| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace designed meticulously for the demanding R&D applications across enterprises, universities, and prestigious research institutes. This versatile equipment supports an array of innovative processes including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Sophisticated and adaptable processing designed for groundbreaking material research
Unmatched precision in temperature control ensuring consistent and reliable outcomes
Space-efficient compact design crafted specifically for laboratory environments
Product Features:
1. Expertly accommodates a spectrum of processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, among others.
2. Employs a high-performance industrial computer coupled with a PLC system, granting comprehensive automated control over various parameters including furnace temperature, boat movement, gas flow, and valves, thus achieving seamless process automation.
3. Boasts an intuitive human-machine interface, facilitating effortless adjustments to process control parameters while providing real-time feedback on process statuses.
4. Provides multiple process pipelines, allowing users the convenience of selection tailored to specific requirements.
5. Comes with powerful software capabilities, including advanced self-diagnostic tools that significantly minimize maintenance downtime.
6. Automatic regulation of the constant temperature zone combined with cascade control ensures precise management of actual process temperatures within the reaction tube.
7. Equipped with robust alarms and protective mechanisms for over-temperature, thermocouple break failures, short circuits, and deviations in process gas flow, ensuring safety and stability.
8. Offers the flexibility of customization to meet the unique specifications and demands of customers.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system comprises:
A state-of-the-art 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system designed for precision
A high-capacity 2L/s vacuum pump integrated with complementary connecting components
The system is further equipped with directional and swivel casters located at the base, offering a compact footprint and remarkable flexibility in mobility.
Expertly designed for CVD processes,this cutting-edge system is ideally suited for universities, research centers, and industrial manufacturers, providing an exceptional platform for conducting experiments and production involving advanced chemical vapor deposition.
(Note: Structured for clarity while maintaining technical accuracy and a seamless flow in natural English.)
Fluidized Bed Tube Furnace Specifications:
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
State-of-the-art touchscreen control with comprehensive data recording
Innovative dual-zone vertical design ensuring optimal thermal management
Includes a complete, integrated gas flow control system
Focused on safety with a design featuring multiple protection measures
Customizable components tailored for specific research applications
Note: Specifications can be customized to meet precise requirements. This system masterfully combines precision temperature control with efficient gas delivery, ideal for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This state-of-the-art dual-zone sliding-track CVD tube furnace features a sophisticated rail-guided sliding design, enabling rapid heating and cooling by horizontally moving the furnace. It seamlessly connects six gas sources,with highly precise flow measurement and control through a user-friendly touchscreen 6-channel mass flow controller (MFC).
This high-performance high-temperature CVD system is specifically designed for universities, research institutions, and industrial manufacturers to facilitate experiments and production related to cutting-edge chemical vapor deposition (CVD) technology.
Innovative sliding-track mechanism enables fast and efficient thermal cycling
Compatible with multiple gases (6 independent channels available)
Offers precision flow control via an intuitive touchscreen MFC interface
Adaptable for versatile applications in both research and small-batch production settings
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories:
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
Unique sliding mechanism that facilitates rapid thermal cycling
Six-channel precision gas control system for enhanced accuracy
Research-grade vacuum capability for superior performance
Complete turnkey solution equipped with all necessary accessories
Constructed with industrial-grade quality and includes safety protections
Tube stoppers (2)
O-ring seals for secure fittings
Protective gloves (1 pair) for safe handling
Crucible hook (1) for ease of use
Durable PTFE tubing (3m) for reliable operations
Precision Hex keys (2) for assembly and adjustments
Comprehensive operation manual for user guidance
This state-of-the-art system is meticulously crafted for pioneering CVD processes, encompassing a wide range of applications such as:
Expert Silicon carbide coating
Precision conductivity testing of ceramic substrates
Innovative 2D material growth
Controlled and advanced growth of ZnO nanostructures
Atmosphere sintering of ceramic capacitors (MLCC) with precision
This system also stands out as a specialized graphene film growth furnace for impeccable graphene preparation. The innovative furnace boasts a sliding rail base design, facilitating effortless manual lateral movement to seamlessly expose the tube to room temperature ensuring swift and efficient rapid cooling.
