability, maximizing efficiency
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber ideal for contamination-sensitive processes requiring utmost purity
Precision 3-zone temperature monitoring (±1°C) ensures exact control
Research-grade vacuum capability down to 10³ Pa for superior atmosphere management
Complete gas flow control system with triple MFC channels for unmatched precision
Industrial-grade components designed with extended durability for long-lasting performance
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