| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
Suppliers with verified business licenses
Equipment Introduction
The RJ150-XK is a tubular diffusion/oxidation furnace designed to elevate R&D applications to new heights in enterprises, universities, and research institutes. This state-of-the-art equipment supports a diverse range of processes, including:
Polysilicon and silicon nitride deposition
Diffusion
Oxidation
Annealing
Versatile processing capabilities tailored for cutting-edge material research
Precision temperature control providing unmatched consistency and accuracy in results
Compact design optimized to seamlessly integrate into lab environments
Product Features:
1. Expertly designed to handle processes such as polysilicon, silicon nitride, diffusion, oxidation, annealing, and beyond.
2. Powered by a highly reliable industrial computer + PLC system, ensuring comprehensive automation in controlling furnace temperature, boat movement, gas flow, and valves, empowering users with complete process automation.
3. User-friendly human-machine interface for effortless modification of process control parameters and real-time display of process statuses.
4. Offers multiple process pipelines, providing users the convenience of choice.
5. Robust software functionality with self-diagnostic tools to greatly reduce maintenance times.
6. Automatic adjustment of the constant temperature zone and advanced cascade control deliver precise regulation of the actual process temperature within the reaction tube.
7. Equipped with alarms and protective features for over-temperature, thermocouple breakage, short circuits, and deviations in process gas flow, safeguarding your processes.
8. Customizable products available to meet specific customer requirements.
Technical Specifications
| Model | KJ150-XK |
|---|---|
| Operating Temperature | ≤1300ºC |
| Wafer Size | 2~8 inches (round wafers) |
| Number of Process Tubes | 1~2 tubes per unit |
| Constant Temperature Zone Length | 300~600mm |
| Constant Temperature Zone Accuracy | ≤±0.5ºC |
| Temperature Stability | ≤±0.5ºC/24h |
| Temperature Ramp Rate | Max heating rate: 10ºC/min, Max cooling rate: 5ºC/min |
| Safety Alarms & Protections | Over-temperature, thermocouple breakage, thermocouple short circuit, and process gas flow deviation alarms and protection functions |
Technical Specifications
| Parameter | Specification |
|---|---|
| Heating Zone Length | 400mm |
| Furnace Tube Dimensions | Diameter: 50mm, Length: 900mm |
| Furnace Tube Material | High-purity quartz tube with built-in 0.2mm porous quartz plate (customizable) |
| Operating Temperature | ≤1100°C |
| Maximum Temperature | 1200°C |
| Temperature Sensor | Type N thermocouple |
| Temperature Control | Intelligent 30-segment PID programmable microcomputer control with auto-tuning |
| Temperature Accuracy | ±1°C |
| Temperature Protection | Over-temperature and thermocouple breakage protection |
| Heating Rate | 0-20°C/min |
| Heating Element | Alloy resistance wire |
| Operating Voltage | AC220V, single-phase, 50Hz |
| Maximum Power | 3KW |
| Furnace Chamber Material | Polycrystalline fiber lining with excellent insulation, high reflectivity, and uniform temperature distribution |
| Flange | Stainless steel vacuum flange, easy to disassemble |
| Sealing System | O-ring compression seal between furnace tube and flange, reusable, high airtightness |
| Fluidization Zone | 1. Reaction gas uniformly passes through the reaction zone. 2. Solid particles are fluidized by gas in the heating zone. 3. Openable furnace design allows easy removal of quartz tube and processed particles after experiments. |
| Note | Excessive gas flow may cause particles to escape the heating zone. Adjust gas flow according to particle size. |
| Shell Structure | Double-layer shell with air-cooling system, openable design |
| Furnace Structure | Vertical structure |
| Parameter | Specification |
|---|---|
| Internal Temperature | ≤45ºC |
| Measurement & Control Devices | |
| Name | Dual-channel Mass Flow Controller (MFC) |
| Gas Channels | 2 channels |
| Flow Control | Digital display, each gas line with independent needle valve control |
| Connection Method | Double ferrule fitting |
| Flow Meter | Mass flow meter |
| Flow Range | MFC1: N 0-10 SLM MFC2: CO 0-10 SLM |
| Gas Mixing | Equipped with a precision gas mixing chamber |
| Power Supply | 220V, 50Hz |
| Operating Ambient Temp. | 5ºC~45ºC |
| Standard Accessories | Main unit ×1, high-seal flanges ×1 pair, quartz tube ×1, sealing rings ×4, high-temperature gloves ×1 pair, crucible hook ×1, hex wrench for flange disassembly ×1, warranty card & manual ×1 set |
Equipment Introduction
The cutting-edge vertical dual-zone CVD system is comprised of:
A 1200°C dual-zone tube furnace
A 3-channel mass flow controller (MFC) gas supply system
A 2L/s vacuum pump with expertly designed connecting components
The system is thoughtfully equipped with directional and swivel casters at the base, ensuring seamless mobility and positioning ease within your lab space. Boasting a compact footprint and exceptional flexible mobility, this system is designed for seamless integration into any setting..
