| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Introducing the advanced Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a marvel of high-vacuum, fast-heating technology. This tubular furnace boasts a sophisticated quartz chamber and vacuum flanges. Harnessing the power of halogen lamp heating, it achieves an impressive rapid heating rate of up to 50°C per second, and showcases cutting-edge PID automatic control featuring 30 programmable segments.
Exclusively engineered for the annealing of semiconductor and solar cell substrates, this high-temperature tubular furnace ensures rapid thermal processing of samples in either vacuum or controlled atmosphere environments. It finds extensive applications in university laboratories as well as industrial research facilities for a wide range of purposes, including:
Thin-film deposition for cutting-edge materials
Rapid annealing processes for diverse materials
High-precision silicidation techniques
Diffusion processes
Crystallization to enhance structural integrity
Densification for material durability
| Parameter | 2-inch Wafer | 4-inch Wafer | 6-inch Wafer |
|---|---|---|---|
| Wafer Size | 2 inches | 4 inches | 6 inches |
| Furnace Tube Outer Diameter | 100 mm | 110-150 mm | 180 mm |
| Heating Zone Length | 200 mm | 300 mm | 400 mm |
Note: Custom sizes available to meet specific customer requirements.
| Feature | Specification |
|---|---|
| Product Name | RTP Rapid Annealing Furnace |
| Operating Temperature | 900°C |
| Controller | LED (Touchscreen LED optional) |
| Furnace Chamber | Open-type, sliding rail design |
| Tube Size | Customizable based on requirements |
| Heating Element | Halogen lamps |
| Heating Rate | 0-50°C/s |
| Thermocouple | Custom-designed based on actual needs |
| Temperature Controller | 30-segment high-precision digital programmable controller |
Our sliding tube furnace comes with dual sliding rails at its base, accommodating two tube furnaces simultaneously. These can be effortlessly maneuvered left and right to achieve rapid cooling. Designed for multi-environment heating, including vacuum, atmospheric, and air settings, this furnace supports rapid annealing, silicidation, diffusion, crystallization, and densification of varied materials.
| Parameter | Specification |
|---|---|
| Display | LED |
| Temperature | 1200°C |
| Continuous Operating Temp | ≤1100°C |
| Heating Rate | Recommended 0-10°C/min |
| Furnace Tube | Tube Dimensions: OD50/ID44 × L1800mm |
| First Furnace: Heating Zone Length: 350mm | |
| Second Furnace: Heating Zone Length: 150mm | |
| (Other sizes customizable based on customer requirements) | |
| Heating Element | Molybdenum Disilicide (MoSi) Heating Wire |
| Sliding Rails/Table | Chrome-Plated Steel Dual Rails, Sliding Length: 1800mm |
| (Other sizes customizable based on customer requirements) | |
| Thermocouple | Type N |
| Tube Material | High-Purity Quartz |
| Sealing Flange | Stainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port) |
| Temperature Accuracy | ±1°C |
| Temperature Control | Two Independently Controlled Furnaces |
| - 30-step PID Auto Control via SCR Power Regulation |
The innovative sliding three-zone tube furnace is a state-of-the-art rapid thermal annealing system featuring an 80mm outer diameter quartz tube and a peak temperature capability of 1200°C. Built with dual sliding rails, this furnace seamlessly transitions across the tube for swift heating and cooling cycles.
Maximize heating speed by preheating the furnace to the target temperature, then smoothly sliding it over the sample. For rapid cooling, just slide the furnace away post-heating
Presenting an ideal low-cost solution for rapid thermal processing (RTP),.
