| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace meticulously designed for cutting-edge R&D applications within enterprises, prestigious universities, and renowned research institutes. This sophisticated equipment supports a diverse range of processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing tailored for advanced material research endeavors
Precision temperature control ensures consistent, reliable results
Compact design painstakingly optimized for modern lab environments
Product Features:
1. Engineered to facilitate processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and more with ease and efficiency.
2. Incorporates a highly reliable industrial computer coupled with a sophisticated PLC system, achieving seamless, fully automated control over essential parameters like furnace temperature, boat movement, gas flow, and valves, ensuring comprehensive automation throughout the entire process.
3. Features an intuitive, user-friendly human-machine interface, enabling effortless modification of process control parameters and real-time monitoring of various process statuses.
4. Offers a variety of process pipelines, granting users the convenience of selecting the most suitable options for their specific needs.
5. Equipped with robust software capabilities, including self-diagnostic tools that substantially minimize maintenance time, enhancing operational efficiency.
6. Automatic adjustment of the constant temperature zone, combined with cascade control, ensures the precise regulation of the actual process temperature within the reaction tube, maintaining optimal conditions for experimentation.
7. Incorporates comprehensive alarms and protective functions, safeguarding against over-temperature scenarios, thermocouple breakage, short circuits, and deviations in process gas flow, ensuring safe and reliable operation.
8. Offers customizable products to meet specific customer requirements, providing tailored solutions that align perfectly with individual project needs.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The vertical dual-zone CVD system mainly comprises:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump with essential connecting components
The system is outfitted with directional and swivel casters at the base, imparting a compact footprint and remarkable flexibility in mobility.
Designed for CVD processes, this system is ideal for universities, research centers, and industrial manufacturers conducting experiments and production involving chemical vapor deposition.
(Note: Structured for clarity while maintaining technical accuracy and natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Advanced touchscreen control with data recording for seamless operation
Dual-zone vertical design for precision-driven thermal management
Complete gas flow control system included for comprehensive functionality
Safety-focused design with robust multiple protection features
Customizable components tailored to specific research needs
Note: Specifications can be customized to meet your actual requirements. The system offers precision temperature control alongside efficient gas delivery for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This dual-zone sliding-track CVD tube furnace features a rail-guided sliding design, allowing rapid thermal transitions by horizontally moving the furnace. It seamlessly connects six gas sources, with precision flow measurement and control executed through a touchscreen 6-channel mass flow controller (MFC).
This high-temperature CVD system is intricately designed for universities, research institutions, and industrial manufacturers to conduct experiments and production that involve chemical vapor deposition (CVD).
Sliding-track mechanism offers swift thermal cycling for fast and efficient temperature changes
Multi-gas compatibility (6 independent channels) for versatile setups
Precision flow control with intuitive touchscreen MFC interface
Versatile applications in research and small-batch production, ensuring adaptability
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1) for superior thermal resistance
Vacuum flange set (1) to ensure secure connections
Key Features:
Unique sliding mechanism enables rapid thermal cycling, enhancing productivity
Six-channel precision gas control system for flawless operations
Research-grade vacuum capability for high-performance processing
Complete turnkey solution with all necessary accessories, ready for use
Industrial-grade construction with comprehensive safety protections
Tube stoppers (2) for secure material handling
O-ring seals for leak-proof operations
Protective gloves (1 pair) to ensure safety during use
Crucible hook (1) for easy material handling
PTFE tubing (3m) for chemical resistance and durability
Hex keys (2) for easy equipment adjustments
Operation manual for user-friendly guidance
This system is designed for Crafted to perfection, our state-of-the-art high-temperature CVD tube furnace is ideal for executing an array of CVD processes.Dive into its versatile applications, including:
The exquisite application of silicon carbide coating
Seamless conductivity testing on ceramic substrates
Innovative 2D material growth
Meticulous controlled growth of ZnO nanostructures
Precise atmosphere sintering of ceramic capacitors (MLCC)
In addition, it proudly serves as a dedicated furnace for superior graphene film growth. Designed for graphene preparation, the furnace boasts a sophisticated sliding rail base design, enabling effortless manual lateral movement to expose the tube to ambient room temperature for swift and efficient cooling.
