| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Equipment Introduction
The RJ150-XK is a state-of-the-art tubular diffusion/oxidation furnace meticulously crafted for R&D applications across enterprises, prestigious universities, and esteemed research institutes. This versatile equipment supports a myriad of processes such as:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile, cutting-edge processing for pioneering material research
Unmatched precision in temperature control ensuring impeccable process consistency
Compact design optimized for seamless integration into lab environments
Product Features:
1. Masterfully accommodates processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Employs a highly resilient industrial computer + PLC system for fully automated and smooth control over furnace temperature, boat movement, gas flow, and valves, culminating in comprehensive automation of the process.
3. Boasts a user-centric human-machine interface, granting effortless modification of control parameters and real-time monitoring of various process statuses.
4. Offers a broad spectrum of process pipelines for user-friendly selection.
5. Enhanced with robust software capabilities, including self-diagnostic tools to substantially minimize maintenance time.
6. Automatic constant temperature zone adjustment and cascade control ensure meticulous regulation of process temperatures within the reaction tube.
7. Includes sophisticated alarms and protective measures for over-temperature, thermocouple malfunctions, and gas flow inconsistencies.
8. Products can be customized in accordance with specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system is predominantly composed of:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump accompanied by necessary connecting components
The system is conveniently equipped with directional and swivel casters at the base, ensuring a compact footprint and exceptional mobility.
Designed for CVD processes, this system is ideal for universities, research centers, and industrial manufacturers conducting experiments and production involving chemical vapor deposition.
(Note: Structured for clarity while maintaining technical accuracy and natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Advanced touchscreen control with data recording
Dual-zone vertical design for optimal thermal management
Complete gas flow control system included
Safety-focused design with multiple protection features
Customizable components for specific research needs
Note: Specifications may be customized based on actual requirements. The system combines precision temperature control with efficient gas delivery for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This dual-zone sliding-track CVD tube furnace features a rail-guided sliding design, allowing for rapid heating and cooling of materials by horizontally moving the furnace. It can simultaneously connect six gas sources, with precise flow measurement and control via a touchscreen 6-channel mass flow controller (MFC).
This high-temperature CVD system is primarily designed for universities, research institutions, and industrial manufacturers to conduct experiments and production related to chemical vapor deposition (CVD).
Sliding-track mechanism for fast thermal cycling
Multi-gas compatibility (6 independent channels)
Precision flow control with touchscreen MFC interface
Versatile applications in research and small-batch production
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
Unique sliding mechanism enables rapid thermal cycling
Six-channel precision gas control system
Research-grade vacuum capability
Complete turnkey solution with all necessary accessories
Industrial-grade construction with safety protections
Tube stoppers (2)
O-ring seals
Protective gloves (1 pair)
Crucible hook (1)
PTFE tubing (3m)
Hex keys (2)
Operation manual
This sophisticated system is meticulously engineered for advanced CVD processes, unlocking a world of applications such as:
Superior silicon carbide coating
Precise conductivity testing of ceramic substrates
Innovative 2D material proliferation
Controlled expansion of ZnO nanostructures
Atmospheric sintering of cutting-edge ceramic capacitors (MLCC)
Moreover, it functions as a specialized graphene film growth furnace for the meticulous preparation of graphene. The furnace is designed with a state-of-the-art sliding rail base design, facilitating manual lateral movements to quickly expose the tube to ambient temperatures, ensuring swift and efficient cooling.
This outstanding equipment is particularly suited for CVD experiments that demand rapid heating and cooling transitions, making it an optimal choice for:
High-efficiency synthesis of premium graphene
Additional CVD applications necessitating rapid thermal cycling
Key Advantages:
Unmatched precision in temperature control for the exact growth of sensitive materials
Exclusive sliding mechanism enables expedited processing
Broad versatility in applications for advanced material research endeavors
Optimally designed for both graphene and other standard CVD processes
Specifications of the Sliding Rail Tube Furnace
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Highly efficient Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Advanced Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certified | CE Certified |
Safety Precautions:
Do not open the furnace chamber when temperature is ≥200°C to prevent serious personal injuries.
Ensure tube pressure never exceeds 0.02MPa (absolute pressure) during operation to prevent equipment damage from excessive pressure.
Warning: Negligence in following these precautions may lead to:
Severe personal injuries
Significant equipment damage
Emergent safety hazards
When the furnace temperature exceeds 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube.
Avoid simultaneous closure of both inlet and outlet valves during sample heating. If closure of valves is necessary:
Diligently monitor pressure gauge readings
Promptly open the exhaust valve if absolute pressure exceeds 0.02MPa
to prevent hazardous conditions (such as tube rupture, flange ejection, etc.)
Equipment Application & Features
This high-performance CVD tube furnace is distinctly crafted for chemical vapor deposition (CVD) processes, encompassing:
Exquisite silicon carbide (SiC) coating
Meticulous conductivity testing of ceramic substrates
Controlled and precise growth of ZnO nanostructures
Our state-of-the-art equipment is designed for the atmosphere sintering of ceramic capacitors (MLCC), ensuring optimal performance and durability.
Primary Users:
Tailored for universities, cutting-edge research institutions, and industrial manufacturers, our machinery is ideal for both experimental setups and full-scale production in vapor deposition processes.
Key Specifications:
The robust Alumina (AlO) furnace tube can withstand soaring temperatures up to 1600°C, offering unmatched reliability in high-temperature environments.
Engineered with a vacuum and atmosphere-capable design, it ensures versatile application and superior user satisfaction.
Featuring high-performance MoSi (molybdenum disilicide) heating elements, our equipment delivers exceptional heating precision.