| Parameter | Specification |
|---|---|
| Shell Structure | Double-layer air-cooled |
| Furnace Chamber Material | Alumina refractory fiber |
| Max Temperature | 1200°C |
| Operating Temperature | 1100°C |
| Heating Rate | 10°C/min |
| Heating Element | Resistance wire |
| Temperature Control | PID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protection |
| Thermocouple | Type N |
| Heating Zone Length | 220mm + 220mm + 220mm (other sizes customizable upon request) |
| Furnace Tube Size | Ø80mm × 2400mm (other sizes customizable upon request) |
| Furnace Tube | High-purity quartz tube |
| Sliding Rails | Chrome-plated steel dual rails |
| Rail Length | ~2500mm (other sizes customizable upon request) |
| Flange | 304 stainless steel sealing flange with silicone O-ring, easy assembly, reusable |
| Compatible Gas | Inert gas (slight positive pressure) |
This bespoke RTP (Rapid Thermal Processing) annealing furnace comprises a versatile RTP sliding-rail tube furnace, a comprehensive multi-channel mass flow controller system, and a reliable vacuum system, meticulously crafted for the annealing of semiconductor wafers, solar cells, and other samples up to 3 inches.
This cutting-edge tube furnace employs infrared lamp heating technology, achieving an ultra-fast heating rate of 50°C per second. It integrates a 30-segment precise temperature control system with superb accuracy of ±1°C. Enhanced with an RS485 interface and intuitive control software, the furnace offers seamless computer operation and monitoring, complete with real-time temperature curve displays.
This state-of-the-art thermal processing solution is a rapid thermal processing tube furnace is extensively deployed for the expansive growth of 2D graphene through CVD techniques and is finely optimized to enhance the annealing processes of semiconductor and solar cell wafers. The system's operations are meticulously managed by computer, ensuring real-time control through the RS485 interface, empowered by specialized software, while elegantly visualizing precise temperature profiles.
| Parameter | Specification |
|---|---|
| Product Name | Open-Type Dual-Zone RTP Tube Furnace |
| Operating Temperature | ≤1000ºC |
| Controller | LCD Touch Screen |
| Furnace Tube Size | Quartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available) |
| Heating Zone | 300mm (Custom lengths available) |
| Furnace Type | Open-Type |
| Heating Element | Halogen Lamp Heating |
| Heating Rate | 30ºC/min |
| Temperature Sensor | Type N Thermocouple |
| Temperature Controller | 30-Segment High-Precision Digital Programmable Controller |
Part 2: Advanced Gas Mixing System
| Parameter | Specification |
|---|---|
| Flow Range | MFC1: Argon (O) 0-200sccm MFC2: Argon (Ar) 0-200sccm |
Part 3: Comprehensive Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump | Rotary Vane Pump |
| Accessories | Exhaust Filter + Corrosion-Resistant Digital Vacuum Gauge |
The rapid annealing furnace is designed with cutting-edge vacuum flanges situated at both ends of the furnace tube. Achieving remarkable vacuum levels of 10-5 Torr with a molecular pump and 10-3 Torr using a mechanical pump, it features a pair of sliding rails at the base for convenient manual maneuverability. With impressive heating and cooling rates reaching up to 100°C per minute, the furnace allows for preheating to desired temperatures, followed by swift movement to the sample position for heating. For expedited cooling, it can be seamlessly repositioned to the opposite end after heating. Under vacuum or inert gas environments, unmatched heating and cooling rates of 10°C per second can be achieved, positioning it as an ideal, cost-effective solution for rapid thermal processing.
| Parameter | Specification |
|---|---|
| Furnace Tube Dimensions | Φ60mm × 1500mm (Customizable per customer requirements) |
| Heating Zone Length | 440mm (Customizable per customer requirements) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Control System | 30-segment PID microcomputer programmable control (Optional LCD touchscreen display) |
| Temperature Control Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple break protection |
| Heating Rate | 0~10°C/min |
| Heating Element | Resistance wire |
| Gas Tightness | 4.03 × 10<sup>-3</sup> Pa |
| Furnace Chamber Material | Japanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contraction |
| Slide Rail Dimensions | Heavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements) |
| Flange Connections | Standard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valve |
| Sealing System | Silicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours) |
| Furnace Tube Options | Fused quartz tube or alumina tube |
| Temperature Sensor | Type N thermocouple |
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