This cutting-edge equipment is exceptionally designed for CVD experiments necessitating rapid heating and cooling cycles, thereby making it a perfect fit for:
High-efficiency and seamless graphene synthesis
Diverse other CVD applications that demand rapid thermal cycling
Key Advantages of Our System:
Precision temperature control designed for sensitive material growth to ensure perfect outcomes
Unique sliding mechanism provides faster and more efficient processing
Versatile applications that span across advanced material research
Optimized for both graphene and comprehensive CVD processes
Specifications of Our Sliding Rail Tube Furnace
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes to Consider
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications confirming our quality standards
| ISO Certification | CE Certification |
Safety Precautions to Ensure Safe Operations:
Do not open the furnace chamber when temperature ≥200°C to prevent any risk of personal injury.
The tube pressure must never exceed 0.02MPa (absolute pressure) during operation to avoid significant equipment damage from overpressure.
Warning: Adhering to Safety Measures is Crucial Failure to follow these precautions may result in:
Serious personal injury with severe consequences
Potential equipment damage
Safety hazards with dangerous outcomes
When furnace temperature exceeds 1000°C, the tube must not be under vacuum - maintain a safe atmospheric pressure inside the tube.
Avoid closing both inlet and outlet valves simultaneously during sample heating for safety. If closing of valves is necessary:
Continuously monitor pressure gauge readings closely
Immediately open the exhaust valve if absolute pressure surpasses 0.02MPa
Prevents hazardous situations such as tube rupture or flange ejection.
Equipment Application & Features
This high-performance CVD tube furnace is expertly designed for diverse chemical vapor deposition (CVD) processes, including:
High-precision Silicon carbide (SiC) coating
Conductivity testing of ceramic substrates with accuracy
Controlled and innovative growth of ZnO nanostructures
Enhance the quality of your ceramic capacitors (MLCC) with our state-of-the-art atmosphere sintering technology. Delivering unparalleled precision and performance, this innovation ensures your components meet the highest standards.
Primary Users:
Universities, research institutions, and industrial manufacturers engaged in cutting-edge vapor deposition experiments and production processes.
Key Specifications:
Our robust Alumina (AlO) furnace tube can withstand temperatures soaring up to an impressive 1600°C, ensuring optimal performance and reliability.
Versatile vacuum and atmosphere-capable design for flexible operational needs.
Equipped with high-performance MoSi (molybdenum disilicide) heating elements for superior efficiency and durability.
Furnace chamber features advanced ceramic fiber insulation, providing outstanding thermal uniformity and energy efficiency.
Advantages:
Experience unmatched high-temperature stability with precision control at ±1°C, ensuring consistent, reliable results.
Benefit from rapid heating and cooling capabilities with exceptional heat retention, enhancing your operational efficiency.
Ensures safety and ease of use with user-friendly operational protocols.
Designed for versatility, ideal for advanced materials research and development.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Unleash the power of ultra-high temperature capability reaching up to 1700°C, powered by MoSi heating elements for peak performance.
Advanced precision multi-zone temperature control with a remarkable accuracy of ±1°C for enhanced experiment precision.
Sophisticated programmable 30-segment thermal profiles for tailored experimental conditions.
Comprehensive gas mixing system featuring 4-channel mass flow controllers (MFCs) for precise gas delivery.
Industrial-grade vacuum performance ensuring robust and reliable operation.
Safety Precautions:
Caution: Never open the furnace chamber when the temperature is ≥200°C to prevent potential personal injury. to prevent personal injury.
Ensure tube pressure does not exceed 0.02MPa (absolute pressure) during operation to avoid overpressure-induced equipment damage. during operation to avoid equipment damage from overpressure.
Warning: Neglecting these precautions may lead to:
Severe personal injury and potential safety hazards.
Significant equipment damage, compromising operational integrity.
Serious safety hazards.
Ensure atmospheric pressure inside the tube when the furnace temperature exceeds 1000°C - avoid vacuum conditions to protect equipment integrity. - maintain atmospheric pressure inside the tube.