The furnace chamber boasts ceramic fiber insulation, providing excellent thermal uniformity and energy efficiency, making it both eco-friendly and cost-effective.
Advantages:
Experience high-temperature stability with ±1°C precision, ensuring consistent results in every application.
Achieve rapid heating and cooling thanks to superior heat retention, optimizing operational efficiency.
Designed for safe and user-friendly operation, our equipment prioritizes your safety without compromising performance.
Versatile and ideal for advanced materials research, it supports a wide range of experimental needs.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
With ultra-high temperature capability reaching 1700°C, equipped with MoSi heating elements, it stands ready for your most demanding tasks.
Benefit from precision multi-zone temperature control with a remarkable ±1°C accuracy, ensuring exceptional process consistency.
Utilize programmable 30-segment thermal profiles to customize your heating procedures with ease.
A complete gas mixing system featuring 4-channel MFCs offers flexibility and precision in gas delivery.
Experience industrial-grade vacuum performance, providing robustness and reliability in every operation.
Safety Precautions:
To ensure safety, do not open the furnace chamber when operating temperatures are equal to or exceed 200°C. This precaution is crucial to prevent personal injury.
Always adhere to the pressure guidelines: tube pressure must never exceed 0.02MPa (absolute pressure) to avoid potential equipment damage due to overpressure.
Warning: Failure to adhere to these safety precautions may lead to:
Serious personal injury
Potential equipment damage
Risks of safety hazards
When the furnace temperature exceeds 1000°C, ensure the tube is not under vacuum and maintain atmospheric pressure within the tube to prevent hazards.
Avoid closing both inlet and outlet valves simultaneously during sample heating to prevent pressure issues. If you must close valves:
Continuously keep an eye on pressure gauge readings for safety.
Immediately open the exhaust valve if absolute pressure rises above 0.02MPa
to prevent hazardous situations such as tube rupture or flange ejection.
Equipment Description
This innovative system integrates:
A precise gas flow control system
An efficient liquid injection system
Multi-stage, temperature-controlled growth zones for refined processing
A reliable water cooling system for optimal thermal management
CNT Growth Furnace Specifications:
Capable of reaching a maximum operating temperature of: 1400°C, continuously adjustable from 0 to 1400°C to suit various needs.
Features a vertical thermal field distribution with dual-zone temperature control for enhanced precision.
Includes a top-mounted liquid injection port with flow guide components for streamlined operations.
This advanced CNT/thin-film CVD equipment facilitates:
Continuous and uninterrupted growth processes for maximum efficiency
Precise thermal management for controlled and predictable nanostructure synthesis Integrated liquid and gas phase delivery systems for comprehensive operational flexibility.
Tailored to meet the highest standards of research and industrial applications. A powerhouse for intricate material deposition, designed to tackle complex projects with precision.
Components specifically tailored for the synthesis of carbon nanotubes (CNT), ensuring top-tier outcomes.
Technical Specifications - Leading-edge Carbon Nanotube/Nanowire CVD Growth Furnace, pushing the boundaries of innovation.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Premium Stainless Steel Flange, built for resilience and reliability in challenging conditions.
The system boasts a robust stainless steel vacuum flange assembly, complete with durable stainless steel needle valves and a mechanical pressure gauge. The armored flange facilitates thermocouple extension to the inlet, ensuring precise temperature monitoring and control.
Distinguished Key Features:
High-purity alumina tube ensures contamination-free growth, vital for maintaining the integrity of delicate processes.
Achieve unmatched precision with temperature control (±1°C) across an 800mm uniform zone, setting new standards in precision.
Note: All technical specifications are subject to verification. This design caters to advanced nanomaterial synthesis under meticulously controlled atmospheres.
Engineered with robust SiC heating elements, enabling ultra-high temperature operations effortlessly.
A comprehensive gas/vacuum interface is integrated, equipped with sophisticated measurement capabilities for seamless operation.
Cutting-edge Equipment Introduction
The remarkable LCD Touchscreen CVD High-Temperature Furnace impresses with its capabilities as a versatile tube furnace specifically crafted for sophisticated CVD processes, showcasing a suite of outstanding features:
Innovative double-layer shell structure paired with an advanced air-cooling system, effectively maintaining surface temperatures below 55°C for safety and efficiency.
Feature-rich 30-segment PID programmable intelligent temperature control integrated with sophisticated phase-angle firing to achieve meticulous heating precision.
Alumina polycrystalline fiber chamber lining ensures superior thermal insulation alongside uniform temperature distribution, optimizing performance.
Diverse Applications:
Ideal for Silicon Carbide (SiC) coating applications.
Conductivity testing of ceramic substrates, elevating research potential.
Enables controlled growth of innovative ZnO nanostructures.
Perfect for atmosphere sintering of ceramic capacitors (MLCC).
Remarkable Key Advantages:
Intuitive, user-friendly touchscreen interface for seamless operation.
Cutting-edge energy-efficient thermal design reducing operational costs.
Achieves research-grade temperature uniformity, ensuring reliability.
Versatile solution for advanced material processing requirements.
Fully automated operation incorporates unmatched unattended capability, maximizing efficiency.
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Noteworthy Key Features:
Ultra-clean alumina-coated chamber engineered for contamination-sensitive processes. Precision 3-zone temperature monitoring
ensures meticulous control (±1°C). offers (±1°C) precision.
Boasts research-grade vacuum capability down to 10³ Pa, enhancing operational efficiency.
Comprehensive gas flow control is achieved with state-of-the-art triple MFC channels.
Industrial-grade components promise exceptional extended durability for demanding applications.
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