Designed for unparalleled efficiency in CVD processes,this state-of-the-art system is the ideal choice for universities, prestigious research centers, and industrial manufacturers, enabling precision experiments and production tasks involving chemical vapor deposition techniques.
(Note: Crafted with meticulous attention to clarity, ensuring technical precision and a natural English flow.)
Fluidized Bed Tube Furnace Specifications
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Display | LCD touch screen |
| Tube Diameter | 40mm (OD) |
| Tube Material | Custom high-purity quartz tube |
| Furnace Tube Length | Approx. 1100mm (customizable) |
| Heating Element | Premium heating wire |
| Heating Rate | 0-10°C/min |
| Temperature Control | - Programmable 30-segment time-temperature curves - Touchscreen multi-segment PID control - Data logging with Excel export capability - Built-in over-temperature and thermocouple failure protection |
| Thermocouple | Type N thermocouple |
| Sealing Method | Custom stainless steel vacuum flange with sealing |
| Furnace Chamber | - Double-layer steel shell with dual cooling fans - Dual-zone vertical open structure for easy tube access - Alumina refractory fiber lining for energy efficiency |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V, 50Hz |
| Power Rating | 6KW (customizable) |
Gas Delivery System: Featuring an advanced 3-Channel Mass Flow Control System for optimal performance
| Parameter | Specification |
|---|---|
| Power Supply | 220V/50Hz, maximum output 18W |
Key Features:
Experience advanced touchscreen control, complete with intuitive data recording capabilities
Dual-zone vertical design ensures superior thermal management and efficiency
Comprehensive gas flow control system included for your convenience
Prioritizes safety with a robust design that includes multiple protection features
Customizable components to meet the specific needs of your research
Note: Specifications are customizable to align with your precise requirements. This system harmonizes precision temperature control with efficient gas delivery, perfect for advanced CVD applications.
| Parameter | Specification |
|---|---|
| Maximum Pressure | 3×10 Pa |
| Gas Channels | Can simultaneously connect 3 gas sources to slightly positive pressure |
| Flow Meter | Mass flow meter (other ranges optional) |
| Channel A Range | 1 SLM |
| Channel B Range | 1 SLM |
| Channel C Range | 1 SLM |
| Gas Line Pressure | -0.1 ~ 0.15 MPa |
| Accuracy | ±1% F.S. |
| Shut-off Valve | Stainless steel |
| Gas Line Tubing | 1/4" stainless steel tube |
Vacuum System Components
| Component | Specification |
|---|---|
| Vacuum Pump | 2L/s vacuum pump with silicone hose for rapid gas exchange in furnace tube |
| Vacuum Gauge | Included (standard configuration) |
Primary Application:
This innovative dual-zone sliding-track CVD tube furnace boasts a rail-guided sliding design,facilitating rapid heating and cooling of materials by dynamically moving the furnace horizontally. It can be connected to six gas sources,ensuring precise flow measurement and control through a state-of-the-art touchscreen 6-channel mass flow controller (MFC).
This high-temperature CVD system is meticulously crafted for universities, leading research institutions, and industrial manufacturers to execute experiments and scale production processes related to chemical vapor deposition (CVD) effortlessly.
