| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace carefully crafted for R&D applications in enterprises, universities, and research institutes. This versatile equipment supports an array of processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities for cutting-edge material research
Precision temperature control ensuring consistent, reliable results
Compact design ideal for laboratory environments
Product Features:
1. Adaptable to processes like polysilicon, silicon nitride, diffusion, oxidation, and annealing among others.
2. Employs a highly dependable industrial computer + PLC system for full automation—managing furnace temperature, boat movement, gas flow, and valves with precision.
3. Boasts an intuitive human-machine interface for seamless modification of process parameters and real-time status displays.
4. Offers a variety of process pipelines for user convenience and selection.
5. Equipped with advanced software functionalities, including self-diagnostic tools, significantly minimizing maintenance time.
6. Automatically adjusts the constant temperature zone and employs cascade control, ensuring meticulous regulation of the actual process temperature in the reaction tube.
7. Includes comprehensive alarms and protective features against over-temperature, thermocouple issues, and process gas flow deviations.
8. Customization options available to meet unique customer needs.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The state-of-the-art vertical dual-zone CVD system comprises:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump along with essential connecting components
The system is thoughtfully equipped with directional and swivel casters ensuring a compact footprint and unparalleled mobility.
Purposefully designed for CVD processes, this system stands as the epitome of excellence, making it the ideal choice for universities, research centers, and industrial manufacturers engaging in both experimental ventures and full-scale production involving chemical vapor deposition.
(Note: Structured for clarity while maintaining technical accuracy and a natural flow in English.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Featuring a 3-Channel Mass Flow Control System
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Enhanced touchscreen control with integrated data recording capability
Innovative dual-zone vertical design ensuring optimal thermal management
Comprehensive gas flow control system included for precision
A design with safety at its core, offering multiple protection features
Customizable components tailored for unique research needs
Note: Specifications can be customized to meet specific requirements. This system masterfully combines precise temperature control with efficient gas delivery, making it ideal for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This state-of-the-art dual-zone sliding-track CVD tube furnace boasts a cutting-edge rail-guided sliding design, enabling rapid heating and cooling of materials by horizontally maneuvering the furnace. It seamlessly connects to six gas sources, offering precise flow measurement and control via a user-friendly touchscreen 6-channel mass flow controller (MFC).
This sophisticated high-temperature CVD system is crafted primarily for prestigious universities, research institutions, and leading industrial manufacturers to facilitate experiments and production activities related to cutting-edge chemical vapor deposition (CVD).
Innovative sliding-track mechanism ensures rapid thermal cycling
Compatible with multiple gas types (6 independent channels for tailored use)
Unmatched precision in flow control thanks to the intuitive touchscreen MFC interface
Perfectly suited for versatile applications in both research and small-batch production environments
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
Revolutionary sliding mechanism that enables rapid thermal cycling
Precision-engineered six-channel gas control system
Research-grade vacuum capabilities for superior performance
Complete turnkey solution with all essential accessories included
Built to industrial-grade standards with robust safety protections
Tube stoppers (2)
O-ring seals to ensure integrity
Protective gloves (1 pair) for safe handling
Crucible hook (1) for ease of use
PTFE tubing (3m) for reliable connectivity
Hex keys (2) for maintenance and setup
Comprehensive operation manual
This system is meticulously engineered for CVD processes, including a variety of cutting-edge functionalities:
Advanced Silicon Carbide Coating Technology
Innovative Conductivity Testing for Ceramic Substrates
Pioneering 2D Material Growth Capabilities
Precision-Controlled Growth of ZnO Nanostructures
Atmospheric Sintering Expertise for Ceramic Capacitors (MLCC)
Furthermore, it functions as an exceptional dedicated graphene film growth furnace, specifically engineered for graphene preparation. This furnace boasts a sophisticated sliding rail base design, facilitating manual lateral movement that allows exposure of the tube to room temperature for expedited cooling.
This state-of-the-art equipment is particularly tailored for CVD experiments demanding swift heating and cooling rates,rendering it perfect for high-tech applications such as:
Efficient, high-yield graphene synthesis
Other specialized CVD processes requiring rapid thermal cycling
Key Advantages of Our System:
Precision Temperature Control Systems ensuring meticulous handling of sensitive material growth
Distinctive Sliding Mechanism facilitating faster processing and turnaround times
Diverse Application Potential across the spectrum of advanced material research domains
Engineered for Optimal Performance in Both Graphene and General CVD Processes
Sliding Rail Tube Furnace Specifications Overview
Furnace Attributes
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Reliable Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW | Robust and Efficient
Comprehensive Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Advanced Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Critical Information and Cautions
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications and Compliance
| ISO Certification | CE Certification | Ensuring Quality and Safety
Essential Safety Precautions:
Never open the furnace chamber when temperature is ≥200°C to avoid potential personal harm.
Maintain tube pressure below 0.02MPa (absolute pressure) during operation to prevent equipment damage due to overpressure.
Important Warning: Neglecting these precautions could lead to:
Severe personal injury
Significant equipment damage
Potential safety risks
When operating at temperatures >1000°C, the tube must not be under vacuum - ensure atmospheric pressure is maintained within the tube.
Avoid simultaneous closure of both inlet and outlet valves during sample heating. If valve closure is necessary, ensure:
Continuous monitoring of pressure gauge readings
Immediate action by opening exhaust valve if absolute pressure exceeds 0.02MPa
This prevents hazardous conditions such as tube rupture or flange ejection.
