Customization: | Available |
---|---|
After-sales Service: | on-Line Service |
Warranty: | 1 Year |
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Parameter | Specification |
---|---|
Customization | Yes |
Imported | No |
Material | Metal |
Voltage | 220V |
Coating Rate | 10mm/s |
Dimensions | 450mm (Main dimension) |
Temperature | 500ºC |
Weight | 350kg |
Sample Stage Size | 150mm |
Evaporation Sources | 4 Tungsten Boats |
Chamber Size | 300×400mm |
Chamber Material | 304 Stainless Steel |
Thickness Control | Crystal Oscillator Thickness Monitor |
Vacuum System | Two-Stage Rotary Vane Pump |
Parameter | Specification |
---|---|
Total Power | 5000W |
Sample Stage Size | Max. supports φ150mm samples |
Adjustable Rotation | 1-20 rpm adjustable |
Max. Temperature | 1800 °C |
System Vacuum | ≤1.0×10<sup>-5</sup> Pa |
Chamber Size | φ300×400mm |
Chamber Material | 304 Stainless Steel |
Viewport | Front-mounted, dia.100mm |
This system is a triple-source high-vacuum evaporation coating system. Featuring a front-opening vacuum chamber design, it offers generous chamber space and high scalability, enabling evaporation coating for diverse large-sized samples.
The rotating water-cooled sample stage and all operations are centrally controlled via an integrated touchscreen panel. The vacuum system incorporates a comprehensive pneumatic valve system, allowing users to perform one-touch operations on the touchscreen for:
Vacuum pumping
Shutdown-free sample exchange
And other critical functions