Customized Laboratory Benchtop Multi-Function Magnetron Sputter Coating

• Customization: Available
• After-sales Service: on-Line Service
• Warranty: One Year
• Model NO.: Made-to-order
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Transport Package: Wooden Case
• Specification: Customized
• Trademark: RJ
• Origin: Zhengzhou, China

Product Description

 

 

Parameter	Specification
Material	Stainless Steel
Power Supply	DC Power Supply
Power Rating	3000W
Type	Coating System
Application	Scientific Research / Battery Electrodes
Model	SD-650MHT
Foreline Pump	2 L/min (Rotary Vane Pump)
Ultimate Vacuum	5×10<sup>-5</sup> Pa
Oil Mist Filter	Filter Cartridge
Dimensions	610×420×490 mm (W×D×H)
Packaging Material	Wooden Case
Electrode Structure	Planar
Leak Rate	<1.0×10<sup>-8</sup> Pa·m³/s
Certification	CE
Custom Manufacturing	Available
Target Configuration	Dual-Cathode
Optional Power Supply	RF Power Supply
Sample Stage	200mm Rotatable Stage
Target Size	2-inch
Cooling System	Water-Cooled
Thickness Monitor	Optional
Chamber Size	Ø210×270 mm (Internal Dimensions)
Pumping Time	10 Pa → 3 Pa

Instrument Main Unit Dimensions

Dimensions of the Main Unit: 610mm in Length, 420mm in Width, and 490mm in Height

Specifications of the Vacuum Chamber

• Robust Metal Chamber:

  • External Dimensions: Diameter 260mm, Height 500mm

  • Internal Dimensions: Diameter 210mm, Height 270mm

Advanced Dual-Target Cathode Configuration

Target Specifications	Details
Target Size	Ø50mm × 3mm (Thickness varies by material)
Standard Targets	Includes one Ø50mm×3mm Steel target + one Ø50mm×3mm Aluminum target
Target Cooling	Water-cooled
Ultimate Vacuum	5×10<sup>-5</sup> Pa (Reaches 5×10<sup>-3</sup> Pa in 10 minutes)
Power Supply	DC Constant-Current Supply: - Input: 220V AC - Output: 0-600V, 0-1.6A RF Supply & Matcher: 500W

Substrate Stage Specifications

• Stage Diameter: 200mm

Sophisticated Gas System

• Type of Process Gas: Utilize Argon or other inert gases (Cylinder and regulator to be provided by user)

• Gas Control System: Fully Automated Control via Solenoid Flow Valve with Manual Override Option

State-of-the-Art Cooling System

Self-Circulating Efficient Chiller

Monitoring & Control Features

• Real-Time Precision Thickness Monitoring

• User-Friendly Touchscreen Interface

Versatile Coating Capabilities

Capable of Coating Ferroelectric, Conductive, Alloy, Semiconductor, Ceramic, Dielectric, Optical, Fluoride, Hard, and PTFE Thin Films

Electrical Specifications

• Voltage Required: 220V at 50Hz

• Startup Power Requirement: 3KW

SD-650MHT Installation/Operating Environment

Specific Location Requirements:

1. Ensure Main Unit is Placed on a Sturdy Table (Minimum 130cm by 60cm, Load Capacity of At Least 200kg)

2. Position External Rotary Pump and Chiller Properly (on Floor or Adjacent to Main Unit)

3. Total System Weight: Ranges from 208 to 240kg, Depending on Configuration. Team of Four Required for Moving.

4. Optimal Operating Conditions:

   • Temperature Range: 15-25°C

   • Maximum Humidity: 75% RH

5. Provision of a Dedicated 220V, 16A Circuit Breaker is mandatory for the system.

6. Ensure Proper Ventilation within the Operating Environment, and Prevent Direct Sunlight Exposure to the Instrument.

7. User Must Supply Argon/Helium Gas Cylinders and Pressure Regulators.