Innovative Sliding-track mechanism enables fast and efficient thermal cycling
Multi-gas compatibility featuring six independent channels
Ensures precision flow control via an intuitive touchscreen MFC interface
Offers versatile applications ideal for research and small-batch production endeavors
| Parameter | Specification |
|---|---|
| Furnace Access Mode | Swing-open design |
| Furnace Movement | Rail-guided horizontal sliding for rapid heating/cooling |
| Chamber Material | Alumina refractory fiber |
| Heating Element | Aluminum-containing heating wire |
| Maximum Temperature | 1200°C |
| Operating Temperature | ≤1100°C |
| Heating Rate | ≤20°C/min (Recommended: 15°C/min) |
| Heating Zones | Dual-zone |
| Total Zone Length | 200mm + 200mm |
| Tube Material | High-purity quartz |
| Tube Diameter | 60mm |
| Sealing Method | - Quick-release flange for material loading - Stainless steel vacuum flange with silicone seal |
| Control System | Multi-segment intelligent PID programming |
| Temperature Sensor | Type N thermocouple |
| Safety Alarms | Over-temperature & thermocouple failure alarms |
| Power Supply | 220V, 50Hz |
Gas Delivery System (KJ-6Z)
| Parameter | Specification |
|---|---|
| Operating Temperature | 5~45°C |
| Maximum Pressure | 3×10 Pa |
| Gas Channels | 6 independent gas inputs |
| Flow Meter Type | Mass flow meter (other ranges available at same cost) |
| Channel A Range | 0-300 SCCM |
| Channel B Range | 0-300 SCCM |
| Channel C Range | 0-300 SCCM |
| Channel D Range | 0-300 SCCM |
| Channel E Range | 0-300 SCCM |
| Channel F Range | 0-300 SCCM |
| Line Pressure | -0.1~0.15 MPa |
| Valves | Stainless steel shut-off valves |
| Tubing | Stainless steel |
Vacuum System
| Component | Specification |
|---|---|
| Pump System | Molecular pump unit with connecting pipes |
| Power | 220V/50Hz |
| Mobility | Wheel-mounted base for easy movement |
| Ultimate Vacuum | 6.67×10³ Pa |
Standard Accessories
Quartz furnace tube (1)
Vacuum flange set (1)
Key Features:
Unique sliding mechanism facilitates rapid thermal cycling
Features a six-channel precision gas control system
Provides research-grade vacuum capability
Complete turnkey solution with all necessary accessories included
Constructed with industrial-grade materials and safety protections
Tube stoppers (2)
O-ring seals
Protective gloves (1 pair)
Crucible hook (1)
PTFE tubing (3m)
Hex keys (2)
Operation manual
This system is masterfully engineered for state-of-the-art CVD processes, offering capabilities such as:
Exquisite silicon carbide coating applications
Meticulous conductivity testing of ceramic substrates
Pioneering 2D material growth
Skillful and controlled growth of ZnO nanostructures
Precision atmosphere sintering of ceramic capacitors (MLCC)
It further excels as a dedicated graphene film growth furnace for expert-level graphene synthesis. The furnace boasts a cutting-edge sliding rail base design, facilitating manual lateral movement to swiftly expose the tube to ambient temperatures for exceptionally rapid cooling.
This advanced equipment is particularly designed for CVD experiments demanding rapid heating and cooling rates, positioning it as ideal for:
Efficient and high-yield graphene synthesis
Other CVD applications necessitating brisk thermal cycling
Key Advantages:
Precision temperature control ensures superior growth of sensitive materials
Innovative sliding mechanism promotes expedited processing
Versatile applications catered across the spectrum of advanced material research
Engineered for both specialized graphene and general CVD processes
Sliding Rail Tube Furnace Specifications
Furnace Section
| Parameter | Specification |
|---|---|
| Furnace Structure | Sliding rail design |
| Maximum Temperature | 1200°C |
| Continuous Operating Temperature | ≤1100°C |
| Heating Rate | Up to 20°C/min (Recommended: 10°C/min) |
| Heating Zone Length | 300mm (Single zone) |
| Heating Element | Phase-resistant heating wire |
| Thermocouple | Type K |
| Temperature Accuracy | ±1°C |
| Tube Diameter Options | Φ50, Φ60, Φ80 |
| Tube Material | High-purity quartz |
| Temperature Controller | PID intelligent program control |
| Vacuum Flange | 304 stainless steel - Left flange: Equipped with needle valve + ball valve - Right flange: KF25 interface with baffle valve |
Power Supply
| Input Power | Single-phase 220V, 50Hz, 3KW |
Vacuum System
| Component | Specification |
|---|---|
| Rotary Vane Pump with Digital Gauge | - Ultimate vacuum: 10³ Torr - Tube vacuum: 10² Torr - Pumping speed: 4CFM (2L/s, 120L/min) - Options: Rotary vane pump/diffusion pump/molecular pump available |
Mass Flow Controller System
| Parameter | Specification |
|---|---|
| Channels | 3-channel high precision MFC |
| Flow Range | MF1-MF3: 50-1000sccm adjustable |
| Features | - Mixing chamber at bottom - 3 manual stainless steel needle valves |
Important Notes
| Warning | Description |
|---|---|
| Pressure Limit | Tube pressure must not exceed 0.02MPa |
| Gas Cylinder Safety | Must use pressure reducer (0.01-0.1MPa recommended) |
| High Temp Operation | Above 1000°C: Maintain atmospheric pressure |
| Gas Flow Limit | <200SCCM to protect quartz tube |
| Quartz Tube Limit | Continuous use <1100°C |
| Valve Warning | Never close both valves during heating |
Certifications
| ISO Certification | CE Certification |
Safety Precautions:
Never open the furnace chamber when temperature is ≥200°C to safeguard against personal injury.