Perfectly suited for CVD experiments that demand rapid heating and cooling rates,making it an impeccable choice for:
High-efficiency graphene synthesis endeavors
Diverse CVD applications requiring quick thermal cycling
Unmatched Key Advantages:
Exquisite precision in temperature control ensures superior growth of sensitive materials
The innovative sliding mechanism guarantees expedited processing times
Expansive versatility in application across cutting-edge material research fields
Meticulously optimized for both graphene and general CVD processes
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Essential Notes for Safe Operation
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Crucial Safety Precautions:
Refrain from opening the furnace chamber when the temperature is ≥200°C to safeguard against potential personal injury.
Ensure tube pressure never surpasses 0.02MPa (absolute pressure) during operation to prevent equipment damage due to overpressure.
Important Warning: Neglecting these precautions may lead to:
Severe personal harm
Irreparable equipment damage
Serious safety hazards
When the furnace temperature exceeds 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube to prevent risks.
Avoid simultaneous closure of both inlet and outlet valves during sample heating. If closure is necessary:
Diligently monitor pressure gauge readings continually
Promptly open the exhaust valve if absolute pressure exceeds 0.02MPa
This prevents dangerous situations such as tube rupture or flange ejection.
Equipment Application & Features
This cutting-edge high-temperature CVD tube furnace is engineered for chemical vapor deposition (CVD) processes, encompassing:
The expert coating of Silicon carbide (SiC)
Accurate conductivity testing on ceramic substrates
The precise controlled growth of ZnO nanostructures
The atmosphere sintering of ceramic capacitors (MLCC) with unmatched accuracy
Primary Users:
Our Roll-to-Roll Plasma-Enhanced LCD Touchscreen Automation by RJ, with its customizable specifications, is an essential tool for leading-edge innovators. It is specifically designed for universities, research institutions, and industrial manufacturers engaged in vapor deposition-related experiments and production. This solution is tailored for those who push the boundaries of technology.
Key Specifications:
Crafted with precision, the Alumina (AlO) furnace tube is engineered to withstand extreme temperatures, soaring up to an impressive 1600°C, ensuring robust and reliable performance.
Designed to excel under varying conditions, its vacuum & atmosphere-capable design offers unmatched adaptability and flexibility.
Equipped with a high-performance MoSi (molybdenum disilicide) heating element, it guarantees uncompromised efficiency and consistency in heat delivery.
The furnace chamber features ceramic fiber insulation, offering excellent thermal uniformity and energy efficiency, making it a sustainable choice for modern laboratories and production facilities.
Advantages:
Experience unrivaled stability with high-temperature precision, maintaining a remarkable accuracy of ±1°C for your critical research and development tasks.
Benefit from rapid heating and cooling capabilities, coupled with superior heat retention, for maximum efficiency and reduced downtime.
Designed with your safety and ease-of-use in mind, this system ensures a smooth and user-friendly operation throughout its lifecycle.
Its versatility opens a world of possibilities for advanced materials research, empowering you to explore new frontiers in technology.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Boasting an ultra-high temperature capability of 1700°C, powered by MoSi heating elements, this system sets a new standard for high-performance applications.
Enjoy precision multi-zone temperature control with an exceptional accuracy of ±1°C, allowing for meticulous thermal management.
Program your experiments effortlessly with programmable 30-segment thermal profiles, offering unparalleled control and customization.
A complete gas mixing system with 4-channel MFCs ensures precise and reliable gas delivery for your specialized processes.
Achieve industrial-grade vacuum performance that supports the most demanding research and production environments.
Safety Precautions:
To ensure utmost safety, refrain from opening the furnace chamber when temperatures are above 200°C, preventing the risk of personal injury. to prevent personal injury.
Maintain tube pressure below 0.02MPa (absolute pressure) during operation to evade equipment damage and ensure seamless functionality. during operation to avoid equipment damage from overpressure.
