| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
| Parameter | Specification |
|---|---|
| Material | Stainless Steel |
| Power Supply | DC Power Supply |
| Power Rating | 3000W |
| Type | Coating System |
| Application | Scientific Research / Battery Electrodes |
| Model | SD-650MHT |
| Foreline Pump | 2 L/min (Rotary Vane Pump) |
| Ultimate Vacuum | 5×10<sup>-5</sup> Pa |
| Oil Mist Filter | Filter Cartridge |
| Dimensions | 610×420×490 mm (W×D×H) |
| Packaging Material | Wooden Case |
| Electrode Structure | Planar |
| Leak Rate | <1.0×10<sup>-8</sup> Pa·m³/s |
| Certification | CE |
| Custom Manufacturing | Available |
| Target Configuration | Dual-Cathode |
| Optional Power Supply | RF Power Supply |
| Sample Stage | 200mm Rotatable Stage |
| Target Size | 2-inch |
| Cooling System | Water-Cooled |
| Thickness Monitor | Optional |
| Chamber Size | Ø210×270 mm (Internal Dimensions) |
| Pumping Time | 10 Pa → 3 Pa |
610mm (L) × 420mm (W) × 490mm (H)
High-Performance Metal Chamber:
External Dimensions: Ø260mm × H500mm
Internal Dimensions: Ø210mm × H270mm
| Target Specifications | Details |
|---|---|
| Target Size | Ø50mm × 3mm (Thickness varies by material) |
| Standard Targets | Includes one Ø50mm×3mm Steel target + one Ø50mm×3mm Aluminum target |
| Target Cooling | Water-cooled |
| Ultimate Vacuum | 5×10<sup>-5</sup> Pa (Reaches 5×10<sup>-3</sup> Pa in 10 minutes) |
| Power Supply | DC Constant-Current Supply: - Input: 220V AC - Output: 0-600V, 0-1.6A RF Supply & Matcher: 500W |
Generous Diameter: 200mm
Process Gas Flexibility: Accommodates Ar or other inert gases (User-provided cylinder and regulator required)
Gas Control: Precision Automated Control via Solenoid Flow Valve with Manual Override
State-of-the-Art Self-Circulating Chiller
Real-time Thickness Monitoring for Precision Coating Control
User-Friendly Touchscreen Interface
Versatile Applications: Ferroelectric/Conductive/Alloy/Semiconductor/Ceramic/Dielectric/Optical/Fluoride/Hard/PTFE Thin Films
Reliable Voltage: 220V 50Hz
Startup Power: Robust 3KW
Location Requirements:
Ensure placement on a sturdy table (Minimum: 130cm×60cm, Load Capacity ≥200kg)
Position external rotary pump and chiller optimally (Floor/Adjacent to Main Unit)
Total System Weight: Configurable 208-240kg. Requires a four-person team for transportation.
Operating Conditions:
Ideal Temperature Range: 15-25°C
Humidity Control: ≤75% RH
Provide a Dedicated 220V, 16A Circuit Breaker to ensure stable operation.
Ensure Adequate Ventilation within the operating environment and protect the instrument from direct sunlight exposure to maintain optimal performance.
Argon/Helium Gas Cylinders and Pressure Regulators must be User-Provided for Versatile Usage.
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