Equipment Application & Features Overview
This premier high-temperature CVD tube furnace is crafted for chemical vapor deposition (CVD) processes, including:
Advanced Silicon Carbide (SiC) Coating
Cutting-Edge Conductivity Testing of Ceramic Substrates
Precision-Controlled Growth of ZnO Nanostructures
Atmosphere Sintering of Ceramic Capacitors (MLCC)
Targeted Primary Users:
HENAN RUNJING INSTRUMENT EQUIPMENT CO., LTD proudly supports universities, leading research institutions, and industrial manufacturers by providing cutting-edge solutions for vapor deposition-related experiments and production processes.
Key Specifications:
The RJ PVD Coating Machine features an Alumina (AlO) furnace tube capable of withstanding extreme temperatures up to 1600°C, ensuring robustness and reliability.
Its design accommodates both vacuum and atmospheric conditions, offering unparalleled flexibility for diverse applications.
The heating element is crafted from high-performance MoSi (molybdenum disilicide), ensuring efficient thermal conductivity.
The furnace chamber is lined with ceramic fiber insulation, providing excellent thermal uniformity and superior energy efficiency.
Advantages:
Experience precision with high temperature stability, maintaining a remarkable ±1°C accuracy.
Benefit from rapid heating and cooling capabilities, combined with exceptional heat retention for optimal results.
Safe & user-friendly operation ensures peace of mind during every usage.
Versatile enough for advanced materials research, paving the way for groundbreaking discoveries.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System:
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System:
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
The system boasts an ultra-high temperature capability of 1700°C, facilitated by MoSi heating elements for unmatched performance.
Achieve precision with multi-zone temperature control, offering an exact ±1°C accuracy.
Customize your processes with programmable 30-segment thermal profiles, tailored to your specific needs.
Experience a complete gas mixing system, featuring 4-channel MFCs for versatile applications.
The industrial-grade vacuum system ensures dependable performance under rigorous conditions.
Safety Precautions:
For safety, refrain from opening the furnace chamber when the temperature is equal to or exceeds 200°C. This prevention method helps avoid potential personal injury.
Ensure that the tube pressure never surpasses 0.02MPa (absolute pressure) while in operation. This precaution is crucial to avert equipment damage due to overpressure.
Warning: Neglecting these precautions may lead to:
Serious personal injury
Equipment damage
Safety hazards
When the furnace temperature exceeds 1000°C, maintain atmospheric pressure inside the tube by avoiding vacuum conditions. This ensures optimal safety and equipment protection.
Avoid simultaneously closing both inlet and outlet valves during sample heating. If circumstances require closing the valves:
Continuously monitor pressure gauge readings to ensure safe operation.
Open the exhaust valve immediately if absolute pressure exceeds 0.02MPa.
This practice prevents hazardous situations such as tube rupture or flange ejection.
Equipment Description:
This innovative system boasts integration of:
A sophisticated gas flow control system
A highly efficient liquid injection system
Multi-stage temperature-controlled growth zones for precision processing
An advanced water cooling system
CNT Growth Furnace Specifications:
Maximum operating temperature is reliably adjustable: Up to 1400°C, with continuous adjustability from 0-1400°C.
Vertical thermal field distribution ensures even temperature spread, achieved with state-of-the-art dual-zone temperature control.
Features a top-mounted liquid injection port, complete with flow guide components for precision.
This state-of-the-art CNT/thin-film CVD equipment facilitates:
Continuous, uninterrupted growth processes for superior results.
Delivers precise thermal management, ensuring controlled nanostructure synthesis with unparalleled accuracy.
Integrates liquid/gas phase delivery systems, optimizing complex material deposition for innovative applications.
Components for the Synthesis of Carbon Nanotubes (CNT)
Technical Specifications - Advanced CVD Growth Furnace for Carbon Nanotube/Nanowire Fabrication
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Premium Stainless Steel Flange
The system boasts a robust stainless steel vacuum flange assembly, seamlessly integrated with high-quality stainless steel needle valves and a reliable mechanical pressure gauge. This armored flange is engineered to allow precise thermocouple extension to the inlet, ensuring meticulous temperature monitoring.
Key Features:
High-purity alumina tube, ensuring contamination-free nanomaterial growth
Precision temperature control, maintaining ±1°C across an 800mm uniform zone for optimal consistency
Note: All specifications require technical verification. The system is meticulously designed for the advanced synthesis of nanomaterials under strictly controlled atmospheric conditions.
Durable SiC heating elements engineered for ultra-high temperature applications
Comprehensive gas/vacuum interface equipped with sophisticated measurement capabilities
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a state-of-the-art tube furnace expertly designed for CVD processes, featuring:
A double-layer shell structure enhanced with an efficient air-cooling system, maintaining the surface temperature below 55°C to ensure safety
30-segment PID programmable intelligent temperature control with advanced phase-angle firing for precise and efficient heating
Alumina polycrystalline fiber chamber lining for superior thermal insulation and consistent temperature distribution across the chamber
Applications:
Silicon carbide (SiC) coating for enhanced material properties
Conductivity testing of cutting-edge ceramic substrates
Controlled synthesis of ZnO nanostructures for innovative applications
Atmosphere sintering of multi-layer ceramic capacitors (MLCC) with precision
Key Advantages:
Intuitive user-friendly touchscreen interface for seamless operations
Energy-efficient thermal design, reducing operational costs
Research-grade temperature uniformity for precise experimental conditions
Versatility in handling a wide range of advanced material processing tasks
Fully automated operation with capabilities for unattended, continuous operation
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber tailored for contamination-sensitive manufacturing processes
Precision 3-zone temperature monitoring (±1°C) for unparalleled accuracy
Research-grade vacuum capability achieving pressures down to 10³ Pa for optimal conditions
Complete control of gas flow with sophisticated triple MFC channels
Industrial-grade components built for exceptional durability and reliability
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