Prevent closing both inlet and outlet valves simultaneously during sample heating to avoid pressure build-up. If valves must be closed:
Keep a vigilant eye on pressure gauge readings to ensure safety.
Immediately open the exhaust valve if absolute pressure surpasses 0.02MPa to avert hazardous conditions.
Mitigate hazardous situations such as tube rupture or flange ejection with prompt actions.
Equipment Description
This comprehensive system integrates:
A sophisticated gas flow control system for precise delivery and management.
Innovative liquid injection system for enhanced process control.
Multi-stage temperature-controlled growth zones for optimal synthesis conditions.
An efficient water cooling system ensuring operational stability and safety.
CNT Growth Furnace Specifications:
A maximum operating temperature of: 1400°C, fully adjustable from 0-1400°C for customizable process settings.
Offers vertical thermal field distribution with precision dual-zone temperature control for enhanced uniformity.
Featuring a top-mounted liquid injection port with advanced flow guide components for seamless operation.
This state-of-the-art CNT/thin-film CVD equipment facilitates:
Continuous and uninterrupted growth processes for superior output quality.
Precise thermal management enabling controlled and consistent nanostructure synthesis.
Experience seamless integration with our efficient liquid/gas phase delivery system, engineered to enhance operational efficiency. Expertly designed for intricate and sophisticated material deposition tasks.
Incorporating cutting-edge Carbon Nanotube (CNT) synthesis components for superior performance.
Technical Specifications - Engineered specifically for Carbon Nanotube/Nanowire CVD Growth Furnace applications.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Premium Stainless Steel Flange, ensuring reliability and robust performance.
The system boasts a stainless steel vacuum flange assembly, equipped with high-precision stainless steel needle valves and a mechanical pressure gauge. The armored flange facilitates thermocouple extension for precise temperature monitoring at the inlet.
Key Features Include:
A high-purity alumina tube ensures contamination-free growth, safeguarding your materials.
Achieve precision temperature control with an accuracy of ±1°C across an 800mm uniform zone.
Note: All specifications are subject to technical verification. Designed meticulously for the synthesis of advanced nanomaterials under controlled atmospheres.
Equipped with robust SiC heating elements, facilitating ultra-high temperature operation with ease.
The system includes a complete gas/vacuum interface with advanced measurement capabilities for comprehensive operational oversight.
Equipment Introduction:
The LCD Touchscreen CVD High-Temperature Furnace is a state-of-the-art tube furnace specially engineered for CVD processes, and showcases the following features:
Durable double-layer shell structure combined with an efficient air-cooling system, maintaining the surface temperature below a safe 55°C
Advanced 30-segment PID programmable intelligent temperature control featuring precise phase-angle firing for accurate heating and optimal results.
Lined with high-quality alumina polycrystalline fiber chamber to provide superior thermal insulation while ensuring consistent uniform temperature distribution.
Applications Include:
Innovative Silicon carbide (SiC) coating applications.
Efficient conductivity testing of ceramic substrates.
Facilitates controlled growth of ZnO nanostructures, enhancing research capabilities.
Optimized for atmosphere sintering of ceramic capacitors (MLCC), ensuring high-quality output.
Key Advantages:
Intuitive user-friendly touchscreen interface for seamless operation.
Eco-friendly, energy-efficient thermal design, reducing operational costs.
Achieve research-grade temperature uniformity for precise experimental results.
Versatile system ideal for advanced material processing, catering to diverse industrial needs.
Fully automated operation enabling unattended capability, maximizing productivity.
High-Temperature Furnace Specifications:
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features Include:
Ultra-clean alumina-coated chamber suitable for contamination-sensitive processes.
Precision 3-zone temperature monitoring with an accuracy of (±1°C), ensuring consistency.
Research-grade vacuum capability down to an impressive 10³ Pa, enabling advanced research applications.
Comprehensive gas flow control with triple MFC channels, enhancing process precision.
Constructed with industrial-grade components ensuring long-lasting durability and reliability.
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