Warning: Failure to adhere to these safety measures may result in:
serious personal injury,
equipment damage,
and safety hazards, highlighting the importance of compliance.
Ensure that when the furnace temperature exceeds 1000°C, the tube is not under vacuum - maintain atmospheric pressure inside the tube for optimal safety. - maintain atmospheric pressure inside the tube.
Avoid the simultaneous closure of both inlet and outlet valves during sample heating for operational integrity. If valves must be closed:
Continuously monitor pressure gauge readings for anomalies,
and immediately open the exhaust valve if absolute pressure exceeds 0.02MPa to prevent hazardous situations.
Prevents hazardous situations (tube rupture, flange ejection, etc.)
Equipment Description
This advanced system seamlessly integrates:
a comprehensive gas flow control system,
an efficient liquid injection system,
multi-stage temperature-controlled growth zones,
and a highly effective water cooling system.
CNT Growth Furnace Specifications:
With a maximum operating temperature of: 1400°C, continuously adjustable from 0-1400°C, it offers exceptional versatility.
It features a vertical thermal field distribution, with dual-zone temperature control for precise thermal management.
A top-mounted liquid injection port, complete with flow guide components, ensures seamless integration and functionality.
This state-of-the-art CNT/thin-film CVD equipment facilitates continuous, uninterrupted growth processes,
enabling precise thermal management
for controlled nanostructure synthesis. It also supports integrated liquid/gas phase delivery,
empowering complex material deposition with ease and precision. for complex material deposition
Experience the forefront of material innovation with our Carbon Nanotube (CNT) synthesis components, meticulously engineered for superior performance.
Technical Specifications - Unveiling the Carbon Nanotube/Nanowire CVD Growth Furnace, a masterpiece of precision engineering designed to meet the highest standards of nanotechnology.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Stainless Steel Flange - Crafted for reliability and resilience, our flanges ensure a secure and efficient connection every time.
The system boasts an advanced stainless steel vacuum flange assembly, featuring precision stainless steel needle valves and a robust mechanical pressure gauge. The armored flange design incorporates a thermocouple extension, enabling precise and reliable temperature monitoring at the inlet.
Key Features:
Engineered from high-purity alumina, this tube guarantees contamination-free growth, ensuring the integrity of your materials.
Precision temperature control (±1°C) is maintained over an extensive 800mm uniform zone, delivering consistent and reliable thermal performance.
Note: Every specification is subject to meticulous technical verification. Our design is tailored for the synthesis of advanced nanomaterials in rigorously controlled atmospheres.
Equipped with robust SiC heating elements, our system ensures ultra-high temperature operations, meeting the demands of the toughest applications.
The system features a complete gas/vacuum interface with advanced measurement capabilities to ensure optimal performance.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a tube furnace specially designed for CVD processes, featuring:
A sophisticated double-layer shell structure equipped with an efficient air-cooling system, maintaining the outer surface temperature below 55°C
A 30-segment PID programmable intelligent temperature control system integrated with advanced phase-angle firing technology for meticulous heating precision
Alumina polycrystalline fiber chamber lining offering superior thermal insulation and consistent temperature distribution throughout
Applications:
Ideal for Silicon carbide (SiC) coating applications
Perfect for conductivity testing of ceramic substrates
Facilitates controlled growth of ZnO nanostructures with precision
Suitable for atmosphere sintering of ceramic capacitors (MLCC)
Key Advantages:
Intuitive user-friendly touchscreen interface for seamless operation
Eco-friendly and energy-efficient thermal design for sustainable use
Delivers research-grade temperature uniformity for accurate results
Versatile system designed for advanced material processing needs
Enables fully automated operation with the convenience of unattended capability
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber specifically designed for contamination-sensitive processes ensures the purity and quality of your work.
Precision 3-zone temperature monitoring system (±1°C)
Offers research-grade vacuum capability with pressure levels down to 10³ Pa
Complete gas flow control through an advanced triple MFC channel system
Constructed with industrial-grade components providing extended durability and reliability
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