| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a high-vacuum fast-heating tubular furnace equipped with a quartz chamber and vacuum flanges. It utilizes halogen lamp heating, achieving a rapid heating rate of up to 50°C per second, and features PID automatic control with 30 programmable segments.
Specifically designed for annealing semiconductor or solar cell substrates, this high-temperature annealing tubular furnace enables rapid thermal processing of samples in vacuum or controlled atmosphere environments. It is widely used in university laboratories and industrial research facilities for applications such as:
Thin-film deposition
Rapid annealing of various materials
Silicidation
Diffusion
Crystallization
Densification
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: Other sizes can be customized based on customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
The sliding tube furnace is equipped with a pair of sliding rails at the bottom, with two tube furnaces mounted on the rails simultaneously. The furnaces can be moved left and right to achieve rapid cooling. This RTP rapid annealing furnace can heat samples in various environments such as vacuum, atmospheric, and air conditions. It is primarily used for rapid annealing, silicidation, diffusion, crystallization, densification, and other processes for a variety of materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The sliding three-zone tube furnace is a rapid thermal annealing furnace with an 80mm outer diameter quartz tube and a maximum temperature of 1200°C. The furnace is equipped with a pair of sliding rails at the bottom, allowing the furnace to move from one side of the tube to the other for rapid heating and cooling.
To achieve the fastest heating, preheat the furnace to the desired temperature and then slide it over the sample position. For the quickest cooling, simply slide the furnace away from the sample after heating is complete.
This system is an ideal low-cost solution for rapid thermal processing (RTP).
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This custom RTP (Rapid Thermal Processing) annealing furnace consists of an RTP sliding-rail tube furnace, a multi-channel mass flow controller system, and a vacuum system, specifically designed for annealing semiconductor wafers, solar cells, or other samples (up to 3" in size).
The tube furnace utilizes infrared lamp heating, achieving an ultra-fast heating rate of 50°C per second. It features 30-segment precise temperature control with an accuracy of ±1°C. Equipped with an RS485 interface and control software, the furnace can be operated and monitored via computer, displaying real-time temperature curves.
This rapid thermal processing tube furnace is widely used for large-area 2D graphene growth via CVD and is optimized for semiconductor and solar cell wafer annealing. The computer controls the furnace in real-time through the RS485 interface and dedicated software, while visualizing temperature profiles.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace is equipped with vacuum flanges at both ends of the furnace tube. The vacuum level can reach 10<sup>-5</sup> Torr with a molecular pump and 10<sup>-3</sup> Torr with a mechanical pump. A pair of sliding rails is installed at the bottom of the furnace, allowing manual movement. The maximum heating and cooling rates can reach 100°C per minute. To achieve the fastest heating, the furnace can be preheated to the set temperature and then moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating the sample. Under vacuum or inert gas conditions, the heating and cooling rates can reach 10°C per second, making it an ideal low-cost furnace for rapid thermal processing.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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