Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage

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Customization: Available
Application Field: Aerospace, Automotive, Electronics, Marine, Medical Devices, Oil & Gas, Power Generation, Railways
Coating Material: Metal
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  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
  • Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage
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Basic Info.

Model NO.
Made-to-order
Power Source
Electric
Transport Package
Wooden Case
Specification
Customized
Trademark
RJ

Product Description

Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage

CY-MSH500S-100F-II-DCRF-SS is a laboratory-specific magnetron sputtering coater with two target positions developed by our company. The magnetron sputtering coater equipment is equipped with a DC power supply and a radio frequency power supply, which can be used to prepare single or multilayer iron Electrical film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.

Features of magnetron sputtering coater:

a. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and speed, high coating rate, low sample temperature rise, and is a typical high-speed low-temperature sputtering.

b. The magnetron sputter target is equipped with a water-cooled interlayer. The water-cooled machine can effectively take away the heat and avoid the heat accumulation on the target surface, so that the magnetron sputter can work stably for a long time.

c. The sample stage adopts a reciprocating design, and the left side is equipped with a magnetic coupling push rod, which can push the sample stage left and right.

d. The whole machine adopts touch screen control, built-in one-button coating program, easy to operate, it is an ideal equipment for laboratory preparation of films
Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage

Technical parameters of magnetron sputtering coater:

Model RJ-MSH500S-100F-II-DCRF-SS
Input AC220V,50Hz
Total power 6KW
Ultimate vacuum degree 5x10-4Pa
Sample table parameters Size 100mm x 100mm
Reciprocating stroke 200mm
Magnetron sputtering head parameters Quantity 2-set, 2-inch
Cooling mode Water cooled, required flow rate10L/min
Water chiller 10L/min circulating water cooling
Vacuum chamber Size φ500mm x 490mm H
Material Stainless steel
Watch window φ100mm
Open mode front opening door
Gas flow controller 1channel 200sccm Ar;
Vacuum pump Molecular pump system pumping 600L/S
Film thickness gauge Quartz vibrating film thickness gauge, one set, Resolution 0.10 Å
Sputter power supply DC power supply: one set, 500W, for preparing metal films
RF power supply: one set, 500W, for non - metallic coating
Operating mode All-in-one computer operation
Overall dimensions 1090mm x 900mm x 1250mm
Total weight 350kg


Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
Lab Dual Target Magnetron Sputtering Coater with Reciprocating Sample StageLab Dual Target Magnetron Sputtering Coater with Reciprocating Sample Stage

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