| Customization: | Available |
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| Application Field: | Aerospace, Automotive, Electronics, Marine, Medical Devices, Oil & Gas, Power Generation, Railways |
| Coating Material: | Metal |
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This equipment is a single-target magnetron sputtering coater with a tiltable sample stage. The angle between the sample stage and the target surface is adjustable, and magnetron sputtering coater can be used to make films with specific growth angles. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests.
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product name |
single target magnetron sputtering coater with tiltable sample stage |
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Product number |
RJ-MSZ180-60Q-I-DC-Q |
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sample stage |
Dimensions |
φ60mm |
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Heating temperature |
<=500ºC |
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Adjustable speed |
<=20rpm |
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Magnetic target gun |
Equipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness <=3mm |
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vacuum chamber |
Cavity size |
φ180mm X150mm |
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observation window |
omnidirectionally transparent |
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Cavity material |
High purity quartz |
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Lower flange |
Contains sample stage tilt mechanism and rotation mechanism |
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Opening method |
Removable top cover |
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Vacuum system |
Backing pump |
Low noise bipolar rotary vane pump |
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Molecular pump |
Low noise and high pumping speed turbomolecular pump |
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Vacuum measurement |
Composite vacuum gauge, range: 10-5~105Pa |
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Air extraction interface |
KF16 |
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Air extraction interface |
KF40 |
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Exhaust interface |
KF16 |
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System vacuum |
1.0×10-4Pa |
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Power supply |
AC 220V 50/60Hz |
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Pumping rate |
The pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s. |
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Power configuration |
Number of power supplies |
A set of DC power supply |
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Output Power |
300W |
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Other parameters |
Supply voltage |
AC220V,50Hz |
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Total power |
2kW |
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Overall size |
550mm X 350mm X400mm |
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