Ensure tube pressure remains below 0.02MPa (absolute pressure) during operation to prevent equipment damage due to overpressure.
Warning: Neglecting these precautions may lead to:
Severe personal injury
Substantial equipment damage
Critical safety hazards
When furnace temperature exceeds 1000°C, ensure the tube is not under vacuum - maintain atmospheric pressure within the tube.
Avoid simultaneously closing both inlet and outlet valves during sample heating. If valve closure is necessary:
Continuously monitor pressure gauge levels
Promptly open exhaust valve if absolute pressure rises above 0.02MPa
Prevents potential hazards such as tube rupture and flange ejection.
Equipment Application & Features
This high-temperature CVD tube furnace is expertly designed for chemical vapor deposition (CVD) processes, including:
Advanced silicon carbide (SiC) coating applications
Experience unparalleled precision with our advanced Conductivity Testing of Ceramic Substrates, designed to deliver the results you need with exceptional accuracy.
Discover the Controlled Growth of ZnO Nanostructures, a process perfected to meet the demands of cutting-edge applications.
Our innovative Atmosphere Sintering of Ceramic Capacitors (MLCC) ensures optimal performance and reliability for your electronic components.
Primary Users:
Our equipment is the go-to choice for Universities, Research Institutions, and Industrial Manufacturers. Ideal for conducting vapor deposition-related experiments and production with superior efficiency.
Key Specifications:
Featuring an Alumina (AlO) Furnace Tube, our system withstands temperatures up to an impressive 1600°C, ensuring reliable performance under extreme conditions.
Innovatively designed to be both Vacuum and Atmosphere-Capable, catering to a wide range of experimental needs.
Equipped with a high-performance MoSi (Molybdenum Disilicide) Heating Element, guaranteeing consistent and efficient heat distribution.
The Furnace Chamber boasts Ceramic Fiber Insulation, providing excellent thermal uniformity and unmatched energy efficiency, setting a new standard in thermal management.
Advantages:
Benefit from unparalleled High Temperature Stability with a precision of ±1°C, ensuring your experiments stay on track.
Our system offers Rapid Heating/Cooling with Superior Heat Retention, making it an indispensable tool for dynamic research environments.
Engineered for Safe and User-Friendly Operation, our equipment prioritizes both user safety and ease of use.
Designed to be Versatile for Advanced Materials Research, it easily adapts to your evolving research requirements.
| Parameter | Specification |
|---|---|
| Maximum Temperature | 1700°C |
| Operating Temperature | 1600°C |
| Display | LED Screen |
| Tube Diameter | 80mm (OD) |
| Tube Material | Alumina Tube |
| Heating Zone Length | 220+220+220mm (with gaps between zones) |
| Heating Element | MoSi (Molybdenum Disilicide) |
| Heating Rate | 0-5°C/min |
| Temperature Control | - PID automatic power control via SCR (Silicon Controlled Rectifier), phase-angle firing with current-limiting resistor - 30 programmable segments for ramp/soak control - Built-in PID auto-tuning with over-temperature & thermocouple failure protection - Over-temperature alarm allows unattended operation |
| Thermocouples | 3 control thermocouples (one per zone, outer tube) + 1 monitoring thermocouple (inner tube) |
| Temperature Accuracy | ±1°C |
| Furnace Structure | - Double-layer steel shell with dual cooling fans (surface temp <60°C) - Fixed non-openable furnace design |
| Vacuum Flange | Stainless steel vacuum flange with valve |
| Operating Voltage | 220V 50Hz |
| Maximum Power | 6kW |
Gas Delivery System
| Component | Specification |
|---|---|
| 4-Channel Mass Flow Controllers | - MFC1: 0-100sccm - MFC2: 0-200sccm - MFC3: 0-500sccm - MFC4: 0-200sccm |
| Gas Mixing | - Bottom-mounted mixing chamber with liquid release valve - 4 manual stainless steel needle valves for gas control |
Vacuum System
| Component | Specification |
|---|---|
| Vacuum Pump + Gauge | Rotary vane pump achieves 10Pa vacuum (cooled state) |
Key Features:
Experience Ultra-High Temperature Capability of up to 1700°C with MoSi Heating Elements, providing unmatched thermal performance.
Achieve Precision Multi-Zone Temperature Control with a remarkable ±1°C accuracy, ensuring consistent results.
Our Programmable 30-Segment Thermal Profiles allow for tailored experimentation, enhancing research flexibility.
Includes a Complete Gas Mixing System with 4-Channel MFCs, facilitating precise control of experimental conditions.
Our equipment delivers Industrial-Grade Vacuum Performance, meeting the rigorous demands of modern research.
Safety Precautions:
Safety First: Never open the furnace chamber when the temperature is ≥200°C to ensure personal safety and equipment longevity. to prevent personal injury.
Maintain Safe Operation: Tube pressure must never exceed 0.02MPa (absolute pressure) to prevent damage. during operation to avoid equipment damage from overpressure.
Warning: Please be aware that failure to adhere to these precautions may result in:
Serious Personal Injury—safety protocols are paramount.
Equipment Damage—ensure longevity by following the guidelines.
Safety Hazards—strict compliance is necessary for safe operation.
When the Furnace Temperature exceeds 1000°C, it is crucial that the tube is not under vacuum. Always maintain atmospheric pressure inside the tube. - maintain atmospheric pressure inside the tube.
Avoid simultaneous closure of both inlet and outlet valves during sample heating to ensure safe operation and avoid pressure-related issues. If valve closure is unavoidable:
Continuously Monitor Pressure Gauge Readings to ensure levels remain within safe parameters.
Immediately open the Exhaust Valve if the absolute pressure exceeds 0.02MPa to prevent equipment failure.
This essential step prevents hazardous situations such as tube rupture or flange ejection.
Equipment Description
Our system integrates the latest in technological advancements, featuring:
State-of-the-Art Gas Flow Control System for precise experimental conditions.
Advanced Liquid Injection System to optimize material processing.
Multi-Stage Temperature-Controlled Growth Zones, designed for superior material synthesis.
Incorporating a Water Cooling System to maintain operational stability and efficiency.
CNT Growth Furnace Specifications:
Capable of reaching a Maximum Operating Temperature of 1400°C, continuously adjustable to suit various experimental needs. 1400°C (continuously adjustable from 0-1400°C)
Featuring Vertical Thermal Field Distribution with Dual-Zone Temperature Control for precise thermal management.
Equipped with a Top-Mounted Liquid Injection Port, complete with flow guide components for seamless operation. with flow guide components
This CNT/Thin-Film CVD Equipment is a powerhouse of innovation, enabling: an array of advanced applications in the field of nanotechnology and materials science.
Harness the power of unyielding growth momentum with seamless, uninterrupted workflows that propel your projects to new heights.
Experience unmatched precision in thermal management, ensuring optimal conditions for every process and application. Engineered to deliver meticulous control over nanostructure synthesis for superior material outcomes.
Our state-of-the-art integrated liquid/gas phase delivery system ensures smooth and precise material deposition every time. Designed for the sophisticated deposition of complex materials, this system is the epitome of technological advancement.
Our cutting-edge Carbon Nanotube (CNT) synthesis components are the cornerstone of advanced material development.
Technical Specifications - Engineered for excellence, our Carbon Nanotube/Nanowire CVD Growth Furnace sets the standard for innovation.
| Parameter | Specification |
|---|---|
| Equipment Name | Carbon Nanotube/Nanowire CVD Growth Furnace |
| Model | KJ-T1400V |
| Furnace Structure | Double-layer shell with air cooling system (surface temp <60°C), inner wall coated with imported alumina coating for high reflectivity and cleanliness |
| Maximum Power | 20KW |
| Voltage | AC 220V single-phase, 50/60Hz |
| Heating Element | Silicon carbide (SiC) rods |
| Max Operating Temp | 1400°C |
| Continuous Working Temp | Adjustable between 100-1400°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Alumina tube: OD 80mm × Length 1500mm |
| Heating Zone Length | 700mm + 400mm |
| Uniform Temp Zone Length | 800mm (±1°C) |
| Thermocouple | SEI thermocouple for temperature measurement and control |
| Temperature Control System | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
Composed of high-grade Stainless Steel, our flange delivers unmatched durability and performance.
This system features a premium stainless steel vacuum flange assembly, complete with precision stainless steel needle valves and a mechanical pressure gauge. The armored flange ensures thermocouple extensions reach the inlet for precise temperature monitoring.
Key Features:
Our high-purity alumina tube guarantees contamination-free growth for pristine material synthesis.
Precision temperature control with an impressive accuracy of ±1°C ensures consistency across the 800mm uniform zone.
Note: All specifications are subject to thorough technical verification. This equipment is meticulously designed for sophisticated nanomaterial synthesis under tightly regulated atmospheres.
Robust SiC heating elements provide reliable ultra-high temperature operation, paving the way for advanced industrial applications.
Our comprehensive gas/vacuum interface includes sophisticated measurement capabilities for precise environmental control.
Equipment Introduction
The LCD Touchscreen CVD High-Temperature Furnace is a state-of-the-art tube furnace expertly engineered for CVD processes, offering a suite of advanced features:
A robust double-layer shell structure paired with an efficient air-cooling system, designed to maintain a surface temperature below 55°C
Equipped with a 30-segment PID programmable intelligent temperature control featuring phase-angle firing for exacting heating precision
Alumina polycrystalline fiber chamber lining ensures exceptional thermal insulation and consistent temperature distribution
Applications:
Ideal for Silicon carbide (SiC) coating applications
Perfect for conductivity testing on ceramic substrates
Facilitates controlled growth of ZnO nanostructures with precision
Expertly crafted for atmosphere sintering of ceramic capacitors (MLCC)
Key Advantages:
Intuitive, user-friendly touchscreen interface for effortless operation
Energy-efficient thermal design reduces operational costs and enhances sustainability
Offers research-grade temperature uniformity for advanced scientific applications
Versatile and adaptable for a wide range of advanced material processing needs
Fully automated operation ensures maximum efficiency with unattended capability, providing peace of mind
High-Temperature Furnace Specifications
| Parameter | Specification |
|---|---|
| Furnace Structure | Double-layer shell with air cooling system (surface temp <55°C), inner wall coated with imported alumina coating for enhanced reflectivity and cleanliness |
| Maximum Power | 5KW |
| Voltage | AC 220V single-phase, 50Hz |
| Heating Element | Al-doped Fe-Cr-Al alloy (alumina-coated surface for extended lifespan) |
| Max Operating Temp | 1200°C |
| Continuous Working Temp | 1100°C |
| Heating Rate | 1-10°C/min |
| Furnace Tube Material & Dimensions | Quartz tube: OD 80mm × Length 1000mm |
| Heating Zone Length | Total 440mm |
| Uniform Temp Zone Length | 150mm (±1°C) |
| Control Interface | LCD touch screen |
| Thermocouple | Type N thermocouple, 3 calibrated thermocouples with real-time display on furnace screen |
| Temperature Control | 30-segment PID programmable control |
| Temperature Accuracy | ±1°C |
| Vacuum Sealing System | Two stainless steel vacuum flanges (pre-installed with vacuum gauge and shut-off valve) |
| High Vacuum System | - Control panel for molecular pump speed/vacuum level monitoring - Turbo molecular pump + dry scroll pump - All KF-25 standard connections between pumps and quartz tube |
| Vacuum Level | 6.7×10³ Pa (empty chamber, room temperature) |
| Gas Delivery System | Three mass flow controllers with ranges: • Channel 1: 1-100 sccm • Channel 2: 1-200 sccm • Channel 3: 1-500 sccm |
Key Features:
Ultra-clean alumina-coated chamber designed for contamination-sensitive processes, ensuring purity at every step Precision 3-zone temperature monitoring
provides impeccable accuracy at (±1°C)
Research-grade vacuum capability achieves down to 10³ Pa for unparalleled control
Complete gas flow control system equipped with triple MFC channels for precise management
Constructed with industrial-grade components for unmatched durability and extended lifespan
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